@misc{SchenkGrahmannSandneretal., author = {Schenk, Harald and Grahmann, Jan and Sandner, Thilo and Wagner, Michael and Dauderst{\"a}dt, Ulrike and Schmidt, Jan-Uwe}, title = {Micro mirrors for high-speed laser deflections and patterning}, series = {Physics Procedia}, volume = {56}, journal = {Physics Procedia}, issn = {1875-3892}, doi = {10.1016/j.phpro.2014.08.090}, pages = {7 -- 18}, language = {en} } @inproceedings{WagnerOstendorfGrahmannetal., author = {Wagner, J. and Ostendorf, Ralf and Grahmann, Jan and Merten, A. and Hugger, S. and Jarvis, J.-P. and Fuchs, F. and Boscovic, D. and Schenk, Harald}, title = {Widely tunable quantum cascade lasers for spectroscopic sensing}, series = {Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States}, booktitle = {Quantum sensing and nanophotonic devices XII, 8 - 12 February 2015, San Francisco, California, United States}, editor = {Razeghi, Manijeh}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-1-62841-460-8}, pages = {937012-1 -- 937012-6}, language = {en} } @misc{SchenkGrahmannWagneretal., author = {Schenk, Harald and Grahmann, Jan and Wagner, Hans-Joachim and Ostendorf, Ralf and Rattunde, Marcel}, title = {Mikromechanisches System zum Durchstimmen von Lasern (Micromechanical system for tuning of lasers)}, language = {de} } @inproceedings{BlehOstendorfMertenetal., author = {Bleh, D. and Ostendorf, Ralf and Merten, A. and Grahmann, Jan and Schenk, Harald and Kunzer, M. and Schmidt, R. and Wagner, J.}, title = {Miniaturization of a fast tunable external cavity QCL with customized gratings and MOEMS components}, series = {International Quantum Cascade Lasers School \& Workshop (IQCLSW), Policoro, Italy}, booktitle = {International Quantum Cascade Lasers School \& Workshop (IQCLSW), Policoro, Italy}, pages = {1 -- 2}, language = {en} } @misc{GrahmannMertenOstendorfetal., author = {Grahmann, Jan and Merten, Andr{\´e} and Ostendorf, Ralf and Fontenot, M. and Bleh, Daniela and Schenk, Harald and Wagner, Hans-Joachim}, title = {Tunable external cavity quantum cascade lasers (EC-QCL): an application field for MOEMS based scanning gratings}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, journal = {SPIE Conference: MOEMS and Miniaturized Systems XIII, San Francisco, 2014}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-9890-8}, pages = {897708-1 -- 897708-11}, language = {en} } @inproceedings{GrahmannWildenhainGrashoffetal., author = {Grahmann, Jan and Wildenhain, Michael and Grashoff, Thomas and Gerwig, Christian and Dallmann, Hans-Georg and Wolter, Alexander and Schenk, Harald}, title = {Laser projector solution based on two 1D resonant micro scanning mirrors assembled in a low vertical distortion scan head}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, number = {1. Auflage}, publisher = {SPIE, The Society of Photo-Optical Instrumentation Engineers}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, pages = {825205-1 -- 825205-9}, language = {en} } @inproceedings{SchenkWagnerGrahmannetal., author = {Schenk, Harald and Wagner, Michael and Grahmann, Jan and Merten, Andr{\´e}}, title = {Advances in MOEMS technologies for high quality imaging systems}, series = {Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States}, booktitle = {Optical Microlithography XXXI, 27 February-1 March 2018, San Jose, California, Unites States}, editor = {Kye, Jongwook and Owa, Soichi}, publisher = {SPIE}, address = {Bellingham, Washington}, isbn = {978-1-5106-1666-0}, doi = {10.1117/12.2297399}, abstract = {An overview of advances in MOEMS devices and technologies for high quality imaging systems is provided. A particular focus is laid on recent technological further developments possibly opening gateways to unprecedented device and system functionality by e. g.: increase of pixel count towards higher parallel operation, decrease of the mirror pitch in large arrays towards applications like high-performance holography, novel technologies for higher operation bandwidth, increase of aperture size for scanning applications like LIDAR, integration of high reflection coatings for processing of multi Watt laser radiation for marking and engraving, and phased arrays for high speed laser beam steering.}, language = {en} } @misc{GrahmannWagnerOstendorfetal., author = {Grahmann, Jan and Wagner, Hans-Joachim and Ostendorf, Ralf and Schenk, Harald and Rattunde, Marcel}, title = {MEMS basiertes Durchstimmen von Lasern}, language = {de} } @inproceedings{DrabeKallweitDreyhauptetal., author = {Drabe, Christian and Kallweit, David and Dreyhaupt, Andre and Grahmann, Jan and Schenk, Harald and Davis, Wyatt}, title = {Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.910203}, pages = {825209-1 -- 825209-10}, language = {en} }