@inproceedings{TallaridaSchmeisserZheng, author = {Tallarida, Massimo and Schmeißer, Dieter and Zheng, Fan}, title = {X-ray Absorption and Photoemission Spectroscopy of 3C- and 4H-SiC}, language = {en} } @inproceedings{TallaridaSohalSchmeisser, author = {Tallarida, Massimo and Sohal, Rakesh and Schmeißer, Dieter}, title = {Resonant photoemission at the oxygen K edge as a tool to study the electronic properties of defects at SiO2/Si and SiO2/SiC interfaces}, language = {en} } @inproceedings{KolanekTallaridaKaravaevetal., author = {Kolanek, Krzysztof and Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter}, title = {In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems}, series = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, booktitle = {International Students and Young Scientists Workshop "Photonics and Microsystems", 2009, 25 - 27 June 2009, Harz University, Wernigerode, Germany}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-4303-1}, pages = {47 -- 51}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Nobel "in-situ2" Approach to Modified ALD Processes for Nano-functional Metals Oxide Films}, language = {en} } @inproceedings{TallaridaKaravaevSchmeisseretal., author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {HfO2 ALD-growth studied by in situ photoemission}, series = {Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008}, booktitle = {Proceedings of 15th Workshop on Dielectrics in Micoelectronics, Bad Saarow, 23 - 25 June 2008}, pages = {289 -- 290}, language = {en} } @inproceedings{WyrodekTallaridaWeisheitetal., author = {Wyrodek, Jakub and Tallarida, Massimo and Weisheit, Martin and Schmeißer, Dieter}, title = {Determination of interfacial layers in high-k nanomaterials by ADXPS measurements}, language = {en} } @inproceedings{StarzykTallaridaSchmeisser, author = {Starzyk, Łukasz and Tallarida, Massimo and Schmeißer, Dieter}, title = {Band alignment of high-k/SiO2/Si stacks incorporating Zr and Al oxides prepared by atomic layer deposition}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisser, author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {In-situ Atomic Layer Deposition growth of Hafnium oxide}, series = {DEDIS-Nano-Days, October 11th and October 12th, 2007}, booktitle = {DEDIS-Nano-Days, October 11th and October 12th, 2007}, editor = {Vierhaus, Heinrich Theodor}, publisher = {BTU}, address = {Cottbus}, pages = {13 -- 19}, language = {en} } @inproceedings{SchmeisserRichterTallarida, author = {Schmeißer, Dieter and Richter, Matthias and Tallarida, Massimo}, title = {Intrinsic defects in TiO2 to explain resistive switching devices}, series = {Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany}, booktitle = {Frontiers in Electronic Materials: A Collection of Extended Abstracts of the Nature Conference Frontiers in Electronic Materials, June 17 to 20 2012, Aachen, Germany}, editor = {Heber, J{\"o}rg and Schlom, Darrell and Tokura, Yoshinori and Waser, Rainer and Wuttig, Matthias}, publisher = {Wiley-VCH}, address = {Weinheim}, isbn = {978-3-527-41191-7}, doi = {10.1002/9783527667703.ch45}, pages = {255 -- 256}, language = {en} } @inproceedings{Tallarida, author = {Tallarida, Massimo}, title = {III-V/oxide interfaces investigated with synchrotron radiation photoemission spectroscopy}, series = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, booktitle = {Meeting Abstracts-Electrochemical Society, Pacific Rim Meeting on Electrochemical and Solid-State Science, Honolulu, 2012}, publisher = {The Electrochemical Society}, pages = {2587 -- 2587}, language = {en} } @inproceedings{CuypersDorpTallaridaetal., author = {Cuypers, Daniel and Dorp, Dennis H. von and Tallarida, Massimo and Brizzi, Simone and Rodriguez, Leonard and Conard, Thierry and Arnauts, Sophia and Schmeißer, Dieter and Adelmann, Christoph and De Gendt, Stefan}, title = {Study of InP Surfaces After Wet Chemical Treatments}, series = {Meeting Abstracts-Electrochemical Society, San Francisco, 2013}, booktitle = {Meeting Abstracts-Electrochemical Society, San Francisco, 2013}, publisher = {The Electrochemical Society}, pages = {S. 2132}, language = {en} } @inproceedings{HenkelTallaridaHaeberleetal., author = {Henkel, Karsten and Tallarida, Massimo and Haeberle, J{\"o}rg and Gargouri, Hassan and Naumann, Franziska and Gruska, Bernd and Arens, Michael and Schmeißer, Dieter}, title = {PE-ALD-Al2O3-Schichten f{\"u}r die Passivierung von Solarzellen}, series = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 16.04.2014}, booktitle = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 16.04.2014}, editor = {Gl{\"u}ck, Bernhard K. and Schmidt, Sindy and Stein, Erhard and Raschke, J{\"o}rg-Uwe and Richter, Hans}, publisher = {Cottbus-Senftenberg}, address = {BTU}, pages = {7 -- 14}, abstract = {D{\"u}nne Al2O3-Schichten wurden bei Substrattemperaturen zwischen Raumtemperatur und 200°C mittels PE-ALD auf Si-Substraten abgeschieden und ellipsometrisch, spektroskopisch und elektrisch charakterisiert. Ihr Potenzial f{\"u}r die chemische und Feldeffektpassivierung der Oberfl{\"a}chenrekombination wird bewertet.}, language = {de} } @inproceedings{TallaridaSohalSchmeisser, author = {Tallarida, Massimo and Sohal, Rakesh and Schmeißer, Dieter}, title = {Electronic properties of the 2x1 3C-SiC surface reconstruction studied with resonant photoemission}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 41}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, isbn = {0420-0195}, pages = {S. 239}, abstract = {We have studied the 2x1 reconstructed surface of the 3C-SiC polytype by means of photoemission spectroscopy. The reconstruction was characterized through Si2p and C1s core level and angle-integrated valence band spectroscopy, and confirmed by the observation of a two-domain 2x1 LEED pattern. The electronic properties of this surface were investigated by collecting valence band spectra at photon energies near the Si2p and C1s absorption edges. The results show a strong dependence of the photoemission intensity on the excitation energy with characteristic resonances for certain valence band features. With a detailed study of the resonances we are able to assign the electronic origin of the resonating states and the nature of the electronic transition near the absorption edges.