@misc{KukliAarikAidlaetal., author = {Kukli, Kaupo and Aarik, Jaan and Aidla, Aleks and Uustare, Teet and J{\~o}gi, Indrek and Lu, Jun and Tallarida, Massimo and Kemell, Marianna and Kiisler, Alma- Asta and Ritala, Mikko and Leskel{\"a}, Markku}, title = {Structure and morphology of Ru films grown by atomic layer deposition from 1-ethyl-1ยด-methyl-ruthenocene}, series = {Journal of Crystal Growth}, volume = {312}, journal = {Journal of Crystal Growth}, number = {12-13}, issn = {0022-0248}, doi = {10.1016/j.jcrysgro.2010.03.033}, pages = {2025 -- 2032}, language = {en} }