@incollection{SchenkHornbeck, author = {Schenk, Harald and Hornbeck, L. J.}, title = {Micro Mirrors}, series = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, booktitle = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, editor = {Waser, Rainer}, publisher = {Wiley-VCH-Verlag}, address = {Weinheim}, isbn = {978-3-527-40927-3}, pages = {985 -- 999}, language = {en} }