}, language = {en} } @inproceedings{KolanekKaravaevTallaridaetal., author = {Kolanek, Krzysztof and Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {Atomic layer deposition of HfO2 onto SiO2 substrates investigated in-situ by non-contact UHV/AFM}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 248}, abstract = {We investigated in-situ the atomic layer deposition (ALD) of HfO2 onto SiO2 substrates with ultra high vacuum (UHV) non-contact atomic force microscope (NC-AFM). The ALD process was started after detailed analysis of the initial Si(001)/SiO2 substrate. The ALD cycles, made by using tetrakis-di-methyl-amido-Hf (TDMAHf) and water as precursors, were performed on the SiO2 substrate maintained at 230 ∘C. We studied the relation between the film growth and the root mean square surface roughness, surface skewness, kurtosis, fractal dimension and correlation length. In the initial stages of the ALD process with our analysis of the surface height histograms we were capable of determination: HfO2 layer thickness, surface coverage and surface roughness of a substrate and deposited material. Observation of the surface height histograms evolution during deposition allowed us to verify conformal and effective ALD growth on SiO2 substrate. With this detailed analysis of the surface topography we confirmed the completion of the first HfO2 layer after four ALD cycles.}, language = {en} } @inproceedings{MichlingTallaridaKolaneketal., author = {Michling, Marcel and Tallarida, Massimo and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {In-situ EELS and UPS measurements on HfO2 ALD layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {In this contribution we report on our in-situ cycle-by-cycle (up to 10 cycles) investigations of the HfO2 ALD process using the methods of EELS and UPS. We used TDMA-Hf as a precursor and p-type Si wafer with natural oxide as the substrate. The EELS measurements were done with a primary energy of 52,5 eV and the UPS measurements with He I (21,218 eV). The change in the onset of the loss function is readily observed. Already after two cycles the value approach to the bulk value of HfO2. Upon ALD growth there is a remarkable decrease in the intensity of states within the gap. They are rather smooth and saturate after 10 cycles. With UPS we follow the variation of the VB onset and changes in the secondary electron onset. We summarize our data in a band diagram not based on bulk values but on cycle dependent quantities. With these cycle-by-cycle experiments we study the initial growth of HfO2 especially in the very first cycles.}, language = {en} } @inproceedings{StarzykTallaridaSchmeisser, author = {Starzyk, Łukasz and Tallarida, Massimo and Schmeißer, Dieter}, title = {Electrically optimized high-κ metal gate MOSFET by specific modification of the band alignment}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 231}, abstract = {The electrical optimization of metal/oxide/semiconductor gate stacks by specific modification of the band alignment for advanced MOS technology incorporating high dielectric constant (κ) materials is explored. Because of requirements concerning continued scaling of MOSFET transistors, gate oxides and cobalt electrode have been grown successively on Si substrate respectively by means of atomic layer deposition (ALD) and evaporation. The thicknesses of high-κ films were around 2 nm. In case of work function engineering, interfaces' chemistry plays a fundamental role. We applied synchrotron radiation based x-ray photoelectron spectroscopy (SR XPS) to characterize our samples, which allows step by step in situ investigations. Co 2p, Al 2p, Hf 4f, Si 2p and O 1s core levels spectra were measured and analyzed. From valence band (VB) spectra we determined Schottky barrier height and electronic bands offsets.}, language = {en} } @inproceedings{WyrodekTallaridaSchmeisseretal., author = {Wyrodek, Jakub and Tallarida, Massimo and Schmeißer, Dieter and Weisheit, Martin}, title = {Determination of interfacial layers in high - k ALD nanolaminate materials by ARXPS and SRXPS measurements}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 232}, abstract = {The interfacial layers of high dielectric constant (high - k) nanolaminate films are here explored. Problems concerning ALD nanolaminate layers deals mainly with lack of accurate methods to determine in depth profile of few nm thick stacks. Modified angle resolved XPS(ARXPS) and synchrotron radiation XPS(SRXPS) are proposed as methods suitable in layer profiling. Studied stacks containing ZrO/HfO or AlO/ZrO, were prepared on Si substrates by atomic layer deposition (ALD). Two sets of experiments were covered. First dealt with initial growth (up to 20 cycles, with thickness d < 2nm) of AlO/ZrO and included layer by layer insitu investigation by SRXPS. Second experiment refer to industrial grown ZrO/HfO films ( d ∼ 3nm ) processed with various parameters resulting in both, layer by layer and homogenous depositions. For those samples exsitu XPS, with angle dependent variation of probing depth, measurements were covered. By comparing obtained intensity ratios for different angles with computational developed stack model it was found that no simple layer by layer but some intermixing growth occurred including interaction with silicon substrate.