@article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Konarski, Piotr and Cwil, M. and Hoffmann, Patrick and Schmeißer, Dieter}, title = {Application of r.f. plasma ultrashallow nitrogen ion implantation for pedestal oxynitride layer formation}, language = {en} } @article{BieniekBeckJakubowskietal., author = {Bieniek, Tomasz and Beck, Romuald B. and Jakubowski, Andrzej and Hoffmann, Patrick and Schmeißer, Dieter and Konarski, Piotr and Cwil, M.}, title = {Formation of Pedestal Oxynitride Layer by Extremely Shallow Nitrogen Implantation in Planar R.F. Plasma Reactor}, language = {en} }