@article{ArguirovKittlerSeifertetal., author = {Arguirov, Tzanimir V. and Kittler, Martin and Seifert, Winfried and Reif, J{\"u}rgen and Bolze, D. and Ehwald, K.-E. and Formanek, Peter}, title = {Luminescence of Crystal Defects Formed after Annealing of Phosphorus Implanted Silicon}, series = {Solid State Phenomena}, volume = {95-96}, journal = {Solid State Phenomena}, issn = {1012-0394}, pages = {289 -- 296}, language = {en} }