@misc{LangaDrabeKunathetal., author = {Langa, Sergiu and Drabe, Christian and Kunath, Christian and Dreyhaupt, Andr{\´e} and Schenk, Harald}, title = {Wafer level vacuum packaging of scanning micro-mirrors using glass-frit and anodic bonding methods}, series = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, journal = {SPIE Conference MOEMS and Miniaturized Systems XII, San Francisco, 2013}, edition = {1. Auflage}, publisher = {SPIE}, address = {Bellingham, Wash.}, isbn = {978-0-8194-9385-9}, doi = {10.1117/12.2003525}, pages = {86140F-1 -- 86140F-8}, language = {en} } @misc{KaiserGrashoffDrabeetal., author = {Kaiser, Bert and Grashoff, Thomas and Drabe, Christian and Conrad, Holger and Schenk, Harald}, title = {About stress in filled DRIE-trenches}, series = {Journal of Micromechanics and Microengineering (JMM)}, volume = {25}, journal = {Journal of Micromechanics and Microengineering (JMM)}, number = {8}, issn = {0960-1317}, pages = {8085003}, language = {en} } @misc{SchenkSandnerDrabeetal., author = {Schenk, Harald and Sandner, Thilo and Drabe, Christian and Klose, Thomas and Jung, Denis}, title = {Micromechanical device with tilted electrodes}, language = {en} } @misc{JungDrabeSchenketal., author = {Jung, Denis and Drabe, Christian and Schenk, Harald and Sandner, Thilo and Klose, Thomas and Wolter, Alexander}, title = {Method for generating a micromechanical structure}, language = {en} } @inproceedings{DrabeKallweitDreyhauptetal., author = {Drabe, Christian and Kallweit, David and Dreyhaupt, Andre and Grahmann, Jan and Schenk, Harald and Davis, Wyatt}, title = {Bi-resonant scanning mirror with Piezo-resistive position sensor for WVGA laser projection systems}, series = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, booktitle = {SPIE Conference MOEMS and Miniaturized Systems XI, San Francisco, 2012}, edition = {1. Auflage}, publisher = {SPIE Press}, address = {Bellingham}, isbn = {978-0-8194-8930-2}, doi = {10.1117/12.910203}, pages = {825209-1 -- 825209-10}, language = {en} }