@misc{KirchheimWilskiJaritzetal., author = {Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and Böke, Marc and Benedikt, Jan and Arcos, Teresa de los and Grundmeier, Guido and Grochla, Dario and Ludwig, Alfred and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Awakowicz, Peter and Dahlmann, Rainer}, title = {Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD}, series = {Journal of Coatings Technology and Research}, volume = {16}, journal = {Journal of Coatings Technology and Research}, number = {2}, issn = {1547-0091}, doi = {10.1007/s11998-018-0138-4}, pages = {573 -- 583}, language = {en} } @misc{TrieschmannSchmidtMussenbrock, author = {Trieschmann, Jan and Schmidt, Frederik and Mussenbrock, Thomas}, title = {Particle-in-Cell/Test-Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges}, series = {Plasma Processes and Polymers}, volume = {14}, journal = {Plasma Processes and Polymers}, number = {1-2}, issn = {1612-8869}, doi = {10.1002/ppap.201600140}, pages = {1600140}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Analysis of Negative Power Deposition in Low Pressure Plasmas}, series = {Plasma Sources Science and Technolgy}, volume = {26}, journal = {Plasma Sources Science and Technolgy}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa51f2}, pages = {024004}, language = {en} } @misc{EreminBienholzSzeremleyetal., author = {Eremin, Denis and Bienholz, Stefan and Szeremley, Daniel and Trieschmann, Jan and Ries, Stefan and Awakowicz, Peter and Mussenbrock, Thomas and Brinkmann, Ralf Peter}, title = {On the Physics of a Large CCP Discharge}, series = {Plasma Sources Science and Technology}, volume = {25}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/0963-0252/25/2/025020}, pages = {025020}, language = {en} } @misc{DirkmannZieglerHansenetal., author = {Dirkmann, Sven and Ziegler, Martin and Hansen, Mirko and Kohlstedt, Hermann and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Simulation of Filament Growth Dynamics in Memristive Electrochemical Metallization Devices}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {21}, issn = {1089-7550}, doi = {10.1063/1.4936107}, pages = {214501}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Transport of Sputtered Particles in Capacitive Sputter Sources}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {3}, issn = {1089-7550}, doi = {10.1063/1.4926878}, pages = {033302}, language = {en} } @misc{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Brinkmann, Ralf Peter and Hitchon, William N. G.}, title = {Analytic model of the Energy Distribution Function for Highly Energetic Electrons in Technological Plasmas}, series = {Journal of Applied Physics}, volume = {117}, journal = {Journal of Applied Physics}, number = {2}, issn = {1089-7550}, doi = {10.1063/1.4905943}, pages = {023305}, language = {en} } @inproceedings{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Confinement of highly energetic electron beams in low pressure capacitive discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179545}, language = {en} } @inproceedings{WilczekTrieschmannBrinkmannetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Paul and Donk{\´o}, Zolt{\´a}n}, title = {Hysteresis effects and confinement of beam electrons in capacitive discharges}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534342}, language = {en} } @misc{DakshaDerzsiWilczeketal., author = {Daksha, Manaswi and Derzsi, Aranka and Wilczek, Sebastian and Trieschmann, Jan and Mussenbrock, Thomas and Awakowicz, Peter and Donk{\´o}, Zolt{\´a}n and Schulze, Julian}, title = {The Effect of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Single- and Dual-Frequency CCPs}, series = {Plasma Sources Science and Technology}, volume = {26}, journal = {Plasma Sources Science and Technology}, number = {8}, issn = {1361-6595}, doi = {10.1088/1361-6595/aa7c88}, pages = {085006}, language = {en} } @misc{LayesMonjeCorbellaetal., author = {Layes, Vincent and Monje, Sascha and Corbella, Carles and Trieschmann, Jan and Arcos, Teresa de los and Keudell, Achim von}, title = {Species transport on the target during high power impulse magnetron sputtering}, series = {Applied Physics Letters}, volume = {110}, journal = {Applied Physics