@misc{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Schulze, Julian}, title = {Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {22}, issn = {1089-7550}, doi = {10.1063/1.4937403}, pages = {223302}, language = {en} } @inproceedings{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Schulze, Julian and Mussenbrock, Thomas and Bruneau, Bastien and Johnson, Erik and Lafleur, Trevor and Booth, Jean-Paul and O'Connell, Deborah and Gans, Timo and Korolov, Ihor and Derzsi, Aranka and Donk{\´o}, Zolt{\´a}n}, title = {Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534353}, language = {en} }