@misc{KruegerGergsTrieschmann, author = {Kr{\"u}ger, Florian and Gergs, Tobias and Trieschmann, Jan}, title = {Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {3}, issn = {1361-6595}, doi = {10.1088/1361-6595/ab0246}, pages = {12}, language = {en} } @misc{KruegerWilczekMussenbrocketal., author = {Kr{\"u}ger, Florian and Wilczek, Sebastian and Mussenbrock, Thomas and Schulze, Julian}, title = {Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {7}, issn = {963-0252}, doi = {10.1088/1361-6595/ab2c72}, pages = {13}, language = {en} }