@inproceedings{SandnerGrashoffSchenketal., author = {Sandner, Thilo and Grashoff, Thomas and Schenk, Harald and Kenda, Andreas}, title = {Translatory MEMS actuator and their system integration for miniaturized Fourier transform spectrometers}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.909817}, pages = {82520C-1 -- 82520C-10}, language = {en} } @inproceedings{GrahmannWildenhainGrashoffetal., author = {Grahmann, Jan and Wildenhain, Michael and Grashoff, Thomas and Gerwig, Christian and Dallmann, Hans-Georg and Wolter, Alexander and Schenk, Harald}, title = {Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, number = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {825205-1 -- 825205-9}, language = {en} } @inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schenk, Harald and Tortschanoff, Andreas}, title = {Quasistatic microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-4799-1512-5}, pages = {861605-1 -- 861605-6}, language = {en} } @inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Schenk, Harald and Tulea, C. and Lenenbach, A.}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, booktitle = {International Conference on Optical MEMS and Nanophotonics Conference, OMN 2013, Proceedings, 18-22 August 2013, Kanazawa, Japan}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-1512-5}, pages = {83 -- 84}, abstract = {We present two novel micro scanning mirrors with large aperture and HR dielectric coatings suitable for high power laser applications in a miniaturized laser instrument. An electrostatic driven 2D-raster scanning mirror with 5×7.1mm aperture is used for dynamic steering of the ps-laser beam of the laser cutting process. A second magnetic 2D-beam steering mirror enables a static beam correction of a hand guided laser instrument. Optimizations of a magnetic gimbal micromirror with 6 mm × 8 mm mirror plate are presented; here static deflections of 3° were reached. Both MEMS devices were successfully tested with a high power ps-laser at 532nm up to 20W CW.}, language = {en} } @inproceedings{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, R. and Schenk, Harald}, title = {Quasi-static microscanner with linearized raster scanning for an adaptive 3D-laser camera}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, booktitle = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897717-1 -- 897717-9}, language = {en} } @misc{SandnerGrashoffSchwarzenbergetal., author = {Sandner, Thilo and Grashoff, Thomas and Schwarzenberg, Markus and Schroedter, Richard and Schenk, Harald}, title = {Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011114-1 -- 011114-10}, language = {en} } @inproceedings{SandnerKimmeGrashoffetal., author = {Sandner, Thilo and Kimme, S. and Grashoff, Thomas and Todt, U. and Graf, A. and Tulea, C. and Lenenbach, A. and Schenk, Harald}, title = {Micro-scanning mirrors for high-power laser applications in laser surgery}, series = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, booktitle = {MOEMS and miniaturized systems XIII, 3 - 6 February 2014, San Francisco, California, United States}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897705-1 -- 897705-11}, language = {en} } @misc{SandnerGrashoffGaumontetal., author = {Sandner, Thilo and Grashoff, Thomas and Gaumont, E. and Schenk, Harald and Kenda, Andreas}, title = {Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers}, series = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, volume = {13}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, number = {1}, issn = {1932-5134}, pages = {011115-1 -- 011115-14}, language = {en} } @misc{KaiserGrashoffDrabeetal., author = {Kaiser, Bert and Grashoff, Thomas and Drabe, Christian and Conrad, Holger and Schenk, Harald}, title = {About stress in filled DRIE-trenches}, series = {Journal of Micromechanics and Microengineering (JMM)}, volume = {25}, journal = {Journal of Micromechanics and Microengineering (JMM)}, number = {8}, issn = {0960-1317}, pages = {8085003}, language = {en} }