}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisseretal., author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {In-situ ALD growth of Hafnium oxide films}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 244}, abstract = {We report on a novel system for in-situ atomic layer growth (ALD) of high-k dielectric films. First results were obtained for Hf-oxide samples by using Hf-tetrachloride as precursor and water as oxidizer. We compare the photoelectron spectra of Si2p, O1s and Hf4f of our in-situ prepared films with samples (ex-situ) prepared by industrial ALD reactors and discuss similarities and differences observed in the core level spectra of the various samples by considering the different growth conditions.}, language = {en} } @inproceedings{TallaridaKaravaevSchmeisseretal., author = {Tallarida, Massimo and Karavaev, Konstantin and Schmeißer, Dieter and Zschech, Ehrenfried}, title = {Photoemission and absorption spectroscopy for in situ investigations of the ALD growth}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 43}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 242}, abstract = {We have investigated the growth of Hf-oxide on Si by means of photoemission and X-ray absorption spectroscopy using synchrotron radiation at Bessy, Berlin. The Hf-oxide layers were grown via atomic layer deposition (ALD) using an in-situ ALD reactor attached to the investigation chamber. The XPS and XAS spectra were measured after every deposition cycle by transferring the sample into the investigation chamber without breaking the vacuum. From the experimental data we have obtained information about the early stages of the Hf-oxide growth, concerning in particular the reactivity of the interface with Si. Due to the possibility to study the layers after every cycle and with different oxidation parameters without exposing them to contaminants, the in situ investigation revealed to be a very important method to understand the growth properties of Hf-oxide.}, language = {en} } @inproceedings{KaravaevTallaridaSchmeisser, author = {Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {Evolution of the interfacial layer during the atomic layer deposition of HfO2 on Si/SiO2 substrates}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 160}, abstract = {We studied the formation of the interfacial layer in the Si/SiO2/HfO2 system using the in-situ Atomic Layer Deposition (ALD) reactor developed in our group [1,2]. We measured the X-ray photoelectron and X-ray absorption spectra with synchrotron radiation at the beamline U49-2/PGM2-BESSY II. The ALD growth was obtained using different Hf-precursors (HfCl4,TEMAHf and TDMAHf) on various prepared substrates at different temperatures. The investigation was carried out in-situ giving the possibility to determine the properties of the grown film after every ALD cycle without breaking the vacuum. We observed the evolution of the Si/SiO2/HfO2 system during the formation of first three Hf-oxide layers, detecting the interfacial growth of SiO2 during the initial ALD cycles from the XPS spectra of Si2p. We discuss how the interfacial layer growth depends on the various ALD parameters. [1] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008); [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Vac. Sci. Technol. B, accepted for publication.}, language = {en} } @inproceedings{KolanekKaravaevTallaridaetal., author = {Kolanek, Krzysztof and Karavaev, Konstantin and Tallarida, Massimo and Schmeißer, Dieter}, title = {In-situ investigations of the atomic layer deposition of HfO2 with UHV/AFM}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 160}, abstract = {We studied in-situ the atomic layer deposition (ALD) of HfO2 with ultra high vacuum (UHV) atomic force microscope (AFM), using the ALD reactor developed by our group [1, 2]. The reactor was attached to the Omicron Large Sample-UHV/AFM system in the AFM-Lab of the Angewandte Physik-Sensorik chair at the BTU-Cottbus. We investigated different Si(001)/SiO2 substrates and surface preparation techniques performed before the ALD process. After each ALD cycle (using TDMAHf and H2O as precursors), we studied the influence of the HfO2 growth on the root mean square (RMS) roughness; the surface fractal dimension and the height histogram: the surface skewness and kurtosis. We focused on the influence of the substrate temperature on the surface topography during the ALD. The in-situ studies of the ALD process with the UHV/AFM system correlated with the experiments performed with photoelectron spectroscopy can be used for understanding the fundamental properties of the ALD of HfO2 on Si(001). [1] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008); [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Vac. Sci. Technol. B, accepted for publication.}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {Basics of the atomic layer deposition of HfO2 onto Si/SiO2 substrates: in-situ investigations with XPS, XAS and UHV-AFM}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 159}, abstract = {We developed a reactor for investigating in-situ the atomic layer deposition (ALD) of HfO2. X-ray photoelectron and X-ray absorption spectra were collected after each ALD cycle using synchrotron radiation at the beamline U49-2/PGM2 - BESSY II, Berlin. The morphology of the substrate and thin film surfaces was investigated after each ALD cycle with an UHV-AFM microscopy attached to the ALD reactor. We studied the ALD on differently prepared substrates, at different substrate temperatures, and using different Hf-precursors (HfCl4, TEMAHf, TDMAHf). We observed the evolution of the Si/SiO2/HfO2 system during the formation of the first three Hf-oxide layers [1]; we detected the incorporation of Cl into the Hf-oxide films and proposed a mechanism responsible for the Cl contamination [2]; we found evidence of the interfacial-SiO2 growth during the initial ALD cycles and of dipole formation at the HfO2/SiO2 interface. In this contribution we illustrate the basics of the technique used, and discuss the physical-chemical properties of ALD on the basis of the experimental results. [1] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008); [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Vac. Sci. Technol. B, accepted for publication.