@misc{SionckeLinBrammertzetal., author = {Sioncke, Sonja and Lin, Hang-Chu and Brammertz, Guy and Delabie, Annelies and Conard, Thierry and Franquet, Alexis and Caymax, Matty and Meuris, Marc and Schmeißer, Dieter and Tallarida, Massimo}, title = {ALD on high mobility channels: engineering the proper gate stack passivation}, series = {ECS Transactions}, volume = {33}, journal = {ECS Transactions}, number = {2}, issn = {1938-5862}, pages = {9 -- 23}, language = {en} }