@misc{KapuścikWojcieszakPokoraetal., author = {Kapuścik, Paulina and Wojcieszak, Damian and Pokora, Patrycja and Mańkowska, Ewa and Domaradzki, Jarosław and Mazur, Michał and Mazur, Piotr and Kosto, Yuliia and Morales, Carlos and Kot, Małgorzata and Flege, Jan Ingo}, title = {Low temperature hydrogen sensor with high sensitivity based on CeOx thin film}, series = {Sensors and Actuators B: Chemical}, volume = {417}, journal = {Sensors and Actuators B: Chemical}, publisher = {Elsevier BV}, issn = {0925-4005}, doi = {10.1016/j.snb.2024.136148}, pages = {12}, abstract = {In this work, a 500 nm-thick cerium oxide thin film was prepared by electron beam evaporation. It was found that the deposition of 7 nm thick Pd catalyst was required for obtaining a sensor response to hydrogen. The Pd/CeOx sensing structure has a high response of 5000 towards 25 ppm H2 at a working temperature of 200 °C and exhibits a sensor response of 1.3 at temperatures near ambient. Furthermore, the sensing structure exhibited excellent response/recovery kinetics. The results confirm that the CeOx-based materials are a promising material for the fabrication of room-temperature hydrogen sensors.}, language = {en} }