@misc{BobzinBagcivanTheissetal., author = {Bobzin, Kirsten and Bagcivan, Nazlim and Theiß, Sebastian and Trieschmann, Jan and Brugnara, Ricardo Henrique and Preissing, Sven and Hecimovic, Ante}, title = {Influence of Ar/Kr ratio and pulse parameters in a Cr-N high power pulse magnetron sputtering process on plasma and coating properties}, series = {Journal of Vacuum Science \& Technology A}, volume = {32}, journal = {Journal of Vacuum Science \& Technology A}, number = {2}, issn = {1520-8559}, doi = {10.1116/1.4865917}, pages = {021513}, language = {en} }