@misc{KirchheimWilskiJaritzetal., author = {Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and Arcos, Teresa de los and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}, title = {Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD}, series = {Journal of Coatings Technology and Research}, volume = {16}, journal = {Journal of Coatings Technology and Research}, number = {2}, issn = {1547-0091}, doi = {10.1007/s11998-018-0138-4}, pages = {573 -- 583}, language = {en} } @misc{TrieschmannSchmidtMussenbrock, author = {Trieschmann, Jan and Schmidt, Frederik and Mussenbrock, Thomas}, title = {Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges}, series = {Plasma Processes and Polymers}, volume = {14}, journal = {Plasma Processes and Polymers}, number = {1-2}, issn = {1612-8869}, doi = {10.1002/ppap.201600140}, pages = {1600140}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas}, series = {Plasma Sources Science and Technolgy}, volume = {26}, journal = {Plasma Sources Science and Technolgy}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa51f2}, pages = {024004}, language = {en} } @misc{WilczekTrieschmannEreminetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Eremin, Denis and Brinkmann, Ralf Peter and Schulze, Julian and Schuengel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Peter and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, series = {Physics of Plasmas}, volume = {23}, journal = {Physics of Plasmas}, number = {6}, issn = {1070-664X}, doi = {10.1063/1.4953432}, pages = {063514}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @misc{DirkmannZieglerHansenetal., author = {Dirkmann, Sven and Ziegler, Martin and Hansen, Mirko and Kohlstedt, Hermann and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {21}, issn = {1089-7550}, doi = {10.1063/1.4936107}, pages = {214501}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Transport of Sputtered Particles in Capacitive Sputter Sources}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {3}, issn = {1089-7550}, doi = {10.1063/1.4926878}, pages = {033302}, language = {en} } @misc{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Hitchon, William N. G.}, title = {Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas}, series = {Journal of Applied Physics}, volume = {117}, journal = {Journal of Applied Physics}, number = {2}, issn = {1089-7550}, doi = {10.1063/1.4905943}, pages = {023305}, language = {en} } @inproceedings{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Confinement of highly energetic electron beams in low pressure capacitive discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179545}, language = {en} } @inproceedings{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Hitchon, William N. G. and Brinkmann, Ralf Peter}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, series = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179892}, language = {en} } @inproceedings{WilczekTrieschmannBrinkmannetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Paul and Donk{\´o}, Zolt{\´a}n}, title = {Hysteresis effects and confinement of beam electrons in capacitive discharges}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534342}, language = {en} } @misc{DakshaDerzsiWilczeketal., author = {Daksha, Manaswi and Derzsi, Aranka and Wilczek, Sebastian and Trieschmann, Jan and Mussenbrock, Thomas and Awakowicz, Peter and Donk{\´o}, Zolt{\´a}n and Schulze, Julian}, title = {The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs}, series = {Plasma Sources Science and Technology}, volume = {26}, journal = {Plasma Sources Science and Technology}, number = {8}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa7c88}, pages = {085006}, language = {en} } @misc{LayesMonjeCorbellaetal., author = {Layes, Vincent and Monje, Sascha and Corbella, Carles and Trieschmann, Jan and Arcos, Teresa de los and Keudell, Achim von}, title = {Species transport on the target during high power impulse magnetron sputtering}, series = {Applied Physics Letters}, volume = {110}, journal = {Applied Physics Letters}, number = {8}, issn = {1077-3118}, doi = {10.1063/1.4976999}, pages = {4}, language = {en} } @misc{TrieschmannXiaoProkopevaetal., author = {Trieschmann, Jan and Xiao, Shumin and Prokopeva, Ludmila J. and Drachev, Vladimir P. and Kildishev, Alexander V.}, title = {Experimental retrieval of the kinetic parameters of a dye in a solid film}, series = {Optics Express}, volume = {19}, journal = {Optics Express}, number = {19}, issn = {1094-4087}, doi = {10.1364/OE.19.018253}, pages = {18253 -- 18259}, language = {en} } @misc{BobzinBagcivanTheissetal., author = {Bobzin, Kirsten and Bagcivan, Nazlim and Theiß, Sebastian and Trieschmann, Jan and Brugnara, Ricardo Henrique and Preissing, Sven and Hecimovic, Ante}, title = {Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties}, series = {Journal of Vacuum Science \& Technology A}, volume = {32}, journal = {Journal of Vacuum Science \& Technology A}, number = {2}, issn = {1520-8559}, doi = {10.1116/1.4865917}, pages = {021513}, language = {en} } @misc{TrieschmannHegemann, author = {Trieschmann, Jan and Hegemann, Dirk}, title = {Plasma polymerization at different positions in an asymmetric ethylene discharge}, series = {Journal of Physics : D, Applied physics}, volume = {44}, journal = {Journal of Physics : D, Applied physics}, issn = {0022-3727}, doi = {10.1088/0022-3727/44/47/475201}, pages = {9}, language = {en} } @misc{SchmidtTrieschmannBrinkmannetal., author = {Schmidt, Frederik and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Nonlinear interaction of capacitive discharges and power matching networks}, series = {Bulletin of the American Physical Society}, volume = {62}, journal = {Bulletin of the American Physical Society}, number = {10}, issn = {0003-0503}, language = {en} } @misc{Trieschmann, author = {Trieschmann, Jan}, title = {Neutral Gas Simulation on the Influence of Rotating Spokes on Gas Rarefaction in High-Power Impulse Magnetron Sputtering}, series = {Contributions to Plasma Physics}, volume = {58}, journal = {Contributions to Plasma Physics}, number = {5}, issn = {1521-3986}, doi = {10.1002/ctpp.201700062}, pages = {394 -- 403}, language = {en} } @misc{KruegerTrieschmannBrinkmann, author = {Kr{\"u}ger, Dennis and Trieschmann, Jan and Brinkmann, Ralf Peter}, title = {Scattering of magnetized electrons at the boundary of low temperature plasmas}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aaaa85}, pages = {ID 025011}, language = {en} } @misc{TrieschmannRiesBibinovetal., author = {Trieschmann, Jan and Ries, Stefan and Bibinov, Nikita and Awakowicz, Peter and Mr{\´a}z, Stanislav and Schneider, Jochen M. and Mussenbrock, Thomas}, title = {Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {5}, doi = {10.1088/1361-6595/aac23e}, pages = {14}, language = {en} }