Letters}, number = {8}, issn = {1077-3118}, doi = {10.1063/1.4976999}, pages = {4}, language = {en} } @misc{TrieschmannHegemann, author = {Trieschmann, Jan and Hegemann, Dirk}, title = {Plasma polymerization at different positions in an asymmetric ethylene discharge}, series = {Journal of Physics : D, Applied physics}, volume = {44}, journal = {Journal of Physics : D, Applied physics}, issn = {0022-3727}, doi = {10.1088/0022-3727/44/47/475201}, pages = {9}, language = {en} } @misc{TrieschmannXiaoProkopevaetal., author = {Trieschmann, Jan and Xiao, Shumin and Prokopeva, Ludmila J. and Drachev, Vladimir P. and Kildishev, Alexander V.}, title = {Experimental retrieval of the kinetic parameters of a dye in a solid film}, series = {Optics Express}, volume = {19}, journal = {Optics Express}, number = {19}, issn = {1094-4087}, doi = {10.1364/OE.19.018253}, pages = {18253 -- 18259}, language = {en} } @misc{SchmidtTrieschmannBrinkmannetal., author = {Schmidt, Frederik and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Nonlinear interaction of capacitive discharges and power matching networks}, series = {Bulletin of the American Physical Society}, volume = {62}, journal = {Bulletin of the American Physical Society}, number = {10}, issn = {0003-0503}, language = {en} } @misc{KruegerTrieschmannBrinkmann, author = {Kr{\"u}ger, Dennis and Trieschmann, Jan and Brinkmann, Ralf Peter}, title = {Scattering of magnetized electrons at the boundary of low temperature plasmas}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {1361-6595}, doi = {10.1088/1361-6595/aaaa85}, pages = {ID 025011}, language = {en} } @misc{TrieschmannRiesBibinovetal., author = {Trieschmann, Jan and Ries, Stefan and Bibinov, Nikita and Awakowicz, Peter and Mr{\´a}z, Stanislav and Schneider, Jochen M. and Mussenbrock, Thomas}, title = {Combined experimental and theoretical description of direct current magnetron sputtering of Al by Ar and Ar/N₂ plasma}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {5}, doi = {10.1088/1361-6595/aac23e}, pages = {14}, language = {en} } @misc{Trieschmann, author = {Trieschmann, Jan}, title = {Neutral Gas Simulation on the Influence of Rotating Spokes on Gas Rarefaction in High-Power Impulse Magnetron Sputtering}, series = {Contributions to Plasma Physics}, volume = {58}, journal = {Contributions to Plasma Physics}, number = {5}, issn = {1521-3986}, doi = {10.1002/ctpp.201700062}, pages = {394 -- 403}, language = {en} } @misc{SchmidtMussenbrockTrieschmann, author = {Schmidt, Frederik and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Consistent Simulation of Capacitive Radio-Frequency Discharges and External Matching Networks}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {10}, issn = {1361-6595}, doi = {10.1088/1361-6595/aae429}, pages = {7}, language = {en} } @misc{TrieschmannMussenbrock, author = {Trieschmann, Jan and Mussenbrock, Thomas}, title = {Kinetic Bandgap Analysis of Plasma Photonic Crystals}, series = {Journal of Applied Physics}, volume = {124}, journal = {Journal of Applied Physics}, number = {17}, issn = {0021-8979}, doi = {10.1063/1.5055282}, pages = {5}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Donko, Zoltan and Brinkmann, Ralf Peter and Mussenbrock, Thomas}, title = {Disparity between current and voltage driven capacitively coupled radio frequency discharges}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {12}, issn = {1361-6595}, doi = {10.1088/1361-6595/aae5c1}, pages = {12}, language = {en} } @misc{ZahariSchlichtingStrobeletal., author = {Zahari, Finn and Schlichting, Felix and Strobel, Julian and Dirkmann, Sven and Cipo, Julia and Gauter, Sven and Trieschmann, Jan and Marquardt, Richard and Haberfehlner, Georg and Kothleitner, Gerald and Kienle, Lorenz and Mussenbrock, Thomas and Ziegler, Martin and Kersten, Holger and Kohlstedt, Hermann}, title = {Correlation between sputter deposition parameters and I-V characteristics in double-barrier memristive devices}, series = {Journal of Vacuum Science \& Technology}, volume = {37}, journal = {Journal of Vacuum Science \& Technology}, number = {6}, issn = {1520-8559}, doi = {10.1116/1.5119984}, pages = {061203}, language = {en} } @misc{WrightLarsenKorsholmGoncalvesetal., author = {Wright Larsen, Axel and Korsholm, S{\o}ren Bang and Gon{\c{c}}alves, B. and Gutierrez, H. E. and Henriques, E. and Infante, V. and Jensen, T. and Jessen, M. and Klinkby, E. B. and Nonb{\o}l, E. and Luis, R. and Vale, A. and Lopes, A. and Naulin, V. and Nielsen, S. K. and Salewski, M. and Rasmussen, J. and Taormina, A. and M{\o}lls{\o}e, C. and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Mitigation of EC breakdown in the gyrotron transmission line of the ITER Collective Thomson Scattering diagnostic via a Split Biased Waveguide}, series = {Journal of Instrumentation}, volume = {14}, journal = {Journal of Instrumentation}, issn = {1748-0221}, doi = {10.1088/1748-0221/14/11/C11009}, pages = {8}, language = {en} } @misc{KlichWilczekJanssenetal., author = {Klich, Maximilian and Wilczek, Sebastian and Janssen, Jesper Frederikus Jacobus and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Trieschmann, Jan}, title = {Ion dynamics in capacitively coupled argon-xenon discharges}, series = {Plasma Sources Science and Technology}, volume = {30}, journal = {Plasma Sources Science and Technology}, number = {6}, issn = {1361-6595}, doi = {10.1088/1361-6595/ac02b0}, language = {en} } @misc{LiuKorolovTrieschmannetal., author = {Liu, Yue and Korolov, Ihor and Trieschmann, Jan and Steuer, David and Schulz-von der Gathen, Volker and B{\"o}ke, Marc and Bischoff, Lena and H{\"u}bner, Gerrit and Schulze, Julian and Mussenbrock, Thomas}, title = {Micro Atmospheric Pressure Plasma Jets Excited in He/O2 by Voltage Waveform Tailoring: A Study Based on a Numerical Hybrid Model and Experiments}, series = {Plasma Sources Science and Technology}, volume = {30}, journal = {Plasma Sources Science and Technology}, number = {6}, issn = {1361-6595}, doi = {10.1088/1361-6595/abd0e0}, pages = {1 -- 30}, language = {en} } @misc{LiuTrieschmannBergeretal., author = {Liu, Yue and Trieschmann, Jan and Berger, Birk and Schulze, Julian and Mussenbrock, Thomas}, title = {Non-Linear Effects and Electron Heating Dynamics in Radio-Frequency Capacitively Coupled Plasmas with a Non-Uniform Transverse Magnetic Field}, series = {Physics of Plasmas}, volume = {28}, journal = {Physics of Plasmas}, number = {5}, issn = {1089-7674}, doi = {10.1063/5.0045947}, language = {en} } @misc{TrieschmannWrightLarsenMussenbrocketal., author = {Trieschmann, Jan and Wright Larsen, Axel and Mussenbrock, Thomas and Korsholm, S{\o}ren Bang}, title = {Kinetic simulation of electron cyclotron resonance assisted gas breakdown in split-biased waveguides for ITER collective Thomson scattering diagnostic}, series = {Physics of Plasmas}, volume = {28}, journal = {Physics of Plasmas}, number = {8}, issn = {1089-7674}, doi = {10.1063/5.0055461}, language = {en} } @misc{GergsBorislavovTrieschmann, author = {Gergs, Tobias and Borislavov, Borislav and Trieschmann, Jan}, title = {Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks}, series = {Journal of Vacuum Science \& Technology. B}, volume = {40}, journal = {Journal of Vacuum Science \& Technology. B}, number = {1}, issn = {2166-2754}, doi = {10.1116/6.0001485}, pages = {012802-1 -- 012802-15}, abstract = {Simulations of thin film sputter deposition require the separation of the plasma and material transport in the gas phase from the growth/sputtering processes at the bounding surfaces (e.g., substrate and target). Interface models based on analytic expressions or look-up tables inherently restrict this complex interaction to a bare minimum. A machine learning model has recently been shown to overcome this remedy for Ar ions bombarding a Ti-Al composite target. However, the chosen network structure (i.e., a multilayer perceptron, MLP) provides approximately 4×106 degrees of freedom, which bears the risk of overfitting the relevant dynamics and complicating the model to an unreliable extent. This work proposes a conceptually more sophisticated but parameterwise simplified regression artificial neural network for an extended scenario, considering a variable instead of a single fixed Ti-Al stoichiometry. A convolutional 𝛽-variational autoencoder is trained to reduce the high-dimensional energy-angular distribution of sputtered particles to a low-dimensional latent