@misc{SandnerSchenk, author = {Sandner, Thilo and Schenk, Harald}, title = {Optical device comprising a structure for avoiding reflections}, language = {en} } @incollection{SchenkHornbeck, author = {Schenk, Harald and Hornbeck, L. J.}, title = {Micro Mirrors}, series = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, booktitle = {Nanoelectronics and information technology : advanced electronic materials and novel devices}, editor = {Waser, Rainer}, publisher = {Wiley-VCH-Verlag}, address = {Weinheim}, isbn = {978-3-527-40927-3}, pages = {985 -- 999}, language = {en} } @inproceedings{GruegerKnobbePuegneretal., author = {Gr{\"u}ger, Heinrich and Knobbe, Jens and P{\"u}gner, Tino and Schenk, Harald}, title = {Design and Characterization of a hybrid-integrated MEMS scanning grating spectrometer}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2004215}, pages = {86160L-1 -- 86160L-13}, language = {en} } @misc{KurthKunathSchenk, author = {Kurth, Eberhard and Kunath, Christian and Schenk, Harald}, title = {Ion-sensitive structure and method of manufacturing the same}, language = {en} } @inproceedings{DrabeKallweitDreyhauptetal., author = {Drabe, Christian and Kallweit, David and Dreyhaupt, Andre and Grahmann, Jan and Schenk, Harald and Davis, Wyatt}, title = {Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.910203}, pages = {825209-1 -- 825209-10}, language = {en} } @misc{KloseWolterSchenk, author = {Klose, Thomas and Wolter, Alexander and Schenk, Harald}, title = {Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use}, language = {en} } @misc{SickerHeberBerndtetal., author = {Sicker, Cornelius and Heber, J{\"o}rg and Berndt, Dirk and R{\"u}ckerl, Florian and Tinevez, Jean-Yves and Shorte, Spencer and Wagner, Michael and Schenk, Harald}, title = {Spatially resolved contrast measurement of diffractive micromirror arrays}, series = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, journal = {MOEMS and miniaturized systems XIV, 9 - 12 February 2015, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-465-3}, pages = {93750D-1 -- 93750D-10}, language = {en} }