}, language = {en} } @inproceedings{TallaridaKaravaevKolaneketal., author = {Tallarida, Massimo and Karavaev, Konstantin and Kolanek, Krzysztof and Schmeißer, Dieter}, title = {In-situ experimental approach to the study of atomic layer deposition with atomic force microscope, X-ray photoelectron and X-ray absorption spectroscopy}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft ; Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S.176}, abstract = {We describe our experimental approach to the investigation of atomic layer deposition (ALD). ALD is a powerful deposition technique for growing conformal thin films of composite materials with atomically accurate thickness on large area [1]. Despite the enormous industrial interest growing around ALD, its fundamental properties were not yet properly studied. We developed an ALD reactor for the in-situ investigations using XPS, XAS and AFM as experimental techniques. We studied the chemical-physical properties of the growing thin films after each deposition cycle. Here, we illustrate the recent results concerning the ALD of HfO2 obtained using different Hf-precursors on various substrates [2]. We show how the in-situ investigations could deliver an important insight into the fundamental characteristics of ALD and how these information could be used to modify and optimize the deposition parameters. [1] M. Leskel{\"a}, M. Ritala, Thin Solid Films, 409, 138, 2002; [2] M. Tallarida, K. Karavaev, and D. Schmeisser, J. Appl. Phys. 104, 064116 (2008).}, language = {en} } @inproceedings{MichlingKolanekSchmeisseretal., author = {Michling, Marcel and Kolanek, Krzysztof and Schmeißer, Dieter and Tallarida, Massimo}, title = {A growth model for the HfO2 ALD process}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 294}, abstract = {In this contribution we report on our in-situ2 cycle-by-cycle (up to the 25 cycles) investigation of the HfO2 atomic layer deposition (ALD) process using the method of x-ray photoelectron spectroscopy (XPS) and electron energy loss spectroscopy (EELS). We used Tetrakis-Dimethyl-Amino-Hafnium (TDMA-Hf) and H2O as precursors and p-type Si wafer with native oxide as a substrate. The XPS measurements were carried out at BESSY II in Berlin with primary energies of 150 eV and 640 eV and the EELS measurements were done with a primary energy of 50 eV. We measured the O1s, Si2p core level and the valence band including the Hf 4f core level. From the Hf4f to Si2p ratios taken at each energy we developed a growth model for the first monolayer and for the following layers too. From our data we conclude, that in the first monolayer up to the fourth ALD cycle an island growth occurs. The height of these islands is about 0,5nm. After the first monolayer is completed, a layer- by-layer growth can be expected. In order to proof this observation we have simulated the Hf/Si ratio for different excitation energies and found a very good agreement with our measurement data. The EELS data especially the evaluation of the loss function onset confirm our growth model.}, language = {en} } @inproceedings{TallaridaDessmannStaedteretal., author = {Tallarida, Massimo and Deßmann, Nils and St{\"a}dter, Matthias and Friedrich, Daniel and Michling, Marcel and Schmeißer, Dieter}, title = {Atomic layer deposition of TiO}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {We present a study of the initial growth of TiO2 on Si(111) by atomic layer deposition (ALD). The Si substrate was etched with NH4F before ALD to remove the native oxide film and to produce a Si-H termination. In-situ experiments by means of photoemission and X-ray absorption spectroscopy were conducted with synchrotron radiation on Ti-oxide films produced using Ti-tetra-iso-propoxide (TTIP) and water as precursors. O1s, Ti2p, C1s, and Si2p core level, and O1s and Ti2p absorption edges show the transition of the Ti-oxide properties during the first layers. The growth starts with a very small growth rate (0.03nm/cycle) due to the growth inhibition of the Si-H termination and proceeds with higher growth rate (0.1nm/cycle) after 1.5nm Ti-oxide has been deposited.}, language = {en} } @inproceedings{DasStaedterTallaridaetal., author = {Das, Chittaranjan and St{\"a}dter, Matthias and Tallarida, Massimo and Schmeißer, Dieter}, title = {Investigation of Linear Dichroism in ALD layers of TiO2}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Titanium dioxide is on the most studied material due to its wide range of applications in various fields such as self cleaning, photocatalysis, solar cell, water splitting, bio-implants, etc. In order to increase its efficiency in water splitting and solar cell, it is necessary to understand the crystal structure and electronic properties in thin films. In our approach we are investigating the X-ray linear dichroism (XLD) of thin layers of TiO2. XLD studies have been done in multiferroics, antiferromagnetic, and ferromagnetic materials, but a very less amount of work have been done in studying XLD effect of TiO2 thin films. These layers are grown by in-situ atomic layer deposition (ALD) system and are investigated with X-ray absorption spectroscopy (XAS) at BESSY II, Berlin. ALD is a promising technique to grow thin films on different substrates conveniently due to its uniform deposition property. XAS study will also help us to better understand the interfacial electronic properties of thin films of TiO2.