@misc{TammKemellKozlovaetal., author = {Tamm, Aile and Kemell, Marianna and Kozlova, Jekaterina and Sajavaara, Timo and Tallarida, Massimo and Kukli, Kaupo and Sammelselg, V. and Ritala, Mikko and Leskel{\"a}, Markku}, title = {Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxid Thin Films}, series = {Journal of The Electrochemical Society}, volume = {157}, journal = {Journal of The Electrochemical Society}, number = {10}, pages = {G193 -- G201}, language = {en} }