@inproceedings{KupnikVaithilingamTorashimaetal., author = {Kupnik, Mario and Vaithilingam, Srikant and Torashima, Kazutoshi and Wygant, Ira O. and Khuri-Yakub, Butrus T.}, title = {CMUT fabrication based on a thick buried oxide layer}, series = {IEEE International Ultrasonics Symposium proceedings}, booktitle = {IEEE International Ultrasonics Symposium proceedings}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4577-0381-2}, pages = {547 -- 550}, language = {en} }