@misc{GrudininSidelevBleykheretal., author = {Grudinin, V. A. and Sidelev, D. V. and Bleykher, G. A. and Yuriev, Yu N. and Krivobokov, V. P. and Berlin, E. V. and Grigoriev, V. Yu and Obrosov, Aleksei and Weiß, Sabine}, title = {Hot target magnetron sputtering enhanced by RF-ICP source for CrNx coatings deposition}, series = {Vacuum}, volume = {191}, journal = {Vacuum}, issn = {0042-207X}, doi = {10.1016/j.vacuum.2021.110400}, pages = {9}, abstract = {This article describes hot Cr target magnetron sputtering enhanced by a radio-frequency inductively coupled plasma (RF-ICP) source in an Ar + N2 atmosphere. Optical emission spectroscopy revealed an opportunity to perform magnetron sputtering in an inert (Ar) atmosphere, while the CrNx coating can be deposited on a substrate in a chemically reactive atmosphere formed by the RF-ICP source. High stability and repeatability of deposition process were observed, and the deposition rate of the CrNx coatings increased from 106 to 127 nm/min as N2 flow rate rose. The power of the RF-ICP source and the N2 flow rate can be used to tailor and control deposition conditions. The XRD and WDS measurements showed the effect of deposition conditions on the crystal structure and elemental composition of CrNx coatings. It was found that the change of substrate bias, RF-ICP source power and N2 flow rate result in variation of coating stoichiometry from pure Cr to CrN.}, language = {en} } @misc{AissaniFellahBelgrouneetal., author = {Aissani, Linda and Fellah, Mamoun and Belgroune, Ahlam and Obrosov, Aleksei and Samad, Mohammed Abdul and Alhussein, Akram}, title = {Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films}, series = {Surfaces and Interfaces}, volume = {26}, journal = {Surfaces and Interfaces}, issn = {2468-0230}, doi = {10.1016/j.surfin.2021.101441}, pages = {33}, abstract = {Structural and tribo-mechanical properties of Zr-O-N films deposited by reactive magnetron sputtering in a mixture of Ar (flow rate = 80 sccm), N2 (flow rate = 20 sccm) and O2 with a varying flow rate of 0 to 12 sccm were investigated. The films were characterized using scanning electron microscopy, energy dispersive x-ray analysis, atomic force microscopy, nanoindentation and wear tests. Oxygen content have a significant effect on the microstructure, wettability, tribo-mechanical properties of Zr-O-N films. The Zr-O-N films showed a dense structure with a mixture of zirconium oxides and nitrides and the preferred orientation changed from (111) ZrN to (200) ZrN with increasing O2 flow rate. The ZrON film, deposited at an oxygen flow rate of 10 sccm exhibited the highest contact angle (147°), the highest hardness (27.1 GPa), the lowest friction coefficient (0.36) and the lowest wear rate (5.8 × 10-7 mm3.Nm-1). The improvement in the tribological performance of the ZrON film deposited at 10 sccm is attributed to the improved hardness and increased H/E and H3/E2 ratios, due to the formation of a hard solid solution by the diffusion of oxygen.}, language = {en} } @misc{SalhiAissaniFellahetal., author = {Salhi, Faiza and Aissani, Linda and Fellah, Mamoun and Chadli, Abdel Hakim and Cheriet, Abderrahmane and Belgroune, Ahlam and Nouveau, Corinne and Obrosov, Aleksei and Samad, Mohammed Abdul and Alhussein, Akram}, title = {Experimental investigation of structural, wetting, mechanical and Tribological properties of TiZrN thin films deposited by magnetron sputtering}, series = {Surfaces and Interfaces}, volume = {27}, journal = {Surfaces and Interfaces}, issn = {2468-0230}, doi = {10.1016/j.surfin.2021.101519}, abstract = {TiZrN thin films were deposited on Si (100) wafers and XC100 steel substrates by reactive R.f. magnetron sputtering using titanium and zirconium targets in an Ar-N2 mixture atmosphere to evaluate the effect of varying Zr content (0 to 22.2 at.\%), on the film structure, surface wettability, hardness and wear resistance. The presence of different phases such as TiN, ZrN, and ZrO2 were confirmed by XRD analysis. Results showed that, the lattice parameter and film thickness increased while the crystallite size and average roughness decreased with increasing Zr content. Total surface energy between the film surface and testing liquids decreased with the addition of Zr. TiZrN film containing 18.3 at.\% of Zr showed the lowest surface energy of 38.7 mN/m, indicating its hydrophobicity. The nanoindentation measurements, friction and wear tests showed that the TiZrN thin film containing 18.3 at.