@misc{SchenkGrahmannSandneretal., author = {Schenk, Harald and Grahmann, Jan and Sandner, Thilo and Wagner, Michael and Dauderst{\"a}dt, Ulrike and Schmidt, Jan-Uwe}, title = {Micro mirrors for high-speed laser deflections and patterning}, series = {Physics Procedia}, volume = {56}, journal = {Physics Procedia}, issn = {1875-3892}, doi = {10.1016/j.phpro.2014.08.090}, pages = {7 -- 18}, language = {en} } @misc{ConradSchenkSchirrmannetal., author = {Conrad, Holger and Schenk, Harald and Schirrmann, Christian and Zimmer, Fabian and Schmidt, Jan-Uwe and Sandner, Thilo}, title = {Micromechanical element}, language = {en} }