@misc{ObstarczykKaczmarekWojcieszaketal., author = {Obstarczyk, Agata and Kaczmarek, Danuta and Wojcieszak, Damian and Mazur, Michał and Domaradzki, Jarosław and Kotwica, Tomasz and Pastuszek, Roman and Schmeißer, Dieter and Mazur, Piotr and Kot, Małgorzata}, title = {Tailoring optical and electrical properties of thin-film coatings based on mixed Hf and Ti oxides for optoelectronic application}, series = {Materials and Design}, volume = {175}, journal = {Materials and Design}, issn = {0264-1275}, doi = {10.1016/j.matdes.2019.107822}, pages = {15}, abstract = {In this work multi-magnetron sputtering stand was used for the deposition of the mixed oxides thin films based on HfO2 and TiO2. In order to obtain various material composition the power released to each magnetron (containing metallic hafnium and titanium targets) was precisely selected. Structural, surface, optical, electrical and mechanical properties of as-deposited coatings were analyzed. Depending on the hafnium content in the deposited thin films various types of the microstructure was obtained, i.e. HfO2-monoclinic, amorphous and TiO2-rutile. Increase of Ti content above 28 at. \% in the as-prepared mixed oxides coatings caused their amorphization. It was found that with an increase of Ti content in prepared coatings their surface roughness and simultaneously water contact angle decreased. Performed measurements of electrical properties revealed that the lowest leakage current density in the range of 10-7 - 10-8 A/cm2 was obtained for amorphous coatings. Moreover, the tailoring of the dielectric constant was possible by a proper selection of material composition and microstructure of the deposited thin films. Average transparency in the visible wavelength region was in the range of ca. 79-86\%. The influence of material composition and structure on shifting of the fundamental absorption edge and optical bandgap energy was also observed. The refractive index increased with an increase of Ti content, while extinction coefficient was the lowest for amorphous coatings. Additionally, hardness values were dependent on the material composition and optical packing density and were in the range from 7.6 GPa to 10.1 GPa.}, language = {en} } @misc{MańkowskaMazurDomaradzkietal., author = {Mańkowska, Ewa and Mazur, Michał and Domaradzki, Jarosław and Mazur, Piotr and Kot, Małgorzata and Flege, Jan Ingo}, title = {Hydrogen Gas Sensing Properties of Mixed Copper-Titanium Oxide Thin Films}, series = {Sensors}, volume = {23}, journal = {Sensors}, number = {8}, issn = {1424-8220}, doi = {10.3390/s23083822}, abstract = {Hydrogen is an efficient source of clean and environmentally friendly energy. However, because it is explosive at concentrations higher than 4\%, safety issues are a great concern. As its applications are extended, the need for the production of reliable monitoring systems is urgent. In this work, mixed copper-titanium oxide ((CuTi)Ox) thin films with various copper concentrations (0-100 at.\%), deposited by magnetron sputtering and annealed at 473 K, were investigated as a prospective hydrogen gas sensing material. Scanning electron microscopy was applied to determine the morphology of the thin films. Their structure and chemical composition were investigated by X-ray diffraction and X-ray photoelectron spectroscopy, respectively. The prepared films were nanocrystalline mixtures of metallic copper, cuprous oxide, and titanium anatase in the bulk, whereas at the surface only cupric oxide was found. In comparison to the literature, the (CuTi)Ox thin films already showed a sensor response to hydrogen at a relatively low operating temperature of 473 K without using any extra catalyst. The best sensor response and sensitivity to hydrogen gas were found in the mixed copper-titanium oxides containing similar atomic concentrations of both metals, i.e., 41/59 and 56/44 of Cu/Ti. Most probably, this effect is related to their similar morphology and to the simultaneous presence of Cu and Cu2O crystals in these mixed oxide films. In particular, the studies of surface oxidation state revealed that it was the same for all annealed films and consisted only of CuO. However, in view of their crystalline structure, they consisted of Cu and Cu2O nanocrystals in the thin film volume.}, language = {en} }