}, language = {en} } @inproceedings{TallaridaMichlingDasetal., author = {Tallarida, Massimo and Michling, Marcel and Das, Chittaranjan and Friedrich, Daniel and St{\"a}dter, Matthias and Schmeißer, Dieter}, title = {Role of substrate chemistry in ALD revealed by in-situ techniques}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 47}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {We show recent results of our in-situ investigations where the role of substrate chemistry in ALD is outlined. While the usual strategy to develop new properties of ALD films is to find new precursors or new procedures, the influence of substrate chemistry on the growth properties of ALD films has been often underestimated. This has principally a technical reason, as the usual characterization methods (QMS, FTIR, ellipsometry) are only weakly sensitive to the substrate, and a characterization of substrates before ALD is often not possible. Thanks to the use of in-situ characterization methods, including photoemission and X-ray absorption spectroscopy with synchrotron radiation, we are able to determine chemical properties of substrates before ALD and after either half or complete ALD cycles. The substrate chemistry influences the standard Al2O3 ALD with TMA and water [1,2], as well as the TiO2 ALD with TTIP and either water, O2 or O2-plasma. [1] M. Tallarida, K. Kukli, M. Michling, M. Ritala, M. Leskel{\"a} and D. Schmeisser, Chem. Mater. 23, 3159 (2011); [2] M. Tallarida, C. Adelmann, A. Delabie, S. van Elshocht, M. Caymax, and D. Schmeisser, Appl. Phys. Lett. 92, 042906 (2011).}, language = {en} } @inproceedings{HenkelDasSowinskaetal., author = {Henkel, Karsten and Das, Chittaranjan and Sowinska, Małgorzata and Tallarida, Massimo and Schmeißer, Dieter and Gargouri, Hassan and K{\"a}rkk{\"a}nen, Irina and Schneidewind, Jessica and Gruska, Bernd and Arens, Michael}, title = {Charakterisierung von TiO2-ALD-Schichten und deren Nutzung f{\"u}r die Passivierung von Si-Photokathoden}, series = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 15.04.2015}, booktitle = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 15.04.2015}, editor = {Gl{\"u}ck, B. K. and Schmidt, S. and Stein, E. and Raschke, J{\"o}rg-Uwe and Richter, H.}, publisher = {BTU Cottbus-Senftenberg}, address = {Senftenberg}, pages = {3 -- 8}, abstract = {Wir berichten zun{\"a}chst {\"u}ber den Einfluss der Methode der Atomlagenabscheidung auf die TiO2-Schichteigenschaften. Insbesondere wird der Zusammenhang zwischen Ti3+- sowie Interbandzust{\"a}nden mit elektrischen Kennlinien und deren Einfluss auf funktionale Schichteigenschaften diskutiert. Anschließend werden Mikrostrukturierung, Grenzfl{\"a}chen-Engineering und konforme Abscheidung einer TiO2-ALD-Schutzschicht effektiv zur Performance-Steigerung von p-Si-Photokathoden angewendet.}, language = {de} } @inproceedings{AlbertonCorreaBrizziTallaridaetal., author = {Alberton Corr{\^e}a, Silma and Brizzi, Simone and Tallarida, Massimo and Schmeißer, Dieter}, title = {Charging effect in HfO2 films deposited on SiO2/Si by atomic layer deposition}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Thin films of hafnium oxide (HfO2) deposited by atomic layer deposition (ALD) have been studied extensively as a high-k replacement for the SiO2 gate in field effect transistors. The use of ALD process allows one to grow homogeneous thin films at low temperatures with a precise control of thickness [1]. Some important electrical considerations for the application of a high-k dielectric include the presence of fixed charge (Qf) and charge trapping in the dielectric. For instance, in the case of Al2O3 thin films deposited on Si, the thickness of the interfacial SiO2 layer was identified as a key fundamental parameter determining Qf [2]. A similar trend can be also expected in HfO2/Si structures. Therefore, in this work, we proposed an in situ evaluation of photon induced charge trapping in HfO2 films deposited on SiO2/Si structures. For that, tetrakis-di-methyl-amino-hafnium (TDMAHf) and H2O were employed as precursors to deposit HfO2 films on SiO2/Si samples with variable thickness of the SiO2 interlayer. Measurements were performed by Synchrotron Radiation Photoemission Spectroscopy (SR-PES). Results indicated that the charging process is dependent on the thickness of the SiO2 interlayer and on the quality of the HfO2 film. [1] M. Leskel{\"a} and M. Ritala, Thin Solid Films 409, 138 (2002). [2] G. Dingemans et al., J. Appl. Phys. 110, 093715 (2011).}, language = {en} } @inproceedings{BrizziTallaridaAdelmannetal., author = {Brizzi, Simone and Tallarida, Massimo and Adelmann, Christoph and Ragnarsson, Lars-{\AA}ke and Elshocht, Sven van and Schmeißer, Dieter}, title = {Structural changes in HfO2 thin films: thickness and doping dependence}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {In this work we show results regarding MOCVD and ALD HfO2 as well as Al-doped HfO2. We use Synchrotron Radiation Photoemission Spectroscopy (SRPES) to determine Hf/O atomic ratios and X-ray Absorption Spectroscopy (XAS) to investigate the electronic properties related to their crystallization. MOCVD films are synthesized at temperatures ranging from ambient to 400∘C and show structures from completely amorphous to monoclinic. ALD films are amorphous as deposited, and can crystallize after post-deposition anneal depending on the percentage of Al-doping. We discuss PES results in order to determine how close to stoichiometry the Hf/O atomic ratios of the films are, as well as the doping level. From XAS data, instead, we can point out how orbital hybridizations are related to structural and physical properties.}, language = {en} } @inproceedings{DasTallaridaSchmeisser, author = {Das, Chittaranjan and Tallarida, Massimo and Schmeißer, Dieter}, title = {X-ray linear dichroism in atomic layer deposited Titanium dioxide layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Among the various metal oxides TiO2 has been investigated because of its wide range of applications in various fields such as self-cleaning, photocatalysis, solar cell, water splitting, bio-implants. In order to increase its efficiency in water splitting and solar cell energy conversion, it is necessary to understand the crystal structure and electronic properties of thin films. Generally the process of synthesis may modify the electronic properties of TiO2. In the present work we show X-ray linear dichroism (XLD) measurements of TiO2 thin films of different polymorphs. Titania thin films were produced by atomic layer deposition (ALD) and were characterized in-situ with X-ray photoelectron and absorption spectroscopy at synchrotron radiation center BESSY-II. We found that that all titania phases show XLD at Ti-L and O-K edges, but the intensity of XLD is different for different phases. We discuss our data in terms of the partial density of states.