@inproceedings{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Schulze, Julian and Mussenbrock, Thomas and Bruneau, Bastien and Johnson, Erik and Lafleur, Trevor and Booth, Jean-Paul and O'Connell, Deborah and Gans, Timo and Korolov, Ihor and Derzsi, Aranka and Donk{\´o}, Zolt{\´a}n}, title = {Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534353}, language = {en} } @misc{SchmidtSchulzeJohnsonetal., author = {Schmidt, Frederik and Schulze, Julian and Johnson, Erik and Booth, Jean-Paul and Keil, Douglas and French, David M. and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Multi Frequency Matching for Voltage Waveform Tailoring}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {9}, issn = {0963-0252}, doi = {10.1088/1361-6595/aad2cd}, pages = {10}, language = {en} }