@misc{BrinkmannOberrathAwakowiczetal., author = {Brinkmann, Ralf Peter and Oberrath, Jens and Awakowicz, Peter and Lapke, Martin and Musch, Thomas and Mussenbrock, Thomas and Rolfes, Ilona and Schulz, Christian and Storch, Robert and Styrnoll, Tim and Zietz, Christian}, title = {Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma}, language = {en} } @misc{BergerSteinbergerSchuengeletal., author = {Berger, Birk and Steinberger, Thomas and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, title = {Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase}, series = {Applied Physics Letters}, volume = {111}, journal = {Applied Physics Letters}, number = {20}, issn = {1077-3118}, doi = {10.1063/1.5000144}, pages = {5}, language = {en} } @misc{TrieschmannSchmidtMussenbrock, author = {Trieschmann, Jan and Schmidt, Frederik and Mussenbrock, Thomas}, title = {Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges}, series = {Plasma Processes and Polymers}, volume = {14}, journal = {Plasma Processes and Polymers}, number = {1-2}, issn = {1612-8869}, doi = {10.1002/ppap.201600140}, pages = {1600140}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas}, series = {Plasma Sources Science and Technolgy}, volume = {26}, journal = {Plasma Sources Science and Technolgy}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa51f2}, pages = {024004}, language = {en} } @misc{DirkmannHansenZiegleretal., author = {Dirkmann, Sven and Hansen, Mirko and Ziegler, Martin and Kohlstedt, Hermann and Mussenbrock, Thomas}, title = {The Role of Ion Transport Phenomena in Memristive Double Barrier Devices}, series = {Scientific Reports}, volume = {6}, journal = {Scientific Reports}, issn = {2045-2322}, doi = {10.1038/srep35686}, pages = {35686}, language = {en} } @misc{WilczekTrieschmannEreminetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Eremin, Denis and Brinkmann, Ralf Peter and Schulze, Julian and Schuengel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Peter and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, series = {Physics of Plasmas}, volume = {23}, journal = {Physics of Plasmas}, number = {6}, issn = {1070-664X}, doi = {10.1063/1.4953432}, pages = {063514}, language = {en} } @misc{SchulzeSchuengelDerzsietal., author = {Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Mussenbrock, Thomas}, title = {Complex Electron Heating in Capacitive Multi-Frequency Plasmas}, series = {IEEE Transactions on Plasma Science}, volume = {42}, journal = {IEEE Transactions on Plasma Science}, number = {10}, issn = {0093-3813}, doi = {10.1109/TPS.2014.2306265}, pages = {2780 -- 2781}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @misc{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Schulze, Julian}, title = {Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {22}, issn = {1089-7550}, doi = {10.1063/1.4937403}, pages = {223302}, language = {en} } @misc{DirkmannZieglerHansenetal., author = {Dirkmann, Sven and Ziegler, Martin and Hansen, Mirko and Kohlstedt, Hermann and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {21}, issn = {1089-7550}, doi = {10.1063/1.4936107}, pages = {214501}, language = {en} } @misc{HansenZieglerKolbergetal., author = {Hansen, Mirko and Ziegler, Martin and Kolberg, Lucas and Soni, Rohit and Dirkmann, Sven and Mussenbrock, Thomas and Kohlstedt, Hermann}, title = {A Double Barrier Memristive Device}, series = {Scientific Reports}, volume = {5}, journal = {Scientific Reports}, issn = {2045-2322}, doi = {10.1038/srep13753}, pages = {13753}, language = {en} } @misc{ZahariHansenMussenbrocketal., author = {Zahari, Finn and Hansen, Mirko and Mussenbrock, Thomas and Ziegler, Martin and Kohlstedt, Hermann}, title = {Pattern Recognition with TiOx-based Memristive Devices}, series = {AIMS Materials Science}, volume = {2}, journal = {AIMS Materials Science}, number = {3}, issn = {2372-0484}, doi = {10.3934/matersci.2015.3.203}, pages = {203 -- 216}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Transport of Sputtered Particles in Capacitive Sputter Sources}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {3}, issn = {1089-7550}, doi = {10.1063/1.4926878}, pages = {033302}, language = {en} } @misc{EreminHemkeMussenbrock, author = {Eremin, Denis and Hemke, Torben and Mussenbrock, Thomas}, title = {Nonlocal Behavior of the Excitation Rate in Highly Collisional RF Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {4}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/4/044004}, pages = {044004}, language = {en} } @misc{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Hitchon, William N. G.}, title = {Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas}, series = {Journal of Applied Physics}, volume = {117}, journal = {Journal of Applied Physics}, number = {2}, issn = {1089-7550}, doi = {10.1063/1.4905943}, pages = {023305}, language = {en} } @misc{HeilCzarnetzkiBrinkmannetal., author = {Heil, Brian George and Czarnetzki, Uwe and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Method for Controlling Ion Energy in Radio Frequency Plasma}, language = {en} } @misc{KemaneciBoothChabertetal., author = {Kemaneci, Efe and Booth, Jean-Paul and Chabert, Pascal and Dijk, Jan van and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {A Computational Analysis of the Vibrational Quanta of Molecular Oxygen in Low Pressure Stationary and Transient Radio-Frequency Oxygen Plasmas}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025025}, pages = {025025}, language = {en} } @misc{SchulzeMussenbrock, author = {Schulze, Julian and Mussenbrock, Thomas}, title = {Electron Heating in Technological Plasmas}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/25/2/020401}, pages = {020401}, language = {en} } @misc{EreminHemkeMussenbrock, author = {Eremin, Denis and Hemke, Torben and Mussenbrock, Thomas}, title = {A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {1}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/1/015009}, pages = {015009}, language = {en} } @inproceedings{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Schulze, Julian and Mussenbrock, Thomas and Bruneau, Bastien and Johnson, Erik and Lafleur, Trevor and Booth, Jean-Paul and O'Connell, Deborah and Gans, Timo and Korolov, Ihor and Derzsi, Aranka and Donk{\´o}, Zolt{\´a}n}, title = {Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534353}, language = {en} } @inproceedings{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Confinement of highly energetic electron beams in low pressure capacitive discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179545}, language = {en} } @inproceedings{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Hitchon, William N. G. and Brinkmann, Ralf Peter}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, series = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179892}, language = {en} }