@misc{LeeParkKupniketal., author = {Lee, Hyunjoo J. and Park, Kwan Kyu and Kupnik, Mario and Oralkan, {\"O}mer and Khuri-Yakub, Butrus T.}, title = {Chemical vapor detection using a capacitive micromachined ultrasonic transducer}, series = {Analytical chemistry}, volume = {83}, journal = {Analytical chemistry}, number = {24}, issn = {1520-6882}, doi = {10.1021/ac201626b}, pages = {9314 -- 9320}, language = {en} } @misc{SariogluKupnikVaithilingametal., author = {Sarioglu, Ali Fatih and Kupnik, Mario and Vaithilingam, Srikant and Khuri-Yakub, Butrus T.}, title = {Nanoscale topography of thermally-grown oxide films at right-angled convex corners of silicon}, series = {Journal of The Electrochemical Society}, volume = {159}, journal = {Journal of The Electrochemical Society}, number = {2}, issn = {0013-4651}, doi = {10.1149/2.005202jes}, pages = {79 -- 84}, language = {en} } @misc{ParkLeeKupniketal., author = {Park, Kwan Kyu and Lee, Hyunjoo J. and Kupnik, Mario and Oralkan, {\"O}mer and Ramseyer, Jean-Pierre and Lang, Hans Peter and Hegner, Martin and Gerber, Christoph and Khuri-Yakub, Butrus T.}, title = {Capacitive micromachined ultrasonic transducer (CMUT) as a chemical sensor for DMMP detection}, series = {Sensors and Actuators B: Chemical}, volume = {160}, journal = {Sensors and Actuators B: Chemical}, number = {1}, issn = {0925-4005}, doi = {10.1016/j.snb.2011.09.036}, pages = {1120 -- 1127}, language = {en} } @misc{ParkLeeKupniketal., author = {Park, Kwan Kyu and Lee, Hyunjoo J. and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Fabrication of capacitive micromachined ultrasonic transducers via local oxidation and direct wafer bonding}, series = {Journal of Microelectromechanical Systems}, volume = {20}, journal = {Journal of Microelectromechanical Systems}, number = {1}, issn = {1941-0158}, doi = {10.1109/JMEMS.2010.2093567}, pages = {95 -- 103}, language = {en} } @inproceedings{KupnikHoVaithilingametal., author = {Kupnik, Mario and Ho, Min-Chieh and Vaithilingam, Srikant and Khuri-Yakub, Butrus T.}, title = {CMUTs for air coupled ultrasound with improved bandwidth}, series = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, booktitle = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1252-4}, pages = {592 -- 595}, language = {en} } @inproceedings{HoKupnikVaithilingametal., author = {Ho, Min-Chieh and Kupnik, Mario and Vaithilingam, Srikant and Khuri-Yakub, Butrus T.}, title = {Fabrication and model validation for CMUTs operated in permanent contact mode}, series = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, booktitle = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1252-4}, pages = {1016 -- 1019}, language = {en} } @inproceedings{ApteVaithilingamSariogluetal., author = {Apte, Nikhil and Vaithilingam, Srikant and Sarioglu, Ali Fatih and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Large area 1D CMUT phased arrays for multi-modality ultrasound imaging}, series = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, booktitle = {IEEE International Ultrasonics Symposium 2011, Orlando, Florida, USA, October 18-21, 2011}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-1252-4}, pages = {612 -- 615}, language = {en} } @misc{KupnikKhuriYakub, author = {Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {High-temperature electrostatic transducers and fabrication method}, language = {en} } @misc{KupnikKhuriYakub, author = {Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Monolithic integrated CMUTs fabricated by low temperature wafer bonding}, language = {en} } @misc{KupnikKhuriYakub, author = {Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Direct wafer-bonded 2D CMUT array}, language = {en} } @misc{LinZhuangWongetal., author = {Lin, Der-Song and Zhuang, Xuefeng and Wong, Serena H. and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer}, series = {Journal of Microelectromechanical Systems}, volume = {19}, journal = {Journal of Microelectromechanical Systems}, number = {6}, issn = {1941-0158}, doi = {10.1109/JMEMS.2010.2076786}, pages = {1341 -- 1351}, language = {en} } @misc{WongKupnikWatkinsetal., author = {Wong, Serena H. and Kupnik, Mario and Watkins, Ronald D. and Butts-Pauly, Kim and Khuri-Yakub, Butrus T.