}, language = {en} } @inproceedings{DasTallaridaSchmeisser, author = {Das, Chittaranjan and Tallarida, Massimo and Schmeißer, Dieter}, title = {Control of thickness of SiO2 interfacial layer for photocatalytic water splitting on Si photocathodes}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Silicon with a band gap of 1.1eV is an excellent candidate for visible photocatalytic water splitting. But p-type Si has a low quantum yield and are less efficient for water splitting [1]. It has been shown that preventing oxidation of Si surface can shift the onset potential for water reduction by about 300mV towards more positive [2]. We investigated in detail the influence of the SiO2 layer thickness on the onset potential for water splitting on Si photocathodes: we used p-type Si substrates covered with SiO2 layers of varying thickness. Then, we deposited a thin TiO2 film on using atomic layer deposition (ALD) to inhibit Si oxidation during the electrochemical experiment. In this way we could shift the onset potential up to 200mV, depending on the SiO2 thickness. [1]E. L. Warren, S. W. Boettcher, M. G. Walter, H. A. Atwater, and N. S. Lewis: J. Phys. Chem. C 115 (2011) 594. [2]B. Seger, Anders B. Laursen, P. C. K. Vesborg, T. Pedersen, O. Hansen, S. Dahl, I. Chorkendorff, Angew. Chem. Int. Ed. 2012, 51, 9128}, language = {en} } @inproceedings{TallaridaHenkelGargourietal., author = {Tallarida, Massimo and Henkel, Karsten and Gargouri, Hassan and Haeberle, J{\"o}rg and Gruska, Bernd and Arens, Matthias and Schmeißer, Dieter}, title = {New opportunities with Plasma enhanced atomic layer deposition (PE-ALD) of oxides}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Thermal Atomic layer deposition (T-ALD) of oxides is obtained by the pulsed alternation of a metal precursor and an oxygen source, typically H2O or O3, and the reactions leading to ALD are thermally activated. With plasma enhanced ALD (PE-ALD), instead, the oxygen source is represented by an oxygen-containing plasma. The higher reactivity of the plasma-generated species extend the capabilities of ALD: improved film quality and increased flexibility in process conditions, such as growth at low temperature, are typical advantages of PE-ALD over T-ALD. We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using T-ALD and PE-ALD in the SENTECH SI ALD LL system. Films were deposited in the temperature range between room temperature (RT) and 200∘C. We characterized the films with spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4" wafers and with X-ray photoelectron spectroscopy. All films resulted in a high degree of homogeneity, independent of the deposition temperature. Investigations with capacitance-voltage and conductance-voltage measurements showed a very low interface states density for the PE-ALD films.}, language = {en} } @inproceedings{AlbertonCorreaBrizziTallaridaetal., author = {Alberton Corr{\^e}a, Silma and Brizzi, Simone and Tallarida, Massimo and Schmeißer, Dieter}, title = {Spectroscopic investigation of the electronic structure of HfO2 thin films}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 211}, abstract = {HfO2 is of current interest as a material for memristive and ferroelectric devices. In this work, we used spectroscopic techniques to evaluate the electronic structure and defects mechanisms in thin HfO2 films deposited by atomic layer deposition and by metal-organic chemical vapour deposition. The partial density of states for the valence and the conduction bands was determined by the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. From the relative contributions we find a CNL 6.5 eV referred to Evac. We also find that the positions of valence band maximum and conduction band minimum, the excitation range for the polaronic states and the range of charge transfer band were not influenced by the preparation conditions. All films exhibit a band gap of 6.2 eV. However, the Fermi level position was found to vary within about 1.2 eV depending on the preparation conditions, which we argue that is due to the presence of charges within the films. This explains why the position of the Fermi level depends on the individual preparation parameters.}, language = {en} } @inproceedings{DasTallaridaSchmeisser, author = {Das, Chittaranjan and Tallarida, Massimo and Schmeißer, Dieter}, title = {Determination of charge neutrality level in TiO2 films from res-PES measurements}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 415}, abstract = {Titanium dioxide is one of the metal oxides which have versatile application in different fields. The applications of TiO2 are in the field of cosmetics, electronics (memory resistive switching), dye, photonics and photocatalysis. In the present paper we study the resPES data of TiO2 films prepared by atomic layer deposition. The measurements are done in in-situ system at beam line U49/2-PGM2 in BESSY-II. The density of state in valence band and conduction band is obtained from the resonance photo electron spectroscopy (res-PES) of the O1s and the Ti2p edge. The data allow to determine the position of the VBM and CBM with respect to the Fermi energy. Also the existence of localized O2p and Ti2p derived states is deduced which appear in the gap. In addition we determine the charge neutrality level (CNL).The CNL is the position where the weight of the density of state from valence band and conduction band are equal. This is an important quantity for the discussion of interface properties.