\% of Zr had the best tribo-mechanical performance. The TiZrN (18.3 at.\% Zr) film exhibited the lowest friction coefficient (0.31), and the lowest wear rate (6.65 × 10-5 mm3/Nm), which corresponds to the highest H/E ∼ 0.139, and H3/E2 ∼ 0.49 GPa ratios. The improvement in the tribo-mechanical properties is attributed to the solid solution strengthening due to the incorporation of Zr atoms in TiN system, which results in the highest hardness of 25 GPa for TiZrN (18.3 at.\% Zr) film.}, language = {en} } @misc{GrudininBleykherKrivobokovetal., author = {Grudinin, V. A. and Bleykher, G. A. and Krivobokov, V. P. and Semyonov, O. V. and Obrosov, Aleksei and Weiß, Sabine and Sidelev, D. V.}, title = {Hot target magnetron sputtering enhanced by RF-ICP source: Microstructure and functional properties of CrNx coatings}, series = {Vacuum}, volume = {200}, journal = {Vacuum}, issn = {1879-2715}, doi = {10.1016/j.vacuum.2022.111020}, abstract = {CrNx coatings were deposited at high rates (100-130 nm/min) using hot Cr target magnetron sputtering enhanced by a radio-frequency inductively coupled plasma (RF-ICP) source in an Ar + N2 atmosphere. Besides separation of inert and reactive atmosphere, the RF-ICP source can be an effective tool for ion assistance in case of coating growth and to tailor film parameters. The effects of nitrogen flow rate and substrate bias potential on microstructure and functional properties of the CrNx coatings were investigated. An increase in nitrogen flow rate favored the formation of a looser microstructure of the coatings, while substrate biasing had the opposite effect. The functional properties were strongly dependent on the phase composition of the CrNx coatings. The change in coating microstructure significantly affected hardness, elastic modulus, adhesion, friction coefficients and corrosion resistance. The results indicated that ion assistance can be a key feature for regulating functional properties in the considered type of coating deposition. Cr2N and CrN compound coatings with high hardness (∼20 GPa) and low corrosion current density (icorr ∼ 3-5·10-9 A/cm2) in a 3.5 wt\% NaCl solution were obtained by high-rate deposition.}, language = {en} } @misc{BelgrouneAissaniAlhusseinetal., author = {Belgroune, Ahlam and Aissani, Linda and Alhussein, Akram and Zaabat, Mourad and Obrosov, Aleksei and Rtimi, Sami}, title = {In Vitro Corrosion and Wear Investigation of Multifunctional TiAlMoN Sputtered Coatings on Cold-Sprayed SS316L}, series = {ACS Applied Engineering Materials}, volume = {2}, journal = {ACS Applied Engineering Materials}, number = {2}, issn = {2771-9545}, doi = {https://doi.org/10.1021/acsaenm.3c00672}, pages = {345 -- 359}, abstract = {Although TiAlN has been thoroughly studied, there is still an ongoing demand for developing new-based TiAlN films with enhanced protection efficiency for a long lifetime and high load-bearing capability linked to friction and corrosion mechanisms. This work aims to present the effect of Mo content by studying the structural tribo-mechanical, wettability, and corrosion behaviors in TiAlMoN coatings deposited by magnetron sputtering on cold-sprayed stainless steel 316L substrates. TiAlMoN coatings showed a dense columnar structure with the coexistence of titanium and molybdenum nitrides, and TiN (200) preferred orientation changed to TiN(111) with increasing Mo content. The surface energy of the TiAlMoN coatings decreased gradually with the increase in Mo content. The TiAlMoN coating containing 16.09 atom \% Mo possesses the highest hardness and Young's modulus (29.5 and 334.5 GPa, respectively) and the maximum H/E and H3/E2 of 0.092 and 0.237, respectively. Formations of tribolayer oxides reduced the friction and enhanced the wear resistance of TiAlMoN coatings in atmospheric conditions and reached the minimum values of 0.3 and 0.849 × 10-6 mm3/N, respectively, at 16.09 atom \% of Mo under 5 N load charge. Corrosion examination in simulated seawater revealed that TiAlMoN coating-coated SS316L exhibited a significant positive shift of about -16 mV in corrosion potential with a notable reduction in corrosion current density (1.41 nA/cm2), confirming the improved corrosion performance. The combination of both cold spray and magnetron sputtering techniques for producing this kind of component is shown to have great potential in processing applications.}, language = {en} }