@inproceedings{DomaradzkiSchmeisserKaczmareketal., author = {Domaradzki, Jarosław and Schmeißer, Dieter and Kaczmarek, Danuta and Beuckert, Guido and Prociow, E. L. and Borkowska, Angnieszka and Kudrawiec, Robert and Misiewicz, J.}, title = {Characterization of Nanocrystalline TiO2 - HfO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering}, language = {en} } @article{DomaradzkiKaczmarekSchmeisseretal., author = {Domaradzki, Jarosław and Kaczmarek, Danuta and Schmeißer, Dieter and Beuckert, Guido}, title = {Microstructure and Optical Properties of TiO2 Thin Films Prepared by Low Pressure Hot Target Reactive Magnetron Sputtering}, language = {en} } @article{SchmeisserDomaradzkiKaczmareketal., author = {Schmeißer, Dieter and Domaradzki, Jarosław and Kaczmarek, Danuta and Borkowska, Angnieszka and M{\"u}ller, Sebastian}, title = {Influence of Annealing on the Structure and Stoichiometry of Europium-Doped Titanium Dioxide Thin Films}, language = {en} } @misc{KotwicaDomaradzkiWojcieszaketal., author = {Kotwica, Tomasz and Domaradzki, Jarosław and Wojcieszak, Damian and Sikora, Andrzej and Kot, Małgorzata and Schmeißer, Dieter}, title = {Analysis of surface properties of Ti-Cu-Ox gradient thin films using AFM and XPS investigations}, series = {Materials Science-Poland}, volume = {36}, journal = {Materials Science-Poland}, number = {4}, issn = {0137-1339}, doi = {10.2478/msp-2018-0100}, pages = {761 -- 768}, abstract = {The paper presents results of investigations on surface properties of transparent semiconducting thin films based on (Ti-Cu)oxide system prepared using multi-magnetron sputtering system. The thin films were prepared using two programmed profiles of pulse widt hmodulation coefficient, so called V- and U-shape profiles. The applied powering profiles allowed fabrication of thin films with gradient distribution of Ti and Cu elements over the thickness of deposited layers. Optical investigations allowed determination of transparency of prepared films that reached up to 60 \% in the visible part of optical radiation, which makes them attractive for the transparent electronics domain. Surface properties investigations showed that the surface of mixed (Ti-Cu)oxides was sensitive to adsorption, in particular to carbon dioxide and water vapor. Soft etching with argon ions resulted in surface cleaning from residuals, however, deoxidation of Cu-oxide components was also observed.}, language = {en} } @misc{ObstarczykKaczmarekWojcieszaketal., author = {Obstarczyk, Agata and Kaczmarek, Danuta and Wojcieszak, Damian and Mazur, Michał and Domaradzki, Jarosław and Kotwica, Tomasz and Pastuszek, Roman and Schmeißer, Dieter and Mazur, Piotr and Kot, Małgorzata}, title = {Tailoring optical and electrical properties of thin-film coatings based on mixed Hf and Ti oxides for optoelectronic application}, series = {Materials and Design}, volume = {175}, journal = {Materials and Design}, issn = {0264-1275}, doi = {10.1016/j.matdes.2019.107822}, pages = {15}, abstract = {In this work multi-magnetron sputtering stand was used for the deposition of the mixed oxides thin films based on HfO2 and TiO2. In order to obtain various material composition the power released to each magnetron (containing metallic hafnium and titanium targets) was precisely selected. Structural, surface, optical, electrical and mechanical properties of as-deposited coatings were analyzed. Depending on the hafnium content in the deposited thin films various types of the microstructure was obtained, i.e. HfO2-monoclinic, amorphous and TiO2-rutile. Increase of Ti content above 28 at. \% in the as-prepared mixed oxides coatings caused their amorphization. It was found that with an increase of Ti content in prepared coatings their surface roughness and simultaneously water contact angle decreased. Performed measurements of electrical properties revealed that the lowest leakage current density in the range of 10-7 - 10-8 A/cm2 was obtained for amorphous coatings. Moreover, the tailoring of the dielectric constant was possible by a proper selection of material composition and microstructure of the deposited thin films. Average transparency in the visible wavelength region was in the range of ca. 79-86\%. The influence of material composition and structure on shifting of the fundamental absorption edge and optical bandgap energy was also observed. The refractive index increased with an increase of Ti content, while extinction coefficient was the lowest for amorphous coatings. Additionally, hardness values were dependent on the material composition and optical packing density and were in the range from 7.6 GPa to 10.1 GPa.