}, language = {en} } @inproceedings{RouissiTallaridaSchmeisser, author = {Rouissi, Zied and Tallarida, Massimo and Schmeißer, Dieter}, title = {Study of atomic layer deposition with scanning tunneling microscopy}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 401}, abstract = {We present a work concerning the study of the initial steps of atomic layer deposition (ALD) with scanning tunneling microscopy (STM). We focus on the role of the substrates which has been often neglected.However, the detailed knowledge of precursor-substrate reactions is important for the understanding of how ALD proceeds. We report on the reaction of the Al-precursor, trimethyl-Al (TMA), on nanostructured surfaces such as Ag nanoclusters and nanostripes prepared by thermal evaporation on HOPG. We characterized the surface before and after one TMA adsorption pulse at room temperature, observing that the morphology of step edges changes after TMA creating a new terraces with a width of 7-10 nm, translated in the direction of the TMA deposition. This shows that, in case of a regular stepped surface, the substrate morphology would keep the same regularity with the translation in a direction privileged by the precursor absorption.}, language = {en} } @inproceedings{RouissiBrizziAlbertonCorreaetal., author = {Rouissi, Zied and Brizzi, Simone and Alberton Corr{\^e}a, Silma and Tallarida, Massimo and Schmeißer, Dieter}, title = {Comparison of charge neutrality level of Cu/CuO/HfO2 and Si/SiO2/HfO2}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {208}, abstract = {Copper Oxide (CuO) is a promising metal oxide semiconductor, which can be used in different applications, such as catalysis, solar energy conversion, and water splitting. In this work, we use resonance photoemission spectroscopy (ResPES) to analyse the electronics properties of HfO2 films deposited on Cu/CuO and Si/SiO2. For that, we deposited 10 cycles of HfO2 by atomic layer deposition (ALD) on Cu/CuO and Si/SiO2 samples and investigated the density states for the valence and conduction bands which were determined by the detailed analysis of the O1s resonance profile obtained by ResPES. We compared the positions of valence band maximum and conduction band minimum, the excitation range for the polaronic states and the range of charge transfer band in Cu/CuO/HfO2 and Si/SiO2/HfO2. Also, we determined the band gap and the charge neutrality level (CNL).}, language = {en} } @inproceedings{RouissiTallaridaSchmeisser, author = {Rouissi, Zied and Tallarida, Massimo and Schmeißer, Dieter}, title = {HfO2 grow by ALD on Si(111)-H terminated stepped surface}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, pages = {S. 419}, abstract = {We studied by STM the growth of HfO2 on Si (111)-H stepped surface (miscut by 0.5∘). The steps are aligned in the [11-2] direction. In order to obtain well defined steps and terraces we prepare the sample by chemical etching in 40\% Nh4F. In our in-situ study we investigate the ALD growth of HfO2 by TDMAH and H2O [1-2]. We follow for the first four ALD cycles the distribution of the nucleation sites. We also study the influence of the substrate temperature by comparing the growth within the ALD window at 300K and 580K. We observed that at RT the as-grown HfO2 forms stripes which are oriented normal to the step orientations. Further growth starts from the step edges and proceeds towards the terraces. Defects created by the etching processes act as nucleation sites for 3D islands. Based on our STM data we are able to correlate the structural changes on that inert and stepped Si(111)-H surface during ALD with experimental [3] and theoretical [4] results obtained for planar Si(100) surfaces. [1] M. Tallarida et al., Semicond. Sci. Technol. 27, 074010 (2012) [2] K. Kolanek et al., Thin Solid Films 518, 4688 (2010) [3] K. Kolanek et al., J. Vac. Sci. Technol. A 31, 01A104 (2013) [4]L. Riikka et al., J. Appl. Phys.96, 7686 (2004)}, language = {en} } @inproceedings{RouissiHenkelTallaridaetal., author = {Rouissi, Zied and Henkel, Karsten and Tallarida, Massimo and Schmeißer, Dieter}, title = {ALD growth of Al2O3 on Stepped Surface of HOPG and Ag-HOPG}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, pages = {S. 419}, abstract = {Atomic Layer Deposition (ALD) is an excellent deposition technique to grow thin film with high homogeneity coverage on ideal surfaces. Here we are interested in the growth properties on non-ideal (stepped, inert) surfaces. Using STM we studied the growth of Al2O3 by ALD on stepped surface of HOPG and silver covered HOPG (Ag-HOPG). The HOPG sample was cleaved to and then cleaned by N2 in vacuum. We obtain regular steps with terrace widths of 50nm - 500nm. Ag was deposited by thermal deposition on the HOPG. The Al2O3 growth at RT was studies after the first, third, and fifth cycle. Silver evaporation leads to step decoration with island of 1nm-7nm. On the terraces we find the formation of 2D domain of Ag chains. The features caused by the individual ALD cycles of Al2O3 depend on the terrace widths of the HOPG substrate. For small terraces (<100nm) we obtain a growth of 2D domains ( 20nm-25nm) on the edge steps and in the middle of the terrace. For large terraces (>100nm) we find agglomeration of the precursors on individual nucleation sites. Here 3D islands are formed with a height of up to 5nm in the fifth ALD cycle.}, language = {en} } @inproceedings{BrizziTallaridaSchmeisser, author = {Brizzi, Simone and Tallarida, Massimo and Schmeißer, Dieter}, title = {CVD and ALD deposited hafnia: an XPS study}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {In this work we report on Hafnium oxide deposited on silicon by means of chemical vapour deposition (CVD) and atomic layer deposition (ALD) using tetrakis-di-methyl-amino-Hf (TDMAHf) and water as precursors. We have studied the behavior of ALD and CVD at intermediate temperatures: ALD was performed outside the ALD window (T>300∘C), whereas CVD was performed at low temperatures, approaching the ALD window (T<400∘C). In this way we wanted to elucidate about the possibility of taking advantage of the conformality of ALD films and the high growth rate of CVD at the same time. Comparable sets of samples prepared with the two methods were measured by X-ray photoelectron spectroscopy and atomic force microscopy in order to determine differences between them: growth rate, Hf/O ratio, valence band positions and roughness are discussed and compared as a function of deposition temperature and process parameters.