@misc{HaeberleHenkelGargourietal., author = {Haeberle, J{\"o}rg and Henkel, Karsten and Gargouri, Hassan and Naumann, Franziska and Gruska, Bernd and Arens, Michael and Tallarida, Massimo and Schmeißer, Dieter}, title = {Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films}, series = {Beilstein Journal of Nanotechnology}, volume = {2013}, journal = {Beilstein Journal of Nanotechnology}, number = {4}, issn = {2190-4286}, doi = {10.3762/bjnano.4.83}, pages = {732 -- 742}, abstract = {We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using thermal atomic layer deposition (T-ALD) and plasma enhanced atomic layer deposition (PE-ALD) in the SENTECH SI ALD LL system. The T-ALD Al2O3layers were deposited at 200 °C, for the PE-ALD films we varied the substrate temperature range between room temperature (rt) and 200 °C. We show data from spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4" wafers and correlatethem to X-ray photoelectron spectroscopy (XPS) results. The 200°C T-ALD and PE-ALD processes yield films with similar refractive indices and with oxygen to aluminum elemental ratios very close to the stoichiometric value of 1.5. However, in both also fragments of the precursor are integrated into the film. The PE-ALD films show an increased growth rate and lower carbon contaminations. Reducing the deposition temperature down to rt leads to a higher content of carbon and CH-species. We also find a decrease of the refractive index and of the oxygen to aluminum elemental ratio as well as an increase of the growth rate whereas the homogeneity of the film growth is not influenced significantly. Initial state energy shifts in all PE-ALD samples are observed which we attribute to a net negative charge within the films.}, language = {en} } @misc{HaeberleRichterGalazkaetal., author = {Haeberle, J{\"o}rg and Richter, Matthias and Galazka, Zbigniew and Janowitz, Christoph and Schmeißer, Dieter}, title = {Resonant Photoemission at the O1s threshold to characterize In2O3 single crystals}, series = {Thin Solid Films}, volume = {2014}, journal = {Thin Solid Films}, number = {555}, issn = {0040-6090}, doi = {10.1016/j.tsf.2013.03.036}, pages = {53 -- 56}, abstract = {We report on spectroscopic investigations on In2O3 single crystals. We focus on the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. We analyze the electronic structure and assign the O2p to build the valence band and both, O2p and In5s5p states to contribute to the conduction band (CB). We determine the partial density of states for the valence and CBs and find a strong hybridization of O2p and In5s states. This is deduced from constant final state spectra on the O-KLL-Auger over the O K-edge and In M4,5-edge and a comparison to the corresponding X-ray absorption spectroscopy data.We also identify several types of defects. A broad band of oxygen derived defects is identified that extends throughout the gap. These are attributed to small polarons which cause an anti-resonance in the valence states around the O1s threshold. In addition, a separate Auger decay at resonance indicates the existence of localized charge transfer states which involves localized In5s5p states.}, language = {en} } @inproceedings{HenkelTallaridaHaeberleetal., author = {Henkel, Karsten and Tallarida, Massimo and Haeberle, J{\"o}rg and Gargouri, Hassan and Naumann, Franziska and Gruska, Bernd and Arens, Michael and Schmeißer, Dieter}, title = {PE-ALD-Al2O3-Schichten f{\"u}r die Passivierung von Solarzellen}, series = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 16.04.2014}, booktitle = {Tagungsband Photovoltaik-Meeting: Anwendungen-Qualit{\"a}t-Perspektiven, Senftenberg, 16.04.2014}, editor = {Gl{\"u}ck, Bernhard K. and Schmidt, Sindy and Stein, Erhard and Raschke, J{\"o}rg-Uwe and Richter, Hans}, publisher = {Cottbus-Senftenberg}, address = {BTU}, pages = {7 -- 14}, abstract = {D{\"u}nne Al2O3-Schichten wurden bei Substrattemperaturen zwischen Raumtemperatur und 200°C mittels PE-ALD auf Si-Substraten abgeschieden und ellipsometrisch, spektroskopisch und elektrisch charakterisiert. Ihr Potenzial f{\"u}r die chemische und Feldeffektpassivierung der Oberfl{\"a}chenrekombination wird bewertet.}, language = {de} } @misc{SchmeisserHaeberleBarquinhaetal., author = {Schmeißer, Dieter and Haeberle, J{\"o}rg and Barquinha, Pedro and Gaspar, Diana and Pereira, Lu{\´i}s and Martins, Rodrigo and Fortunato, Elvira}, title = {Electronic structure of amorphous ZnO films}, series = {Physica Status Solidi C}, volume = {11}, journal = {Physica Status Solidi C}, number = {9-10}, issn = {1610-1642}, doi = {10.1002/pssc.201400010}, pages = {1476 -- 1480}, abstract = {We use resonant photoemission spectroscopy (resPES) to study the electronic properties of amorphous ZnO (a-ZnO) layers. We report on the core levels, the valence band (VB) PES data, and the X-ray absorption (XAS) data which we use for the conduction band (CB) density of states. From these results we are able to derive the partial density of states (pDOS) of O2p and Zn4s4p states in the VB and CB, respectively as well as a band scheme. At the O1s resonance we observe a band of localized defect states which is located between the Fermi energy and the CBM. At the Zn2p edge the XAS data indicate that localized Zn4s4p states are involved in the DOS starting already at the Fermi energy.