@misc{LayesMonjeCorbellaetal., author = {Layes, Vincent and Monje, Sascha and Corbella, Carles and Trieschmann, Jan and Arcos, Teresa de los and Keudell, Achim von}, title = {Species transport on the target during high power impulse magnetron sputtering}, series = {Applied Physics Letters}, volume = {110}, journal = {Applied Physics Letters}, number = {8}, issn = {1077-3118}, doi = {10.1063/1.4976999}, pages = {4}, language = {en} }