}, language = {en} } @inproceedings{ChoudhuryTallaridaDasetal., author = {Choudhury, Sakeb Hasan and Tallarida, Massimo and Das, Chittaranjan and Schmeißer, Dieter}, title = {Atomic layer deposition of Ga2O3 using Tri-methyl-Gallium and H2O}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {Considering numerous applications such as transparent conducting oxides, gas sensors, photovoltaic applications, deep UV photo detectors, field effect transistors and spintronics gallium oxide (Ga2O3) has earned quite a lot of focus recently. Various techniques have already been demonstrated to produce Ga2O3 naming evaporation, sputtering, pulsed laser deposition, chemical vapor deposition and atomic layer deposition (ALD). Among them, ALD gives the possibility of controlling the thickness at the atomic level, good step coverage and delivers dense and homogeneous films. In this contribution, we report on the growth of ALD Ga2O3 using trimethylgallium (TMG) and H2O as metal and oxygen precursors, respectively. We deposited thin Ga2O3 films on Si, TiO2, Al2O3 and RuO2 over a temperature range of 150-300°C and characterized them by X-ray photo emission spectroscopy and atomic force microscopy. From this study, we are able to discuss the influence of the temperature on the growth dynamics of Ga2O3 and its chemical composition.}, language = {en} } @inproceedings{DasTallaridaSkorupskaetal., author = {Das, Chittaranjan and Tallarida, Massimo and Skorupska, Katarzyna and Lewerenz, Hans-Joachim and Schmeißer, Dieter}, title = {An efficient Si photo cathode for a wide range of electrolyte pH values}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {Hydrogen fuel cells, being environmental friendly to produce energy, are a technology of future. One of the efficient ways to produce hydrogen is solar driven photocatalysis using semiconducting materials as photo electrodes. The choice of electrodes is a crucial factor and is done on the basis of photo corrosion stability, light absorption efficiency, and photocarrier lifetime. P-type Si can be used as photo cathode to produce H2 by direct photocatalysis. Si cathodes can be used in acidic electrolytes to have efficient photo catalytic activity but they are unstable in alkaline electrolytes. Therefore, to use both Si electrodes in the same electrolyte, their chemical stability should be extended over a wide range of pH. To this purpose we modified the surface of a p-type Si photocathode with very thin films of TiO2 grown by atomic layer deposition (ALD). We found that the modified Si cathode shows an increased photoresponse and a lower onset potential with respect to the pristine surface and an increased stability at various pH values.}, language = {en} } @inproceedings{TallaridaAballeKumaretal., author = {Tallarida, Massimo and Aballe, Lucia and Kumar, Ashwani and Barman, Sudipto Roy and Horn, Karsten}, title = {Characterisation of nearly free electron bands in thin Al-Mg alloy films on Si(111)}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {Thin films of Al-Mg alloys have been grown on Si(111) by MBE over a wide range of compositions, and were characterized by angle-resolved photoemission. For Al-rich alloys, electron confinement leads to the occurrence of quantum well states, and a surface state similar to that in the Al/Si(111) film is found. For Mg-rich compositions, only a broad surface state is observed. The occurrence of quantum well states and the surface state, and their binding energy dependence on alloy composition is explained in terms of the virtual crystal approximation, with an average electron density in the alloy system. The dispersion of the quantum well states in a direction parallel to the film shows a nearly free electron behaviour similar to that found in Al/Si(111). The variation of electron density in these alloy films open the way for a study of more complex metallic systems, e.g. an investigation of the influence of electron density of the electromagnetic response.}, language = {en} } @inproceedings{DasTallaridaSchmeisser, author = {Das, Chittaranjan and Tallarida, Massimo and Schmeißer, Dieter}, title = {TiO2 laminated Silicon microstructures based stable photocathode for water splitting}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, pages = {S. 213}, abstract = {The photoelectrochemical (PEC) water splitting is one of the most efficient ways to obtain hydrogen from water using solar power which can be used as carbon free fuel. The PEC device can bedesigned using semiconducting material that will convert solar radiation to H2. Silicon can be one of the best choices for PEC due to its success in solar cells technology. There are certain issues with Si such as stability in electrochemical medium [1] and higher surface reflectance (25\%) which limits the Si as an ideal candidate for PEC technique [2]. In the present work we addressed these issues by surface structuring and laminating the surface with metal oxide. The microstructuring of Si was done by electrochemical method. The Si microstructure photocathode was stabilized by thin layer of ALD grown TiO2 film. The microstructuring and lamination of Si photocathode by ALD layer of TiO2 decreased the reflectance ofthe surface and shift the onset potential towards anodic direction by 350 mV with a prolonged stability over 60 hours[3]. [1] C. Levy-Clement, J. Electrochem. Soc 1991, 12, 69 [2] J. Oh, et al. Energy Environ. Sci., 2011, 4, 1690 [3] C. Das, et al. Nanoscale 2015,7, 7726}, language = {en} }