@misc{KirchheimWilskiJaritzetal., author = {Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and Arcos, Teresa de los and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}, title = {Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD}, series = {Journal of Coatings Technology and Research}, volume = {16}, journal = {Journal of Coatings Technology and Research}, number = {2}, issn = {1547-0091}, doi = {10.1007/s11998-018-0138-4}, pages = {573 -- 583}, language = {en} } @misc{TrieschmannSchmidtMussenbrock, author = {Trieschmann, Jan and Schmidt, Frederik and Mussenbrock, Thomas}, title = {Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges}, series = {Plasma Processes and Polymers}, volume = {14}, journal = {Plasma Processes and Polymers}, number = {1-2}, issn = {1612-8869}, doi = {10.1002/ppap.201600140}, pages = {1600140}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas}, series = {Plasma Sources Science and Technolgy}, volume = {26}, journal = {Plasma Sources Science and Technolgy}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa51f2}, pages = {024004}, language = {en} } @misc{WilczekTrieschmannEreminetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Eremin, Denis and Brinkmann, Ralf Peter and Schulze, Julian and Schuengel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Peter and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, series = {Physics of Plasmas}, volume = {23}, journal = {Physics of Plasmas}, number = {6}, issn = {1070-664X}, doi = {10.1063/1.4953432}, pages = {063514}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @misc{DirkmannZieglerHansenetal., author = {Dirkmann, Sven and Ziegler, Martin and Hansen, Mirko and Kohlstedt, Hermann and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {21}, issn = {1089-7550}, doi = {10.1063/1.4936107}, pages = {214501}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Transport of Sputtered Particles in Capacitive Sputter Sources}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {3}, issn = {1089-7550}, doi = {10.1063/1.4926878}, pages = {033302}, language = {en} } @misc{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Hitchon, William N. G.}, title = {Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas}, series = {Journal of Applied Physics}, volume = {117}, journal = {Journal of Applied Physics}, number = {2}, issn = {1089-7550}, doi = {10.1063/1.4905943}, pages = {023305}, language = {en} } @inproceedings{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Confinement of highly energetic electron beams in low pressure capacitive discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179545}, language = {en} } @inproceedings{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Hitchon, William N. G. and Brinkmann, Ralf Peter}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, series = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179892}, language = {en} }