@misc{SchulzeSchuengelDerzsietal., author = {Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Mussenbrock, Thomas}, title = {Complex Electron Heating in Capacitive Multi-Frequency Plasmas}, series = {IEEE Transactions on Plasma Science}, volume = {42}, journal = {IEEE Transactions on Plasma Science}, number = {10}, issn = {0093-3813}, doi = {10.1109/TPS.2014.2306265}, pages = {2780 -- 2781}, language = {en} } @misc{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {The Effect of the Driving Frequency on the Confinement of Beam Electrons and Plasma Density in Low Pressure Capacitive Discharges}, series = {Plasma Sources Science and Technology}, volume = {24}, journal = {Plasma Sources Science and Technology}, number = {2}, issn = {0963-0252}, doi = {10.1088/0963-0252/24/2/024002}, pages = {024002}, language = {en} } @misc{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Schulze, Julian}, title = {Experimental Investigations of Electron Heating Dynamics and Ion Energy Distributions in Capacitive Discharges Driven by Customized Voltage Waveforms}, series = {Journal of Applied Physics}, volume = {118}, journal = {Journal of Applied Physics}, number = {22}, issn = {1089-7550}, doi = {10.1063/1.4937403}, pages = {223302}, language = {en} } @inproceedings{BergerBrandtFraneketal., author = {Berger, Birk and Brandt, Steven and Franek, James and Sch{\"u}ngel, Edmund and Koepke, Mark and Schulze, Julian and Mussenbrock, Thomas and Bruneau, Bastien and Johnson, Erik and Lafleur, Trevor and Booth, Jean-Paul and O'Connell, Deborah and Gans, Timo and Korolov, Ihor and Derzsi, Aranka and Donk{\´o}, Zolt{\´a}n}, title = {Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534353}, language = {en} } @inproceedings{WilczekTrieschmannSchulzeetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Schulze, Julian and Sch{\"u}ngel, Edmund and Brinkmann, Ralf Peter and Derzsi, Aranka and Korolov, Ihor and Donk{\´o}, Zolt{\´a}n and Mussenbrock, Thomas}, title = {Confinement of highly energetic electron beams in low pressure capacitive discharges}, series = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, booktitle = {Plasma Sciences (ICOPS), 2015 IEEE International Conference on, May 24-28, 2015, Antalya, Turkey}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4799-6974-6}, doi = {10.1109/PLASMA.2015.7179545}, language = {en} } @inproceedings{WilczekTrieschmannBrinkmannetal., author = {Wilczek, Sebastian and Trieschmann, Jan and Brinkmann, Ralf Peter and Mussenbrock, Thomas and Schulze, Julian and Sch{\"u}ngel, Edmund and Derzsi, Aranka and Korolov, Ihor and Hartmann, Paul and Donk{\´o}, Zolt{\´a}n}, title = {Hysteresis effects and confinement of beam electrons in capacitive discharges}, series = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, booktitle = {2016 IEEE International Conference on Plasma Science (ICOPS), Banff, Canada, June 19-23, 2016}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-4673-9601-1}, doi = {10.1109/PLASMA.2016.7534342}, language = {en} } @misc{BergerSteinbergerSchuengeletal., author = {Berger, Birk and Steinberger, Thomas and Sch{\"u}ngel, Edmund and Koepke, Mark and Mussenbrock, Thomas and Awakowicz, Peter and Schulze, Julian}, title = {Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase}, series = {Applied Physics Letters}, volume = {111}, journal = {Applied Physics Letters}, number = {20}, issn = {1077-3118}, doi = {10.1063/1.5000144}, pages = {5}, language = {en} }