@inproceedings{TortschanoffBaumgartFranketal., author = {Tortschanoff, Andreas and Baumgart, M. and Frank, A. and Wildenhain, Michael and Sandner, Thilo and Schenk, Harald and Kenda, Andreas}, title = {Optical position feedback for electrostatically driven MOEMS-scanners}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {82520S-1 -- 82520S-8}, language = {en} } @misc{KendaKraftTortschanoffetal., author = {Kenda, Andreas and Kraft, Martin and Tortschanoff, Andreas and Scherf, Werner and Sandner, Thilo and Schenk, Harald and Luettjohann, Stephan and Simon, Apolline}, title = {Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives}, series = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, journal = {Next-generation spectroscopic technologies VII, 5 - 6 May 2014, Baltimore, Maryland, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-038-9}, pages = {910102-1 -- 910102-10}, language = {en} } @misc{SandnerGrashoffGaumontetal., author = {Sandner, Thilo and Grashoff, Thomas and Gaumont, E. and Schenk, Harald and Kenda, Andreas}, title = {Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011115-1 -- 011115-14}, language = {en} } @inproceedings{SandnerGrashoffSchenketal., author = {Sandner, Thilo and Grashoff, Thomas and Schenk, Harald and Kenda, Andreas}, title = {Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.909817}, pages = {82520C-1 -- 82520C-10}, language = {en} }