@misc{ConradSchenkKaiseretal., author = {Conrad, Holger and Schenk, Harald and Kaiser, Bert and Langa, Sergiu and Gaudet, Matthieu and Schimmanz, Klaus and Stolz, Michael and Lenz, Miriam}, title = {A small-gap electrostatic micro-actuator for large deflections}, series = {Nature Communications}, journal = {Nature Communications}, number = {6}, issn = {2041-1723}, doi = {10.1038/ncomms10078}, pages = {10078}, language = {en} }