@inproceedings{SzeremleyMussenbrockBrinkmannetal., author = {Szeremley, Daniel and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Eremin, Denis and Mitschker, Felix and Steves, Simon and Awakowicz, Peter and Kushner, Mark}, title = {Numerical simulations of a microwave driven low pressure plasma}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534377}, language = {en} }