@misc{StolzMroskKaiseretal., author = {Stolz, Michael and Mrosk, Andreas and Kaiser, Bert and Langa, Sergiu and Ehrig, Lutz and Conrad, Holger and Gaudet, Matthieu and Schenk, Harald}, title = {Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen}, series = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, journal = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, publisher = {VDE-Verlag}, pages = {366 -- 369}, abstract = {In der Arbeitsgruppe integrierte Siliziumsysteme des Fraunhofer IPMS werden am Standort Cottbus innovative Anwen-dungen eines neuartigen nanoskopischen elektrostatischen Antriebs (nanoskopic electrostatic drive - NED) untersucht. Eine der vielversprechendsten Anwendungen sind Lautsprecher. Vollst{\"a}ndig aus Silizium gefertigte MEMS-Lautsprecher auf Basis von NED-Biegeaktoren werden vor den akustischen Messungen mechanisch und elektrisch cha-rakterisiert. Beidseitig eingespannte elektrostatisch betriebene in-plane NED-Aktoren werden dabei {\"u}ber einen Fre-quenzbereich von 20 Hz bis 20 kHz angeregt. Dabei sind die Strukturen oft verdeckt, was ihre Charakterisierung er-schwert. Es werden zerst{\"o}rungsfreie optische Methoden pr{\"a}sentiert, mit deren Hilfe die Bestimmung der mechanischen Schwingungseigenschaften einzelner Aktoren erm{\"o}glicht wird sowie die Beweglichkeit im verdeckten Zustand nach-gewiesen werden kann.}, language = {de} } @misc{EhrigKaiserConradetal., author = {Ehrig, Lutz and Kaiser, Bert and Conrad, Holger and Schenk, Hermann and Schuffenhauer, David and Stolz, Michael and Gaudet, Matthieu and Schenk, Harald and Kolkovsky, Vladimir}, title = {MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications}, series = {Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30}, volume = {TMT 30}, journal = {Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30}, pages = {189 -- 192}, abstract = {Wireless earphones require a tremendous degree of integration: In addition to the electroacoustic transducer at least the power supply and a radio module have to be accommodated, supplemented by several microphones for hands-free applications or for noise reduction, as well as position and bio sensors, memory and CPU. With increasing integration, the pressure on the individual components increases in terms of size, energy efficiency and costs. In the field of microphones, MEMS technology has enjoyed great popularity for almost 10 years, and due to their benefits (size, cost, integration) MEMS microphones have almost completely supersede other microphone technologies in mobile audio devices and opened up new fields of applications.}, language = {en} } @misc{ConradGaudetSchenketal., author = {Conrad, Holger and Gaudet, Matthieu and Schenk, Harald and Uhlig, Sebastian}, title = {Micromechanical devices with mechanical actuators}, language = {en} } @misc{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Ruffert, Christine and Jongmanns, Marcel and Schenk, Harald}, title = {Highly integrable silicon micropumps using lateral electrostatic bending actuators}, series = {Microsystem Technologies}, volume = {30}, journal = {Microsystem Technologies}, number = {8}, publisher = {Springer Science and Business Media LLC}, issn = {0946-7076}, doi = {10.1007/s00542-024-05635-w}, pages = {949 -- 960}, abstract = {We present the design, fabrication, and characterization of an innovative silicon-based micropump with high potential for portable lab-on-chip (LoC) as well as point-of-care (PoC) applications. The actuators of the pump are electrostatic driven in-plane bending devices, which were presented earlier (Borcia et al. in Phys Rev Fluids 3(8): 084202, 2018. 10.1103/PhysRevFluids.3.084202; Uhlig et al. in Micromachines, 9(4), 2018. 10.3390/mi9040190). This paper presents the characterization results achieved with the micropump. The dielectric non-polar liquid Novec7100™ was used as a test liquid due to its adequate physical properties. When applying a periodic voltage of 130 V, a flow rate of up to 80 µL/min was detected. The counter pressure amounts up to 30 kPa and the correspondent fluidic power (volumetric flow rate times the counter pressure) was calculated to 10 µW. The pump contains passive flap valves at the inlet and outlet, which are based on a bending cantilever design. Depending on the application requirements, the micropump can be designed modularly to adjust the specific parameters by an adequate arrangement of pump base units. In this paper, the proof of principle is shown using a single base unit with different number of stacked NED-actuator beams, as well as the serial arrangement of base units. Both modular concepts target the increase of backpressure of the NED-micropump in an inherently different way compared to conventional membrane micropumps.}, language = {en} } @misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same}, abstract = {A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.}, language = {en} }