}, language = {en} } @misc{KostoKapuscikTschammeretal., author = {Kosto, Yuliia and Kapuscik, Paulina and Tschammer, Rudi and Guttmann, Dominic and Mankowska, Ewa and Matvija, Peter and Morales, Carlos and Mazur, Michał and Henkel, Karsten and Matolinova, Iva and Domaradzki, Jarosław and Flege, Jan Ingo}, title = {Bare and Pd-doped ceria thin films prepared by ALD and EBE for hydrogen detection}, series = {Verhandlungen der DPG}, journal = {Verhandlungen der DPG}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, abstract = {The need to store and use hydrogen safely as part of green economy based on renewable energy evokes a necessity to reliably detect it at ambient conditions. The majority of currently used sensors are working at elevated temperatures (200-500 °C). In this work, we demonstrate that ceria films deposited on a commercial electrode by atomic layer deposition (ALD) and electron beam evaporation (EBE) electrically respond to hydrogen (from 20 to 500 ppm) at much lower temperatures (50-200 °C). The results reveal that <1.5 nm thin Pd adlayer increases the electrical response by several orders of magnitude for both ceria films. The NAP-XPS study under changing oxidative/reductive atmospheres sheds light on the mechanism of Pd-CeOx thermal activation and the role of the deposition technique in the reactivity of the oxide.}, language = {en} } @misc{KapuścikWojcieszakPokoraetal., author = {Kapuścik, Paulina and Wojcieszak, Damian and Pokora, Patrycja and Mańkowska, Ewa and Domaradzki, Jarosław and Mazur, Michał and Mazur, Piotr and Kosto, Yuliia and Morales, Carlos and Kot, Małgorzata and Flege, Jan Ingo}, title = {Low temperature hydrogen sensor with high sensitivity based on CeOx thin film}, series = {Sensors and Actuators B: Chemical}, volume = {417}, journal = {Sensors and Actuators B: Chemical}, publisher = {Elsevier BV}, issn = {0925-4005}, doi = {10.1016/j.snb.2024.136148}, pages = {12}, abstract = {In this work, a 500 nm-thick cerium oxide thin film was prepared by electron beam evaporation. It was found that the deposition of 7 nm thick Pd catalyst was required for obtaining a sensor response to hydrogen. The Pd/CeOx sensing structure has a high response of 5000 towards 25 ppm H2 at a working temperature of 200 °C and exhibits a sensor response of 1.3 at temperatures near ambient. Furthermore, the sensing structure exhibited excellent response/recovery kinetics. The results confirm that the CeOx-based materials are a promising material for the fabrication of room-temperature hydrogen sensors.}, language = {en} } @misc{MańkowskaMazurDomaradzkietal., author = {Mańkowska, Ewa and Mazur, Michał and Domaradzki, Jarosław and Mazur, Piotr and Kot, Małgorzata and Flege, Jan Ingo}, title = {Hydrogen Gas Sensing Properties of Mixed Copper-Titanium Oxide Thin Films}, series = {Sensors}, volume = {23}, journal = {Sensors}, number = {8}, issn = {1424-8220}, doi = {10.3390/s23083822}, abstract = {Hydrogen is an efficient source of clean and environmentally friendly energy. However, because it is explosive at concentrations higher than 4\%, safety issues are a great concern. As its applications are extended, the need for the production of reliable monitoring systems is urgent. In this work, mixed copper-titanium oxide ((CuTi)Ox) thin films with various copper concentrations (0-100 at.\%), deposited by magnetron sputtering and annealed at 473 K, were investigated as a prospective hydrogen gas sensing material. Scanning electron microscopy was applied to determine the morphology of the thin films. Their structure and chemical composition were investigated by X-ray diffraction and X-ray photoelectron spectroscopy, respectively. The prepared films were nanocrystalline mixtures of metallic copper, cuprous oxide, and titanium anatase in the bulk, whereas at the surface only cupric oxide was found. In comparison to the literature, the (CuTi)Ox thin films already showed a sensor response to hydrogen at a relatively low operating temperature of 473 K without using any extra catalyst. The best sensor response and sensitivity to hydrogen gas were found in the mixed copper-titanium oxides containing similar atomic concentrations of both metals, i.e., 41/59 and 56/44 of Cu/Ti. Most probably, this effect is related to their similar morphology and to the simultaneous presence of Cu and Cu2O crystals in these mixed oxide films. In particular, the studies of surface oxidation state revealed that it was the same for all annealed films and consisted only of CuO. However, in view of their crystalline structure, they consisted of Cu and Cu2O nanocrystals in the thin film volume.