@misc{FroehlichJančovičHudeketal., author = {Froehlich, K. and Jančovič, P. and Hudek, B. and D{\´e}rer, J. and Paskaleva, A. and Bertaud, Thomas and Schroeder, Thomas}, title = {Atomic layer deposition of thin oxide films for resistive switching}, series = {Electrochemical Society (ECS) Transactions}, volume = {58}, journal = {Electrochemical Society (ECS) Transactions}, number = {10}, issn = {1938-6737}, doi = {10.1149/05810.0163ecst}, pages = {163 -- 170}, language = {en} }