@misc{KolanekHermannDudeketal., author = {Kolanek, Krzysztof and Hermann, Peter and Dudek, Piotr T. and Gotszalk, Teodor and Chumakov, Dmytro and Weisheit, Martin and Hecker, Michael and Zschech, Ehrenfried}, title = {Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon-germanium thin films}, series = {Thin Solid Films}, volume = {518}, journal = {Thin Solid Films}, number = {12}, issn = {0040-6090}, pages = {3267 -- 3272}, language = {en} }