@misc{BrinkmannOberrathAwakowiczetal., author = {Brinkmann, Ralf Peter and Oberrath, Jens and Awakowicz, Peter and Lapke, Martin and Musch, Thomas and Mussenbrock, Thomas and Rolfes, Ilona and Schulz, Christian and Storch, Robert and Styrnoll, Tim and Zietz, Christian}, title = {Device and Use of the Device for Measuring the Density and/or the Electron Temperature and/or the Collision Frequency of a Plasma}, language = {en} } @misc{BergerSteinbergerSchuengeletal., author = {Berger, Birk and Steinberger, Thomas and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, title = {Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase}, series = {Applied Physics Letters}, volume = {111}, journal = {Applied Physics Letters}, number = {20}, issn = {1077-3118}, doi = {10.1063/1.5000144}, pages = {5}, language = {en} } @misc{TrieschmannSchmidtMussenbrock, author = {Trieschmann, Jan and Schmidt, Frederik and Mussenbrock, Thomas}, title = {Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges}, series = {Plasma Processes and Polymers}, volume = {14}, journal = {Plasma Processes and Polymers}, number = {1-2}, issn = {1612-8869}, doi = {10.1002/ppap.201600140}, pages = {1600140}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas}, series = {Plasma Sources Science and Technolgy}, volume = {26}, journal = {Plasma Sources Science and Technolgy}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa51f2}, pages = {024004}, language = {en} } @misc{DirkmannHansenZiegleretal., author = {Dirkmann, Sven and Hansen, Mirko and Ziegler, Martin and Kohlstedt, Hermann and Mussenbrock, Thomas}, title = {The Role of Ion Transport Phenomena in Memristive Double Barrier Devices}, series = {Scientific Reports}, volume = {6}, journal = {Scientific Reports}, issn = {2045-2322}, doi = {10.1038/srep35686}, pages = {35686}, language = {en} } @misc{WilczekTrieschmannEreminetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Eremin, Denis and Brinkmann, Ralf Peter and Schulze, Julian and Schuengel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Peter and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, series = {Physics of Plasmas}, volume = {23}, journal = {Physics of Plasmas}, number = {6}, issn = {1070-664X}, doi = {10.1063/1.4953432}, pages = {063514}, language = {en} } @misc{SchulzeSchuengelDerzsietal., author = {Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Mussenbrock, Thomas}, title = {Complex Electron Heating in Capacitive Multi-Frequency Plasmas}, series = {IEEE Transactions on Plasma Science}, volume = {42}, journal = {IEEE Transactions on Plasma Science}, number = {10}, issn = {0093-3813}, doi = {10.1109/TPS.2014.2306265}, pages = {2780 -- 2781}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @misc{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Schulze, Julian}, title = {Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {22}, issn = {1089-7550}, doi = {10.1063/1.4937403}, pages = {223302}, language = {en} } @misc{DirkmannZieglerHansenetal., author = {Dirkmann, Sven and Ziegler, Martin and Hansen, Mirko and Kohlstedt, Hermann and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {21}, issn = {1089-7550}, doi = {10.1063/1.4936107}, pages = {214501}, language = {en} } @misc{HansenZieglerKolbergetal., author = {Hansen, Mirko and Ziegler, Martin and Kolberg, Lucas and Soni, Rohit and Dirkmann, Sven and Mussenbrock, Thomas and Kohlstedt, Hermann}, title = {A Double Barrier Memristive Device}, series = {Scientific Reports}, volume = {5}, journal = {Scientific Reports}, issn = {2045-2322}, doi = {10.1038/srep13753}, pages = {13753}, language = {en} } @misc{ZahariHansenMussenbrocketal., author = {Zahari, Finn and Hansen, Mirko and Mussenbrock, Thomas and Ziegler, Martin and Kohlstedt, Hermann}, title = {Pattern Recognition with TiOx-based Memristive