@misc{SchmeisserMuessig, author = {Schmeißer, Dieter and M{\"u}ssig, Hans-Joachim}, title = {The Pr2O3 / Si (001) interface studied by synchrotron radiation photo-electron spectroscopy}, series = {Solid State Electronics}, volume = {47}, journal = {Solid State Electronics}, number = {10}, issn = {0038-1101}, pages = {1607 -- 1611}, abstract = {Pr2O3 is currently under consideration as a potential replacement for SiO2 as the gate-dielectric material for sub-0.1micro m complementary metal-oxide-semiconductor (CMOS) technology. We studied the Pr2O3/Si(0 0 1) interface by a non-destructive depth profiling using synchrotron radiation photoelectron spectroscopy. Our data suggests that there is no silicide formation at the interface. Based on reported results, a chemical reactive interface exists, consisting of a mixed Si-Pr oxide such as (Pr2O3)x(SiO2)1?x, i.e. as a silicate phase with variable silicon content. This pseudo-binary alloy at the interface offers large flexibility toward successful integration of Pr2O3 into future CMOS technologies.}, language = {en} }