}, language = {en} } @misc{TamangGhoshGarainetal., author = {Tamang, Abiral and Ghosh, Sujoy Kumar and Garain, Samiran and Alam, Md. Mehebub and Haeberle, J{\"o}rg and Henkel, Karsten and Schmeißer, Dieter and Mandal, Dipankar}, title = {DNA-Assisted β‑phase Nucleation and Alignment of Molecular Dipoles in PVDF Film: A Realization of Self-Poled Bioinspired Flexible Polymer Nanogenerator for Portable Electronic Devices}, series = {ACS Applied Materials \& Interfaces}, journal = {ACS Applied Materials \& Interfaces}, number = {7}, issn = {1944-8244}, doi = {10.1021/acsami.5b04161}, pages = {16143 -- 16147}, abstract = {A flexible nanogenerator (NG) is fabricated with a poly(vinylidene fluoride) (PVDF)film, where deoxyribonu-cleic acid (DNA) is the agent for the electroactive β-phase nucleation. Denatured DNA is co-operating to align the molecular-CH2/-CF2 dipoles of PVDF causing piezo- electricity without electrical poling. The NG is capable of harvesting energy from a variety of easily accessible mechanical stress such as human touch, machine vibration, football juggling, and walking. The NG exhibits high piezoelectric energy conversion efficiency facilitating the instant turn-on of several green or blue light-emitting diodes. The generated energy can be used to charge capacitors providing a wide scope for the design of self-powered portable devices.}, language = {en} } @misc{SchmeisserHaeberleRichteretal., author = {Schmeißer, Dieter and Haeberle, J{\"o}rg and Richter, Matthias and Brazda, Petr}, title = {Spin State and Satellite Structures of ε-Fe₂O₃ as determined by Resonant Photoelectron Spectroscopy}, series = {Nuclear Instruments and Methods in Physics Research B}, volume = {2015}, journal = {Nuclear Instruments and Methods in Physics Research B}, number = {364}, issn = {0168-583X}, doi = {10.1016/j.nimb.2015.08.062}, pages = {127 -- 131}, abstract = {We use resonant photoelectron spectroscopy at the Fe2p and the O1s absorption edges to report on spectroscopic investigation of Fe-oxides nanoparticles. We discuss the spectroscopic details like multiple Auger decays, satellite emission in the X-ray absorption process and the core level data. We explain these data by a novel mechanism in which the resonant excitation between Fe3d and Fe4s states are involved. This mechanism is observed when the photo-excited electron becomes polarized by the electron-hole pairs existing in the conduction and valence bands.}, language = {en} } @misc{SchmeisserHaeberle, author = {Schmeißer, Dieter and Haeberle, J{\"o}rg}, title = {Intrinsic localized gap states in IGZO and its parent single crystalline TCOs}, series = {Thin Solid Films}, journal = {Thin Solid Films}, number = {603}, issn = {0040-6090}, doi = {10.1016/j.tsf.2016.02.010}, pages = {206 -- 211}, abstract = {We report on the X-ray absorption data for Indium-Gallium-Zink-Oxide thin films, amorphous ZnO films, amorphous SnOx films, and single crystalline In2O3, Ga2O3, ZnO, and SnO2 data. These absorption data probe the empty conduction band states explicitly. Also they allow for an elemental assignment using resonant excitation to derive the contributions of each metal ion. We find that the lowest states appear right at the Fermi energy and result from configuration interaction induced charge transfer states which we consider as intrinsic gap states.}, language = {en} } @inproceedings{HaeberleGasparBarquinhaetal., author = {Haeberle, J{\"o}rg and Gaspar, Diana and Barquinha, Pedro and Machulik, Stephan and Janowitz, Christoph and Galazka, Zbigniew and Schmeißer, Dieter}, title = {A spectroscopic comparison of AOS thin films and TCO single crystals}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {Amorphous oxide semiconductors (AOS) and transparent conductive oxides (TCO) are today one of most attractive fields of research in many industrial products, like e.g. high definition, low cost, transparent, and flexible displays. We got the unique possibility to measure a-GIZO and a-SnOx thin films and compare their electronic properties with those of In2O3, Ga2O3, ZnO, and SnO2 single crystals. We use resPES to study the electronic properties. We report on the core levels, the VB PES data, partial Integrated Yield (pIY) and the XAS absorption data. From these we are able to derive the elemental ratio, the pDOS as well as the band scheme. At the O1s resonance we observe multiple Auger processes from which we deduce that a band of localized defect states is located between the Fermi energy and the CBM. The resonant profiles taken at the corresponding metal edges indicate that metal states are involved in the DOS.