Devices}, series = {AIMS Materials Science}, volume = {2}, journal = {AIMS Materials Science}, number = {3}, issn = {2372-0484}, doi = {10.3934/matersci.2015.3.203}, pages = {203 -- 216}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Transport of Sputtered Particles in Capacitive Sputter Sources}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {3}, issn = {1089-7550}, doi = {10.1063/1.4926878}, pages = {033302}, language = {en} } @misc{EreminHemkeMussenbrock, author = {Eremin, Denis and Hemke, Torben and Mussenbrock, Thomas}, title = {Nonlocal Behavior of the Excitation Rate in Highly Collisional RF Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {4}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/4/044004}, pages = {044004}, language = {en} } @misc{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Hitchon, William N. G.}, title = {Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas}, series = {Journal of Applied Physics}, volume = {117}, journal = {Journal of Applied Physics}, number = {2}, issn = {1089-7550}, doi = {10.1063/1.4905943}, pages = {023305}, language = {en} } @misc{HeilCzarnetzkiBrinkmannetal., author = {Heil, Brian George and Czarnetzki, Uwe and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Method for Controlling Ion Energy in Radio Frequency Plasma}, language = {en} } @misc{KemaneciBoothChabertetal., author = {Kemaneci, Efe and Booth, Jean-Paul and Chabert, Pascal and Dijk, Jan van and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {A Computational Analysis of the Vibrational Quanta of Molecular Oxygen in Low Pressure Stationary and Transient Radio-Frequency Oxygen Plasmas}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025025}, pages = {025025}, language = {en} } @misc{SchulzeMussenbrock, author = {Schulze, Julian and Mussenbrock, Thomas}, title = {Electron Heating in Technological Plasmas}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/25/2/020401}, pages = {020401}, language = {en} } @misc{EreminHemkeMussenbrock, author = {Eremin, Denis and Hemke, Torben and Mussenbrock, Thomas}, title = {A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {1}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/1/015009}, pages = {015009}, language = {en} } @inproceedings{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Schulze, Julian and Mussenbrock, Thomas and Bruneau, Bastien and Johnson, Erik and Lafleur, Trevor and Booth, Jean-Paul and O'Connell, Deborah and Gans, Timo and Korolov, Ihor and Derzsi, Aranka and Donk{\´o}, Zolt{\´a}n}, title = {Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534353}, language = {en} } @inproceedings{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Confinement of highly energetic electron beams in low pressure capacitive discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179545}, language = {en} } @inproceedings{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Hitchon, William N. G. and Brinkmann, Ralf Peter}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, series = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179892}, language = {en} } @inproceedings{SzeremleyMussenbrockBrinkmannetal., author = {Szeremley, Daniel and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Zimmermanns, Marc and Rolfes, Ilona and Eremin, Denis}, title = {Comparison of a numerical and analytical model for the simulation of the mode propagation in a microwave driven plasma discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179679}, language = {en} } @inproceedings{DirkmannMussenbrock, author = {Dirkmann, Sven and Mussenbrock, Thomas}, title = {Semi-classical particle-in-cell simulations of quantum systems}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179549}, language = {en} } @inproceedings{SzeremleyMussenbrockBrinkmannetal., author = {Szeremley, Daniel