@misc{MonsalveMelnikovStolzetal., author = {Monsalve, Jorge Mario and Melnikov, Anton and Stolz, Michael and Mrosk, Andreas and Jongmanns, Marcel and Wall, Franziska and Langa, Sergiu and Marica-Bercu, Ioana and Br{\"a}ndel, Tim and Kircher, Marco and Schenk, Hermann A. G. and Kaiser, Bert and Schenk, Harald}, title = {Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion}, series = {Sensors and Actuators A: Physical}, volume = {Vol. 345}, journal = {Sensors and Actuators A: Physical}, issn = {1873-3069}, doi = {10.1016/j.sna.2022.113813}, abstract = {An alternative implementation of an electrostatic MUT (Micromachined Ultrasonic Transducer), relying on multiple beams that displace along the chip's surface instead of a single membrane displacing perpendicular to it, is presented in this work. With this approach, a design requiring a low bias voltage (24 V) and occupying a small area (3.3×3.3 mm², 2D/λ≈0.77) was shown to generate a sound pressure level of 82 dB (re. 20 µPa-rms) at 40 kHz and a distance of 8.9 cm. The high level of damping allows this transducer to operate in a wide frequency range (35-63 kHz). The operation of this device as an ultrasonic receiver was also proven. An implementation of this transducer as a rangefinder requires a strong reduction in the noise level, particularly coming from radio-frequency interference, in order to increase its detection range.}, language = {en} }