}, language = {en} } @misc{MazurKapuścikWeichbrodtetal., author = {Mazur, Michał and Kapuścik, Paulina and Weichbrodt, Wiktoria and Domaradzki, Jarosław and Mazur, Piotr and Kot, Małgorzata and Flege, Jan Ingo}, title = {WO3 Thin-Film Optical Gas Sensors Based on Gasochromic Effect towards Low Hydrogen Concentrations}, series = {Materials}, volume = {16}, journal = {Materials}, number = {10}, issn = {1996-1944}, doi = {10.3390/ma16103831}, pages = {17}, abstract = {Hydrogen gas sensors have recently attracted increased interest due to the explosive nature of H2 and its strategic importance in the sustainable global energy system. In this paper, the tungsten oxide thin films deposited by innovative gas impulse magnetron sputtering have been investigated in terms of their response to H2. It was found that the most favourable annealing temperature in terms of sensor response value, as well as response and recovery times, was achieved at 673 K. This annealing process caused a change in the WO3 cross-section morphology from a featureless and homogenous form to a rather columnar one, but still maintaining the same surface homogeneity. In addition to that, the full-phase transition from an amorphous to nanocrystalline form occurred with a crystallite size of 23 nm. It was found that the sensor response to only 25 ppm of H2 was equal to 6.3, which is one of the best results presented in the literature so far of WO3 optical gas sensors based on a gasochromic effect. Moreover, the results of the gasochromic effect were correlated with the changes in the extinction coefficient and the concentration of the free charge carriers, which is also a novel approach to the understanding of the gasochromic phenomenon.}, language = {en} } @misc{MoralesTschammerPożarowskaetal., author = {Morales, Carlos and Tschammer, Rudi and Pożarowska, Emilia and Kosto, Julia and Villar-Garcia, Ignacio J. and P{\´e}rez-Dieste, Virginia and Favaro, Marco and Starr, David E. and Kapuścik, Paulina and Mazur, Michał and Wojcieszak, Damian and Domaradzki, Jarosław and Alvarado, Carlos and Wenger, Christian and Henkel, Karsten and Flege, Jan Ingo}, title = {Hydrogen sensing via heterolytic H₂ activation at room temperature by atomic layer deposited ceria}, series = {ChemSusChem : chemistry, sustainability, energy, materials}, volume = {18}, journal = {ChemSusChem : chemistry, sustainability, energy, materials}, number = {13}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1864-5631}, doi = {10.1002/cssc.202402342}, pages = {1 -- 13}, abstract = {Ultrathin atomic layer deposited ceria films (\<20 nm) are capable of H2 heterolytic activation at room temperature, undergoing a significant reduction regardless of the absolute pressure, as measured under in-situ conditions by near ambient pressure X-ray photoelectron spectroscopy. ALD-ceria can gradually reduce as a function of H2 concentration under H2/O2 environments, especially for diluted mixtures below 10 \%. At room temperature, this reduction is limited to the surface region, where the hydroxylation of the ceria surface induces a charge transfer towards the ceria matrix, reducing Ce4+ cations to Ce3+. Thus, ALD-ceria replicates the expected sensing mechanism of metal oxides at low temperatures without using any noble metal decorating the oxide surface to enhance H2 dissociation. The intrinsic defects of the ALD deposit seem to play a crucial role since the post-annealing process capable of healing these defects leads to decreased film reactivity. The sensing behavior was successfully demonstrated in sensor test structures by resistance changes towards low concentrations of H2 at low operating temperatures without using noble metals. These promising results call for combining ALD-ceria with more conductive metal oxides, taking advantage of the charge transfer at the interface and thus modifying the depletion layer formed at the heterojunction.}, language = {en} }