@article{AkhmetovRichterSeifertetal., author = {Akhmetov, V. D. and Richter, H. and Seifert, Winfried and Lysytskiy, O. and Wahlich, R. and M{\"u}ller, T. and Reiche, Manfred}, title = {Distribution and properties of oxide precipitates in annealed nitrogen doped 300 mm Si wafers}, series = {European Physics Journal of Applied Physics}, volume = {27}, journal = {European Physics Journal of Applied Physics}, number = {1-3}, issn = {1286-0042}, pages = {159 -- 161}, language = {en} }