@misc{LeeParkKupniketal., author = {Lee, Hyunjoo J. and Park, Kwan Kyu and Kupnik, Mario and Melosh, Nicholas A. and Khuri-Yakub, Butrus T.}, title = {Mesoporous thin-film on highly sensitive resonant chemical sensors for relative humidity and CO2 detection}, series = {Analytical Chemistry}, volume = {84}, journal = {Analytical Chemistry}, number = {7}, issn = {1520-6882}, doi = {10.1021/ac300225c}, pages = {3063 -- 3066}, abstract = {Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 × 10-4\% RH/Hz to water vapor in N2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 × 10-4\%/Hz and a volume resolution of 1.82 × 10-4\% to CO2 in N2.}, language = {en} }