@misc{EngelhardKlempBehringeretal., author = {Engelhard, M. and Klemp, C. and Behringer, M. and Rudolph, A. and Skibitzki, Oliver and Zaumseil, Peter and Schr{\"o}der, Thomas}, title = {Characterization of reclaimed GaAs substrates and investigation of reuse for thin film InGaAlP LED epitaxial growth}, series = {Journal of Applied Physics}, volume = {120}, journal = {Journal of Applied Physics}, number = {4}, issn = {1089-7550}, doi = {10.1063/1.4955333}, pages = {045301}, language = {en} }