and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Eremin, Denis and Mitschker, Felix and Steves, Simon and Awakowicz, Peter and Kushner, Mark}, title = {Numerical simulations of a microwave driven low pressure plasma}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534377}, language = {en} } @inproceedings{WilczekTrieschmannBrinkmannetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Paul and Donk{\´o}, Zolt{\´a}n}, title = {Hysteresis effects and confinement of beam electrons in capacitive discharges}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534342}, language = {en} } @inproceedings{WilczekBrinkmannMussenbrock, author = {Wilczek, Sebastian and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Nonlinear electron resonance heating in asymmetric capacitive discharges}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534107}, language = {en} } @misc{SiepaDankoTsankovetal., author = {Siepa, Sarah and Danko, Stephan and Tsankov, Tsanko V. and Mussenbrock, Thomas and Czarnetzki, Uwe}, title = {On the OES Line-Ratio Technique in Argon and Argon Containing Plasmas}, series = {Journal of Physics D: Applied Physics}, volume = {47}, journal = {Journal of Physics D: Applied Physics}, number = {44}, issn = {1361-6463}, doi = {10.1088/0022-3727/47/44/445201}, pages = {445201}, language = {en} } @misc{DakshaDerzsiWilczeketal., author = {Daksha, Manaswi and Derzsi, Aranka and Wilczek, Sebastian and Trieschmann, Jan and Mussenbrock, Thomas and Awakowicz, Peter and Donk{\´o}, Zolt{\´a}n and Schulze, Julian}, title = {The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs}, series = {Plasma Sources Science and Technology}, volume = {26}, journal = {Plasma Sources Science and Technology}, number = {8}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa7c88}, pages = {085006}, language = {en} } @misc{StrobelHansenDirkmannetal., author = {Strobel, Julian and Hansen, Mirko and Dirkmann, Sven and Neelisetty, Krishna Kanth and Ziegler, Martin and Haberfehlner, Georg and Popescu, Radian and Kothleitner, Gerald and Chakravadhanula, Venkata Sai Kiran and K{\"u}bel, Christian and Kohlstedt, Hermann and Mussenbrock, Thomas and Kienle, Lorenz}, title = {In Depth Nano Spectroscopic Analysis on Homogeneously Switching Double Barrier Memristive Devices}, series = {Journal of Applied Physics}, volume = {121}, journal = {Journal of Applied Physics}, number = {24}, issn = {1089-7550}, doi = {10.1063/1.4990145}, pages = {245307}, language = {en} } @misc{DirkmannMussenbrock, author = {Dirkmann, Sven and Mussenbrock, Thomas}, title = {Resistive switching in memristive electrochemical metallization devices}, series = {AIP Advances}, volume = {7}, journal = {AIP Advances}, number = {6}, issn = {2158-3226}, doi = {10.1063/1.4985443}, language = {en} } @misc{EreminBrinkmannMussenbrock, author = {Eremin, Denis and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Observations of Surface Mode Influence on Plasma Uniformity in PIC/MCC Simulations of Large Capacitive Discharges}, series = {Plasma Processes and Polymers}, volume = {14}, journal = {Plasma Processes and Polymers}, number = {4-5}, issn = {1612-8869}, doi = {10.1002/ppap.201600164}, language = {en} } @misc{SolanDirkmannHansenetal., author = {Solan, Enver and Dirkmann, Sven and Hansen, Mirko and Schroeder, Dietmar and Kohlstedt, Hermann and Ziegler, Martin and Mussenbrock, Thomas and Ochs, Karlheinz}, title = {An Enhanced Lumped Element Electrical Model of the Double Barrier Memristive Device}, series = {Journal of physics : D, Applied physics}, volume = {50}, journal = {Journal of physics : D, Applied physics}, number = {19}, doi = {10.1088/1361-6463/aa69ae}, pages = {10}, language = {en} } @misc{ShihabMussenbrock, author = {Shihab, Mohammed and Mussenbrock, Thomas}, title = {Kinetic Investigation of the