@misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben}, language = {de} } @misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same}, abstract = {A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.}, language = {en} }