}, title = {Capacitive micromachined ultrasonic transducers for therapeutic ultrasound applications}, series = {IEEE transactions on bio-medical electronics}, volume = {57}, journal = {IEEE transactions on bio-medical electronics}, number = {1}, issn = {0018-9294}, pages = {114 -- 123}, language = {en} } @inproceedings{HoKupnikKhuriYakub, author = {Ho, Min-Chieh and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {FEA of CMUTs suitable for wide gas pressure range applications}, series = {2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010, vol. 2}, booktitle = {2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010, vol. 2}, publisher = {IEEE}, address = {Piscataway, NJ}, pages = {1234 -- 1237}, language = {en} } @inproceedings{KupnikVaithilingamTorashimaetal., author = {Kupnik, Mario and Vaithilingam, Srikant and Torashima, Kazutoshi and Wygant, Ira O. and Khuri-Yakub, Butrus T.}, title = {CMUT fabrication based on a thick buried oxide layer}, series = {IEEE International Ultrasonics Symposium proceedings}, booktitle = {IEEE International Ultrasonics Symposium proceedings}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-0381-2}, pages = {547 -- 550}, language = {en} } @inproceedings{YoonHoApteetal., author = {Yoon, Hyo-Seon and Ho, Min-Chieh and Apte, Nikhil and Cristman, Paul and Vaithilingam, Srikant and Kupnik, Mario and Butts-Pauly, Kim and Khuri-Yakub, Butrus T.}, title = {Fabrication of CMUT cells with gold center mass for higher output pressure}, series = {10th International Symposium on Therapeutic Ultrasound, ISTU 2010, Tokyo, Japan, 9 - 12 June 2010}, booktitle = {10th International Symposium on Therapeutic Ultrasound, ISTU 2010, Tokyo, Japan, 9 - 12 June 2010}, publisher = {American Inst. of Physics}, address = {Melville, NY}, isbn = {978-0-7354-0917-0}, pages = {183 -- 188}, language = {en} } @inproceedings{LeeParkKupniketal., author = {Lee, Hyunjoo J. and Park, Kwan Kyu and Kupnik, Mario and Oralkan, {\"O}mer and Khuri-Yakub, Butrus T.}, title = {Highly sensitive detection of DMMP using a CMUT chemical sensor}, series = {2010 IEEE sensors, Waikoloa, Hawaii, USA, 1 - 4 November 2010, the Ninth IEEE Sensors Conference 2010}, booktitle = {2010 IEEE sensors, Waikoloa, Hawaii, USA, 1 - 4 November 2010, the Ninth IEEE Sensors Conference 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4244-8168-2}, doi = {10.1109/ICSENS.2010.5690493}, pages = {2122 -- 2126}, language = {en} } @inproceedings{BaeckOralkanKupniketal., author = {B{\"a}ck, David and Oralkan, {\"O}mer and Kupnik, Mario and Willatzen, Morten and Khuri-Yakub, Butrus T. and Jensen, Jorgen Arendt}, title = {Simulating Capacitive Micromachined Ultrasonic Transducers (CMUTs) using Field II}, series = {IEEE Ultrasonics Symposium, San Diego, California, 2010}, booktitle = {IEEE Ultrasonics Symposium, San Diego, California, 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-0381-2}, pages = {439 -- 442}, language = {en} } @inproceedings{LinZhuangWodnickietal., author = {Lin, Der-Song and Zhuang, Xuefeng and Wodnicki, Robert and Woychik, Charles. G. and Oralkan, {\"O}mer and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Packaging of large and low-pitch size 2D ultrasonic transducer arrays}, series = {IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010}, booktitle = {IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-424-45761-8}, pages = {508 -- 511}, language = {en} } @inproceedings{WygantKupnikKhuriYakub, author = {Wygant, Ira O. and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Deriving a simulation model of a single 40-kHz CMUT cell from impedance and interferometer measurements}, language = {en} } @inproceedings{TsujiKupnikKhuriYakub, author = {Tsuji, Yukihide and Kupnik, Mario and Khuri-Yakub, Butrus T.}, title = {Low temperature process for CMUT fabrication with wafer bonding technique}, series = {2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010}, booktitle = {2010 IEEE International Ultrasonics Symposium (IUS 2010), San Diego, California, USA, 11 - 14 October 2010}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-0381-2}, pages = {551 -- 554}, language = {en} }