Ion Angular Distribution in Capacitive Radio-Frequency Plasmas}, series = {Physics of Plasmas}, volume = {24}, journal = {Physics of Plasmas}, number = {11}, issn = {1089-7674}, doi = {10.1063/1.4994754}, pages = {7}, language = {en} } @misc{SchmidtTrieschmannBrinkmannetal., author = {Schmidt, Frederik and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Nonlinear interaction of capacitive discharges and power matching networks}, series = {Bulletin of the American Physical Society}, volume = {62}, journal = {Bulletin of the American Physical Society}, number = {10}, issn = {0003-0503}, language = {en} } @misc{TrieschmannRiesBibinovetal., author = {Trieschmann, Jan and Ries, Stefan and Bibinov, Nikita and Awakowicz, Peter and Mr{\´a}z, Stanislav and Schneider, Jochen M. and Mussenbrock, Thomas}, title = {Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {5}, doi = {10.1088/1361-6595/aac23e}, pages = {14}, language = {en} } @misc{SchmidtMussenbrockTrieschmann, author = {Schmidt, Frederik and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Consistent Simulation of Capacitive Radio-Frequency Discharges and External Matching Networks}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {10}, issn = {1361-6595}, doi = {10.1088/1361-6595/aae429}, pages = {7}, language = {en} } @misc{SchmidtSchulzeJohnsonetal., author = {Schmidt, Frederik and Schulze, Julian and Johnson, Erik and Booth, Jean-Paul and Keil, Douglas and French, David M. and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Multi Frequency Matching for Voltage Waveform Tailoring}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {9}, issn = {0963-0252}, doi = {10.1088/1361-6595/aad2cd}, pages = {10}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Bandgap Analysis of Plasma Photonic Crystals}, series = {Journal of Applied Physics}, volume = {124}, journal = {Journal of Applied Physics}, number = {17}, issn = {0021-8979}, doi = {10.1063/1.5055282}, pages = {5}, language = {en} } @inproceedings{OchsSolanDirkmannetal., author = {Ochs, Karlheinz and Solan, Enver and Dirkmann, Sven and Mussenbrock, Thomas}, title = {Wave Digital Emulation of a Double Barrier Memristive Device}, series = {59th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS), Oct 16-19, 2016, Abu Dhabi, U ARAB EMIRATES SCAS}, booktitle = {59th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS), Oct 16-19, 2016, Abu Dhabi, U ARAB EMIRATES SCAS}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-0916-9}, doi = {10.1109/MWSCAS.2016.7869946}, pages = {4}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Donko, Zoltan and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Disparity between current and voltage driven capacitively coupled radio frequency discharges}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {12}, issn = {1361-6595}, doi = {10.1088/1361-6595/aae5c1}, pages = {12}, language = {en} } @misc{BergerYouLeeetal., author = {Berger, Birk and You, Kwangho and Lee, Hyo-Chang and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, title = {Observation of the generation of multiple electron beams during a single sheath expansion phase in capacitive RF plasmas}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {12}, issn = {1361-6595}, doi = {10.1088/1361-6595/aaefc7}, pages = {5}, language = {en} } @misc{KirchheimWilskiJaritzetal., author = {Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and Arcos, Teresa de los and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}, title = {Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD}, series = {Journal of Coatings Technology and Research}, volume = {16}, journal = {Journal of Coatings Technology and Research}, number = {2}, issn = {1547-0091}, doi = {10.1007/s11998-018-0138-4}, pages = {573 -- 583}, language = {en} } @misc{GibsonDonkoAlelyanietal., author = {Gibson, Andrew R. and Donk{\´o}, Zolt{\´a}n and Alelyani, Layla and Bischoff, Lena and H{\"u}bner, Gerrit and Bredin, J{\´e}r{\^o}me and Doyle, Scott and Korolov, Ihor and Niemi, Kari and Mussenbrock, Thomas and Hartmann, Peter and Dedrick, James P. and Schulze, Julian and Gans, Timo and O'Connell, Deborah}, title = {Disrupting the spatio-temporal symmetry of the electron dynamics in atmospheric pressure plasmas by voltage waveform tailoring}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {1}, issn = {1361-6595}, doi = {10.1088/1361-6595/aaf535}, pages = {7}, language = {en} } @misc{BischoffHuebnerKorolovetal., author = {Bischoff, Lena and H{\"u}bner, Gerrit and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Hartmann, Peter and Gans, Timo and Held, Julian and Schulz-von der Gathen, Volker and Liu, Yue and Mussenbrock, Thomas and Schulze, Julian}, title = {Experimental and computational investigations of electron dynamics in micro atmospheric pressure radio-frequency plasma jets operated in He/N2 mixtures}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {12}, issn = {1361-6595}, doi = {10.1088/1361-6595/aaf35d}, pages = {16}, language = {en} } @misc{KorolovDonkoHuebneretal., author = {Korolov, Ihor and Donko, Zoltan and H{\"u}bner, Gerrit and Bischoff, Lena and Hartmann, Peter and Gans, Timo and Liu, Yue and Mussenbrock, Thomas and Schulze, Julian}, title = {Control of electron dynamics, radical and metastable species generation in atmospheric pressure RF plasma jets by Voltage Waveform Tailoring}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {9}, issn = {0963-0252}, doi = {10.1088/1361-6595/ab38ea}, pages = {16}, language = {en} } @misc{KruegerWilczekMussenbrocketal., author = {Kr{\"u}ger, Florian and Wilczek, Sebastian and Mussenbrock, Thomas and Schulze, Julian}, title = {Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {7}, issn = {963-0252}, doi = {10.1088/1361-6595/ab2c72}, pages = {13}, language = {en} } @misc{SchmidtTrieschmannGergsetal., author = {Schmidt, Frederik and Trieschmann, Jan and Gergs, Tobias and Mussenbrock, Thomas}, title = {A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits}, series = {Journal of Applied Physics}, volume = {125}, journal = {Journal of Applied Physics}, number = {17}, issn = {1089-7550}, doi = {10.1063/1.5091965}, pages = {173106}, language = {en} } @misc{ZahariSchlichtingStrobeletal., author = {Zahari, Finn and Schlichting, Felix and Strobel, Julian and Dirkmann, Sven and Cipo, Julia and Gauter, Sven and Trieschmann, Jan and Marquardt, Richard and Haberfehlner, Georg and Kothleitner, Gerald and Kienle, Lorenz and Mussenbrock, Thomas and Ziegler, Martin and Kersten, Holger and Kohlstedt, Hermann}, title = {Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices}, series = {Journal of Vacuum Science \& Technology}, volume = {37}, journal = {Journal of Vacuum Science \& Technology}, number = {6}, issn = {1520-8559}, doi = {10.1116/1.5119984}, pages = {061203}, language = {en} } @misc{WrightLarsenKorsholmGoncalvesetal., author = {Wright Larsen, Axel and Korsholm, S{\o}ren Bang and Gon{\c{c}}alves, Bruno and Gutierrez, H. E. and Henriques, Elsa and Infante, V. and Jensen, Thais Cristine and Jessen, Mikkel and Klinkby, Esben and Nonb{\o}l, E. and Luis, R. and Vale, Alberto and Lopes, Andr{\´e} and Naulin, V. and Nielsen, S. K. and Salewski, Mirko and Rasmussen, Janie and Taormina, A. and M{\o}lls{\o}e, C. and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Mitigation of EC breakdown in the gyrotron transmission line of the ITER Collective Thomson Scattering diagnostic via a Split Biased Waveguide}, series = {Journal of Instrumentation}, volume = {14}, journal = {Journal of Instrumentation}, issn = {1748-0221}, doi = {10.1088/1748-0221/14/11/C11009}, pages = {8}, language = {en} } @misc{DirkmannKaiserWengeretal., author = {Dirkmann, Sven and Kaiser, Jan and Wenger, Christian and Mussenbrock, Thomas}, title = {Filament Growth and Resistive Switching in Hafnium Oxide Memristive Devices}, series = {Plasma Sources Science and Technology}, volume = {10}, journal = {Plasma Sources Science and Technology}, number = {17}, issn = {1361-6595}, doi = {10.1021/acsami.7b19836}, pages = {14857 -- 14868}, language = {en} } @misc{GergsDirkmannMussenbrock, author = {Gergs, Tobias and Dirkmann, Sven and Mussenbrock, Thomas}, title = {Integration of external electric fields in molecular dynamics simulation models for resistive switching devices}, series = {Journal of Applied Physics}, volume = {123}, journal = {Journal of Applied Physics}, number = {24}, issn = {0021-8979}, doi = {10.1063/1.5029877}, pages = {6}, language = {en} } @misc{KorolovLeimkuehlerBoekeetal., author = {Korolov, Ihor and Leimk{\"u}hler, Marc and Boeke, Marc and Donk{\´o}, Zoltan and Schulz-von der Gathen, Volker and Bischoff, Lena and H{\"u}bner, Gerrit and Hartmann, Peter and Gans, Timo and Liu, Yue and Mussenbrock, Thomas and Schulze, Julian}, title = {Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N 2}, series = {Journal of Physics D: Applied Physics}, volume = {53}, journal = {Journal of Physics D: Applied Physics}, issn = {1361-6463}, doi = {10.1088/1361-6463/ab6d97}, pages = {18}, language = {en} } @misc{WilczekSchulzeBrinkmannetal., author = {Wilczek, Sebastian and Schulze, Julian and Brinkmann, Ralf Peter and Donk{\´o}, Zoltan and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Electron dynamics in low pressure capacitively coupled radio frequency discharges}, series = {Journal of Applied Physics}, volume = {127}, journal = {Journal of Applied Physics}, number = {18}, doi = {10.1063/5.0003114.1}, language = {en} } @misc{LiuKorolovTrieschmannetal., author = {Liu, Yue and Korolov, Ihor and Trieschmann, Jan and Steuer, David and Schulz-von der Gathen, Volker and B{\"o}ke, Marc and Bischoff, Lena and H{\"u}bner, Gerrit and Schulze, Julian and Mussenbrock, Thomas}, title = {Micro Atmospheric Pressure Plasma Jets Excited in He/O2 by Voltage Waveform Tailoring: A Study Based on a Numerical Hybrid Model and Experiments}, series = {Plasma Sources Science and Technology}, volume = {30}, journal = {Plasma Sources Science and Technology}, number = {6}, issn = {1361-6595}, doi = {10.1088/1361-6595/abd0e0}, pages = {1 -- 30}, language = {en} } @misc{LiuTrieschmannBergeretal., author = {Liu, Yue and Trieschmann, Jan and Berger, Birk and Schulze, Julian and Mussenbrock, Thomas}, title = {Non-Linear Effects and Electron Heating Dynamics in Radio-Frequency Capacitively Coupled Plasmas with a Non-Uniform Transverse Magnetic Field}, series = {Physics of Plasmas}, volume = {28}, journal = {Physics of Plasmas}, number = {5}, issn = {1089-7674}, doi = {10.1063/5.0045947}, language = {en} } @misc{KlichWilczekJanssenetal., author = {Klich, Maximilian and Wilczek, Sebastian and Janssen, Jesper Frederikus Jacobus and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Ion dynamics in capacitively coupled argon-xenon discharges}, series = {Plasma Sources Science and Technology}, volume = {30}, journal = {Plasma Sources Science and Technology}, number = {6}, issn = {1361-6595}, doi = {10.1088/1361-6595/ac02b0}, language = {en} } @misc{TrieschmannWrightLarsenMussenbrocketal., author = {Trieschmann, Jan and Wright Larsen, Axel and Mussenbrock, Thomas and Korsholm, S{\o}ren Bang}, title = {Kinetic simulation of electron cyclotron resonance assisted gas breakdown in split-biased waveguides for ITER collective Thomson scattering diagnostic}, series = {Physics of Plasmas}, volume = {28}, journal = {Physics of Plasmas}, number = {8}, issn = {1089-7674}, doi = {10.1063/5.0055461}, language = {en} }