representation with only two components. In addition to a primary decoder that is trained to reconstruct the input energy-angular distribution, a secondary decoder is employed to reconstruct the mean energy of incident Ar ions as well as the present Ti-Al composition. The mutual latent space is hence conditioned on these quantities. The trained primary decoder of the variational autoencoder network is subsequently transferred to a regression network, for which only the mapping to the particular low-dimensional space has to be learned. While obtaining a competitive performance, the number of degrees of freedom is drastically reduced to 15 111 (0.378\% of the MLP) and 486 (0.012\% of the MLP) parameters for the primary decoder and the remaining regression network, respectively. The underlying methodology is very general and can easily be extended to more complex physical descriptions (e.g., taking into account dynamical surface properties) with a minimal amount of data required.}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @inproceedings{GallianTrieschmannMussenbrocketal., author = {Gallian, Sara and Trieschmann, Jan and Mussenbrock, Thomas and Hitchon, William N. G. and Brinkmann, Ralf Peter}, title = {Analytic model of the energy distribution for energetic electrons in HiPIMS}, series = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, booktitle = {2015 IEEE International Conference on Plasma Sciences (ICOPS), 24 - 28 May 2015, Belek, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179892}, language = {en} } @misc{BobzinBagcivanTheissetal., author = {Bobzin, Kirsten and Bagcivan, Nazlim and Theiß, Sebastian and Trieschmann, Jan and Brugnara, Ricardo Henrique and Preissing, Sven and Hecimovic, Ante}, title = {Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties}, series = {Journal of Vacuum Science \& Technology A}, volume = {32}, journal = {Journal of Vacuum Science \& Technology A}, number = {2}, issn = {1520-8559}, doi = {10.1116/1.4865917}, pages = {021513}, language = {en} } @misc{WilczekTrieschmannEreminetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Eremin, Denis and Brinkmann, Ralf Peter and Schulze, Julian and Schuengel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Peter and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas}, series = {Physics of Plasmas}, volume = {23}, journal = {Physics of Plasmas}, number = {6}, issn = {1070-664X}, doi = {10.1063/1.4953432}, pages = {063514}, language = {en} } @misc{WilczekSchulzeBrinkmannetal., author = {Wilczek, Sebastian and Schulze, Julian and Brinkmann, Ralf Peter and Donk{\´o}, Zoltan and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Electron dynamics in low pressure capacitively coupled radio frequency discharges}, series = {Journal of Applied Physics}, volume = {127}, journal = {Journal of Applied Physics}, number = {18}, doi = {10.1063/5.0003114.1}, language = {en} } @misc{SchmidtTrieschmannGergsetal., author = {Schmidt, Frederik and Trieschmann, Jan and Gergs, Tobias and Mussenbrock, Thomas}, title = {A generic method for equipping arbitrary rf discharge simulation frameworks with external lumped element circuits}, series = {Journal of Applied Physics}, volume = {125}, journal = {Journal of Applied Physics}, number = {17}, issn = {1089-7550}, doi = {10.1063/1.5091965}, pages = {173106}, language = {en} } @misc{KruegerGergsTrieschmann, author = {Kr{\"u}ger, Florian and Gergs, Tobias and Trieschmann, Jan}, title = {Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations}, series = {Plasma Sources Science and Technology}, volume = {28}, journal = {Plasma Sources Science and Technology}, number = {3}, issn = {1361-6595}, doi = {10.1088/1361-6595/ab0246}, pages = {12}, language = {en} } @misc{SchmidtSchulzeJohnsonetal., author = {Schmidt, Frederik and Schulze, Julian and Johnson, Erik and Booth, Jean-Paul and Keil, Douglas and French, David M. and Trieschmann, Jan and Mussenbrock, Thomas}, title = {Multi Frequency Matching for Voltage Waveform Tailoring}, series = {Plasma Sources Science and Technology}, volume = {27}, journal = {Plasma Sources Science and Technology}, number = {9}, issn = {0963-0252}, doi = {10.1088/1361-6595/aad2cd}, pages = {10}, language = {en} }