@misc{WilczekTrieschmannEreminetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Eremin, Denis and Brinkmann, Ralf Peter and Schulze, Julian and Schuengel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Peter and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, series = {Physics of Plasmas}, volume = {23}, journal = {Physics of Plasmas}, number = {6}, issn = {1070-664X}, doi = {10.1063/1.4953432}, pages = {063514}, language = {en} } @misc{WilczekSchulzeBrinkmannetal., author = {Wilczek, Sebastian and Schulze, Julian and Brinkmann, Ralf Peter and Donk{\´o}, Zoltan and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Electron dynamics in low pressure capacitively coupled radio frequency discharges}, series = {Journal of Applied Physics}, volume = {127}, journal = {Journal of Applied Physics}, number = {18}, doi = {10.1063/5.0003114.1}, language = {en} } @misc{SchmidtTrieschmannGergsetal., author = {Schmidt, Frederik and Trieschmann, Jan and Gergs, Tobias and Mussenbrock, Thomas}, title = {A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits}, series = {Journal of Applied Physics}, volume = {125}, journal = {Journal of Applied Physics}, number = {17}, issn = {1089-7550}, doi = {10.1063/1.5091965}, pages = {173106}, language = {en} } @misc{KruegerGergsTrieschmann, author = {Kr{\"u}ger, Florian and Gergs, Tobias and Trieschmann, Jan}, title = {Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {3}, issn = {1361-6595}, doi = {10.1088/1361-6595/ab0246}, pages = {12}, language = {en} } @misc{SchmidtSchulzeJohnsonetal., author = {Schmidt, Frederik and Schulze, Julian and Johnson, Erik and Booth, Jean-Paul and Keil, Douglas and French, David M. and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Multi Frequency Matching for Voltage Waveform Tailoring}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {9}, issn = {0963-0252}, doi = {10.1088/1361-6595/aad2cd}, pages = {10}, language = {en} }