@misc{MoralesTschammerPożarowskaetal., author = {Morales, Carlos and Tschammer, Rudi and Pożarowska, Emilia and Kosto, Julia and Villar-Garcia, Ignacio J. and P{\´e}rez-Dieste, Virginia and Favaro, Marco and Starr, David E. and Kapuścik, Paulina and Mazur, Michał and Wojcieszak, Damian and Domaradzki, Jarosław and Alvarado, Carlos and Wenger, Christian and Henkel, Karsten and Flege, Jan Ingo}, title = {Hydrogen sensing via heterolytic H₂ activation at room temperature by atomic layer deposited ceria}, series = {ChemSusChem : chemistry, sustainability, energy, materials}, volume = {18}, journal = {ChemSusChem : chemistry, sustainability, energy, materials}, number = {13}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1864-5631}, doi = {10.1002/cssc.202402342}, pages = {1 -- 13}, abstract = {Ultrathin atomic layer deposited ceria films (\<20 nm) are capable of H2 heterolytic activation at room temperature, undergoing a significant reduction regardless of the absolute pressure, as measured under in-situ conditions by near ambient pressure X-ray photoelectron spectroscopy. ALD-ceria can gradually reduce as a function of H2 concentration under H2/O2 environments, especially for diluted mixtures below 10 \%. At room temperature, this reduction is limited to the surface region, where the hydroxylation of the ceria surface induces a charge transfer towards the ceria matrix, reducing Ce4+ cations to Ce3+. Thus, ALD-ceria replicates the expected sensing mechanism of metal oxides at low temperatures without using any noble metal decorating the oxide surface to enhance H2 dissociation. The intrinsic defects of the ALD deposit seem to play a crucial role since the post-annealing process capable of healing these defects leads to decreased film reactivity. The sensing behavior was successfully demonstrated in sensor test structures by resistance changes towards low concentrations of H2 at low operating temperatures without using noble metals. These promising results call for combining ALD-ceria with more conductive metal oxides, taking advantage of the charge transfer at the interface and thus modifying the depletion layer formed at the heterojunction.}, language = {en} } @misc{MoralesTschammerGuttmannetal., author = {Morales, Carlos and Tschammer, Rudi and Guttmann, Dominic and Chavarin, Carlos Alvarado and Ruffert, Christine and Henkel, Karsten and Wenger, Christian and Flege, Jan Ingo}, title = {Bottom-up strategy to develop ultrathin active layers by atomic layer deposition for room temperature hydrogen sensors compatible with CMOS technology}, series = {MikroSystemTechnik Kongress 2025 : Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouver{\"a}nit{\"a}t : proceedings : 27.-29. Oktober 2025, Duisburg}, journal = {MikroSystemTechnik Kongress 2025 : Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Nachhaltigkeit und Technologiesouver{\"a}nit{\"a}t : proceedings : 27.-29. Oktober 2025, Duisburg}, publisher = {VDE VERLAG GmbH}, address = {Berlin}, isbn = {978-3-8007-6614-7}, pages = {71ff.}, language = {en} } @misc{KaoScheweAkhtaretal., author = {Kao, Ming-Chao and Schewe, Lukas Paul and Akhtar, Arub and Vlad, Alina and Keller, Thomas F. and Henkel, Karsten and Anooz, Saud Bin and Popp, Andreas and Galazka, Zbigniew and Flege, Jan Ingo and Stierle, Andreas and Vonk, Vedran}, title = {Surface termination of β-Ga₂O₃(100) as-cleaved single crystals}, series = {Applied physics letters}, volume = {128}, journal = {Applied physics letters}, number = {7}, publisher = {AIP Publishing}, address = {Melville, NY}, issn = {0003-6951}, doi = {10.1063/5.0309937}, pages = {1 -- 5}, abstract = {The surface of β-Ga₂O₃ single crystals cleaved along their (100) plane is investigated using surface x-ray diffraction and atomic force microscopy. The results show the surface to consist of a single, so-called B-termination, which means that the crystal cleaves at planes formed by edge-sharing oxygen octahedra, thereby breaking the longest and weakest Ga-O bonds. Refinement of the atomic positions results in small displacements from the bulk structure, at most approximately 0.01 {\AA}. Atomic force microscopy suggests that relatively large terraces form together with steps of half the a-axis length of approximately 0.6 nm, which means that terraces have the same atomic termination, related by the crystal symmetry. These results are important as a fundamental property of β-Ga₂O₃ when processed or used in various semiconductor applications.}, language = {en} }