@misc{KirchheimWilskiJaritzetal., author = {Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and Arcos, Teresa de los and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}, title = {Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD}, series = {Journal of Coatings Technology and Research}, volume = {16}, journal = {Journal of Coatings Technology and Research}, number = {2}, issn = {1547-0091}, doi = {10.1007/s11998-018-0138-4}, pages = {573 -- 583}, language = {en} } @misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @misc{DakshaDerzsiWilczeketal., author = {Daksha, Manaswi and Derzsi, Aranka and Wilczek, Sebastian and Trieschmann, Jan and Mussenbrock, Thomas and Awakowicz, Peter and Donk{\´o}, Zolt{\´a}n and Schulze, Julian}, title = {The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs}, series = {Plasma Sources Science and Technology}, volume = {26}, journal = {Plasma Sources Science and Technology}, number = {8}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa7c88}, pages = {085006}, language = {en} } @misc{TrieschmannRiesBibinovetal., author = {Trieschmann, Jan and Ries, Stefan and Bibinov, Nikita and Awakowicz, Peter and Mr{\´a}z, Stanislav and Schneider, Jochen M. and Mussenbrock, Thomas}, title = {Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {5}, doi = {10.1088/1361-6595/aac23e}, pages = {14}, language = {en} }