}, language = {en} } @inproceedings{TallaridaHenkelGargourietal., author = {Tallarida, Massimo and Henkel, Karsten and Gargouri, Hassan and Haeberle, J{\"o}rg and Gruska, Bernd and Arens, Matthias and Schmeißer, Dieter}, title = {New opportunities with Plasma enhanced atomic layer deposition (PE-ALD) of oxides}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {Thermal Atomic layer deposition (T-ALD) of oxides is obtained by the pulsed alternation of a metal precursor and an oxygen source, typically H2O or O3, and the reactions leading to ALD are thermally activated. With plasma enhanced ALD (PE-ALD), instead, the oxygen source is represented by an oxygen-containing plasma. The higher reactivity of the plasma-generated species extend the capabilities of ALD: improved film quality and increased flexibility in process conditions, such as growth at low temperature, are typical advantages of PE-ALD over T-ALD. We report on results on the preparation of thin (<100 nm) aluminum oxide (Al2O3) films on silicon substrates using T-ALD and PE-ALD in the SENTECH SI ALD LL system. Films were deposited in the temperature range between room temperature (RT) and 200∘C. We characterized the films with spectroscopic ellipsometry (thickness, refractive index, growth rate) over 4" wafers and with X-ray photoelectron spectroscopy. All films resulted in a high degree of homogeneity, independent of the deposition temperature. Investigations with capacitance-voltage and conductance-voltage measurements showed a very low interface states density for the PE-ALD films.}, language = {en} } @inproceedings{HaeberleGasparBarquinhaetal., author = {Haeberle, J{\"o}rg and Gaspar, Diana and Barquinha, Pedro and Pereira, Lu{\´i}s and Martins, Rodrigo and Fortunato, Elvira and Machulik, Stephan and Janowitz, Christoph and Manzke, Recardo and Schmeißer, Dieter}, title = {The Electronic Structure of amorphuos SnOx thin films and SnO2 single crystals}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 271}, abstract = {We compare the electronic properties of amorphous p-type SnOx thin film grown by rf magnetron sputtering with those of n-type SnO2 single crystals grown by cvt. We use resPES to study the electronic band structure. We measure the core levels, the VB PES data, partial Integrated Yield (pIY) and the XAS absorption data. From the resPES data recorded at the O1s and the Sn3d edges we derive the VB pDOS and the CB pDOS . The differences are most pronounced in the position of the VBM as for the a-SnOx films there appears a band closer to the Fermi energy. In addition for the SnOx we find in the XAS and pIY data a significant peak that appears right at the Fermi energy. This peak is absent in the single crystalline data. We attribute this to a change in the configuration of the Sn4d states to form a 4d8 configuration instead of 4d9 and 4d10 configurations which are identified in the single crystalline data.}, language = {en} } @misc{HaeberleMachulikJanowitzetal., author = {Haeberle, J{\"o}rg and Machulik, Stephan and Janowitz, Christoph and Manzke, Recardo and Gaspar, Diana and Barquinha, Pedro and Schmeißer, Dieter}, title = {Gap states in the electronic structure of SnO2 single crystals and amorphous SnOxthin films}, series = {Journal of Applied Physics}, volume = {120}, journal = {Journal of Applied Physics}, number = {10}, issn = {0021-8979}, doi = {10.1063/1.4962313}, pages = {105101-1 -- 105101-13}, abstract = {The electronic structure of a SnO2 single crystal is determined by employing resonant photoelectron spectroscopy. We determine the core level, valence band, and X-ray absorption (XAS) data and compare these with those of amorphous SnOx thin films. We find similar properties concerning the data of the core levels, the valence band features, and the absorption data at the O1s edge. We find strong signals arising from intrinsic in-gap states and discuss their origin in terms of polaronic and charge-transfer defects. We deduce from the XAS data recorded at the Sn3d edge that the Sn4d10 ground state has contributions of 4d9 and 4d8 states due to configuration interaction. We identify localized electronic states depending on the strength of the 4d-5s5p interaction and of the O2p-to-Sn4d charge-transfer processes, both appear separated from the extended band-like states of the conduction band. For the amorphous SnOx thin films, significant differences are found only in the absorption data at the Sn3d-edge due to a stronger localization of the in-gap states.}, language = {en} }