@misc{SoniaRichterBrunneretal., author = {Sonia, G. and Richter, E. and Brunner, F. and Denker, A. and Lossy, R. and Mai, M. and Lenk, Friedrich and Bundesmann, J. and Pensl, G. and Schmidt, J. and Zeimer, U. and Wang, L. and Baskar, K. and Weyers, M. and W{\"u}rfl, Joachim and Tr{\"a}nkle, G{\"u}nther}, title = {2 MeV ion irradiation effects on AlGaN/GaN HFET devices}, series = {Solid-State Electronics}, volume = {52}, journal = {Solid-State Electronics}, number = {7}, issn = {0038-1101}, pages = {1011 -- 1017}, abstract = {AlGaN/GaN heterostructure field effect transistors (HFETs) were irradiated with 2 MeV protons, carbon, oxygen, iron and krypton ions with fluences ranging from 1 × 109 cm-2 to 1 × 1013 cm-2. DC, pulsed I-V characteristics, loadpull and S-parameters of the AlGaN HFET devices were measured before and after irradiation. In parallel, a thick GaN reference layer was also irradiated with the same ions and was characterized by X-ray diffraction, photoluminescence, Hall measurements before and after irradiation. Small changes in the device performance were observed after irradiation with carbon and oxygen at a fluence of 5 × 1010 cm-2. Remarkable changes in device characteristics were seen at a fluence of 1 × 1012 cm-2 for carbon, oxygen, iron and krypton irradiation. Similarly, remarkable changes were also observed in the GaN layer for irradiations with fluence of 1 × 1012 cm-2. The results found on devices and on the GaN layer were compared and correlated.}, language = {en} }