@misc{ZahariSchlichtingStrobeletal., author = {Zahari, Finn and Schlichting, Felix and Strobel, Julian and Dirkmann, Sven and Cipo, Julia and Gauter, Sven and Trieschmann, Jan and Marquardt, Richard and Haberfehlner, Georg and Kothleitner, Gerald and Kienle, Lorenz and Mussenbrock, Thomas and Ziegler, Martin and Kersten, Holger and Kohlstedt, Hermann}, title = {Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices}, series = {Journal of Vacuum Science \& Technology}, volume = {37}, journal = {Journal of Vacuum Science \& Technology}, number = {6}, issn = {1520-8559}, doi = {10.1116/1.5119984}, pages = {061203}, language = {en} } @misc{WrightLarsenKorsholmGoncalvesetal., author = {Wright Larsen, Axel and Korsholm, S{\o}ren Bang and Gon{\c{c}}alves, B. and Gutierrez, H. E. and Henriques, E. and Infante, V. and Jensen, T. and Jessen, M. and Klinkby, E. B. and Nonb{\o}l, E. and Luis, R. and Vale, A. and Lopes, A. and Naulin, V. and Nielsen, S. K. and Salewski, M. and Rasmussen, J. and Taormina, A. and M{\o}lls{\o}e, C. and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Mitigation of EC breakdown in the gyrotron transmission line of the ITER Collective Thomson Scattering diagnostic via a Split Biased Waveguide}, series = {Journal of Instrumentation}, volume = {14}, journal = {Journal of Instrumentation}, issn = {1748-0221}, doi = {10.1088/1748-0221/14/11/C11009}, pages = {8}, language = {en} } @misc{KlichWilczekJanssenetal., author = {Klich, Maximilian and Wilczek, Sebastian and Janssen, Jesper Frederikus Jacobus and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Ion dynamics in capacitively coupled argon-xenon discharges}, series = {Plasma Sources Science and Technology}, volume = {30}, journal = {Plasma Sources Science and Technology}, number = {6}, issn = {1361-6595}, doi = {10.1088/1361-6595/ac02b0}, language = {en} } @misc{LiuKorolovTrieschmannetal., author = {Liu, Yue and Korolov, Ihor and Trieschmann, Jan and Steuer, David and Schulz-von der Gathen, Volker and B{\"o}ke, Marc and Bischoff, Lena and H{\"u}bner, Gerrit and Schulze, Julian and Mussenbrock, Thomas}, title = {Micro Atmospheric Pressure Plasma Jets Excited in He/O2 by Voltage Waveform Tailoring: A Study Based on a Numerical Hybrid Model and Experiments}, series = {Plasma Sources Science and Technology}, volume = {30}, journal = {Plasma Sources Science and Technology}, number = {6}, issn = {1361-6595}, doi = {10.1088/1361-6595/abd0e0}, pages = {1 -- 30}, language = {en} } @misc{LiuTrieschmannBergeretal., author = {Liu, Yue and Trieschmann, Jan and Berger, Birk and Schulze, Julian and Mussenbrock, Thomas}, title = {Non-Linear Effects and Electron Heating Dynamics in Radio-Frequency Capacitively Coupled Plasmas with a Non-Uniform Transverse Magnetic Field}, series = {Physics of Plasmas}, volume = {28}, journal = {Physics of Plasmas}, number = {5}, issn = {1089-7674}, doi = {10.1063/5.0045947}, language = {en} } @misc{TrieschmannWrightLarsenMussenbrocketal., author = {Trieschmann, Jan and Wright Larsen, Axel and Mussenbrock, Thomas and Korsholm, S{\o}ren Bang}, title = {Kinetic simulation of electron cyclotron resonance assisted gas breakdown in split-biased waveguides for ITER collective Thomson scattering diagnostic}, series = {Physics of Plasmas}, volume = {28}, journal = {Physics of Plasmas}, number = {8}, issn = {1089-7674}, doi = {10.1063/5.0055461}, language = {en} } @misc{GergsBorislavovTrieschmann, author = {Gergs, Tobias and Borislavov, Borislav and Trieschmann, Jan}, title = {Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks}, series = {Journal of Vacuum Science \& Technology. B}, volume = {40}, journal = {Journal of Vacuum Science \& Technology. B}, number = {1}, issn = {2166-2754}, doi = {10.1116/6.0001485}, pages = {012802-1 -- 012802-15}, abstract = {Simulations of thin film sputter deposition require the separation of the plasma and material transport in the gas phase from the growth/sputtering processes at the bounding surfaces (e.g., substrate and target). Interface models based on analytic expressions or look-up tables inherently restrict this complex interaction to a bare minimum. A machine learning model has recently been shown to overcome this remedy for Ar ions bombarding a Ti-Al composite target. However, the chosen network structure (i.e., a multilayer perceptron, MLP) provides approximately 4×106 degrees of freedom, which bears the risk of overfitting the relevant dynamics and complicating the model to an unreliable extent. This work proposes a conceptually more sophisticated but parameterwise simplified regression artificial neural network for an extended scenario, considering a variable instead of a single fixed Ti-Al stoichiometry. A convolutional 𝛽-variational autoencoder is trained to reduce the high-dimensional energy-angular distribution of sputtered particles to a low-dimensional latent representation with only two components. In addition to a primary decoder that is trained to reconstruct the input energy-angular distribution, a secondary decoder is employed to reconstruct the mean energy of incident Ar ions as well as the present Ti-Al composition. The mutual latent space is hence conditioned on these quantities. The trained primary decoder of the variational autoencoder network is subsequently transferred to a regression network, for which only the mapping to the particular low-dimensional space has to be learned. While obtaining a competitive performance, the number of degrees of freedom is drastically reduced to 15 111 (0.378\% of the MLP) and 486 (0.012\% of the MLP) parameters for the primary decoder and the remaining regression network, respectively. The underlying methodology is very general and can easily be extended to more complex physical descriptions (e.g., taking into account dynamical surface properties) with a minimal amount of data required.}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @inproceedings{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Hitchon, William N. G. and Brinkmann, Ralf Peter}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, series = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179892}, language = {en} } @misc{BobzinBagcivanTheissetal., author = {Bobzin, Kirsten and Bagcivan, Nazlim and Theiß, Sebastian and Trieschmann, Jan and Brugnara, Ricardo Henrique and Preissing, Sven and Hecimovic, Ante}, title = {Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties}, series = {Journal of Vacuum Science \& Technology A}, volume = {32}, journal = {Journal of Vacuum Science \& Technology A}, number = {2}, issn = {1520-8559}, doi = {10.1116/1.4865917}, pages = {021513}, language = {en} }