@inproceedings{MichlingFriedrichSchmeisseretal., author = {Michling, Marcel and Friedrich, Daniel and Schmeißer, Dieter and Koval, Yuri and M{\"u}ller, Paul}, title = {Study of polyimide after graphitization with low-energy Ar+ Ion irradiation by NEXAFS}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 44}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 147}, abstract = {In this contribution we report on investigations of the electronic structure of Ar+ irradiated polyimide samples by using NEXAFS. The NEXAFS measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin using TEY and TFY detection. Polyimide samples are prepared using low Ar+ dose while the temperature of the samples is varied between 300K and 700K. In the NEXAFS data at the Carbon K-edge we see substantial changes between different samples. The differences appear in particular in the more surface sensitive TEY-Signal. The NEXFS data are consistent with the graphitization of the surface upon Ar+ bombardment as we identify the characteristic absorption bands of graphitic carbon. Its relative content increases with increasing sample temperature. In contrast, in the more bulk sensitive TFY data, the emission characteristic of polyimide is maintained. The possibility to cover insulating polymers with a conducting layer is a great demand for many applications. Because of the relative low price of the basic materials, the irradiation with low-energy Ions will play an important roll in the microelectronic of the future.}, language = {en} } @inproceedings{FriedrichMichlingSchmeisseretal., author = {Friedrich, Daniel and Michling, Marcel and Schmeißer, Dieter and Koval, Yuri and M{\"u}ller, Paul}, title = {Characterization of ion beam modified polyimide layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 45}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 247}, abstract = {Ion beam modified polyimide show high conductivity. In our investigation we focus on the electronic structure and the element composition, in order to understand the mechanism of conductivity. In our experiments we use the methods NEXAFS and PES. The measurements were done at the U49/2-PGM2 beam line of BESSY II, Berlin. We find an increase of the sp2 hybridized graphite contribution, after low Ar+ ion doses bombardment while the temperature of the samples is varied from 300 K to 650 K. In addition we follow the He+ bombardment induced changes by in-situ monitoring of the O1s, N1s content in the polyimide films.}, language = {en} } @inproceedings{FriedrichKovalMuelleretal., author = {Friedrich, Daniel and Koval, Yuri and M{\"u}ller, Paul and Schmeißer, Dieter}, title = {Electronic structure of thin spin-coated polyimide layers}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft, Reihe 6, Bd. 46}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 311}, abstract = {The conductivity of polyimide layers can be modified by several orders of magnitude by ion beam radiation. In order to understand the electronic structure of the pure polyimide before ion beam modification we focus in our preliminary experiments on spectroscopic investigations of thin as prepared polyimide films. The films were made by spin coating from a PMDA/ODA solution with subsequent vacuum annealing at 350°C. The layer thickness can be controlled by changing the concentration of PMDA/ODA in the solution realizing a thickness down to 3.5nm. For the characterization of the as prepared thin polyimide films the techniques NEXAFS, ResPES, XPS and CIS were applied at the U49/2-PGM2 beam line of Bessy II, Berlin. Our data including the valence band, core levels and absorption spectrum were compared with theoretical LCAO calculations. Based on these results we are able to attribute all spectral features to the specific atomic bonds in the molecule.}, language = {en} }