@misc{LangaConradSchenketal., author = {Langa, Sergiu and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Elektrostatisch auslenkbares mikromechanisches Bauelement}, language = {de} } @misc{ConradSchenkKaiseretal., author = {Conrad, Holger and Schenk, Harald and Kaiser, Bert and Langa, Sergiu and Gaudet, Matthieu and Schimmanz, Klaus and Stolz, Michael and Lenz, Miriam}, title = {A small-gap electrostatic micro-actuator for large deflections}, series = {Nature Communications}, journal = {Nature Communications}, number = {6}, issn = {2041-1723}, doi = {10.1038/ncomms10078}, pages = {10078}, language = {en} } @misc{KaiserGrashoffDrabeetal., author = {Kaiser, Bert and Grashoff, Thomas and Drabe, Christian and Conrad, Holger and Schenk, Harald}, title = {About stress in filled DRIE-trenches}, series = {Journal of Micromechanics and Microengineering (JMM)}, volume = {25}, journal = {Journal of Micromechanics and Microengineering (JMM)}, number = {8}, issn = {0960-1317}, pages = {8085003}, language = {en} } @misc{ConradSchenkSchirrmannetal., author = {Conrad, Holger and Schenk, Harald and Schirrmann, Christian and Zimmer, Fabian and Schmidt, Jan-Uwe and Sandner, Thilo}, title = {Micromechanical element}, language = {en} } @misc{KolkovskyStuebnerLangaetal., author = {Kolkovsky, Vladimir and St{\"u}bner, R. and Langa, Sergiu and Wende, U. and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Influence of annealing in H atmosphere on the electrical properties of Al₃O₃ layers grown on p-type Si by the atomic layer deposition technique}, series = {Solid-State Electronics}, volume = {123}, journal = {Solid-State Electronics}, issn = {0038-1101}, doi = {10.1016/j.sse.2016.06.005}, pages = {89 -- 95}, language = {en} } @misc{ConradKaiserGaudetetal., author = {Conrad, Holger and Kaiser, Bert and Gaudet, Matthieu and Langa, Sergiu and Stolz, Michael and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {A novel electrostatic actuator class}, series = {Procedia Engineering}, volume = {168}, journal = {Procedia Engineering}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.454}, pages = {1533 -- 1536}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A novel electrostatic micro-actuator class and its application potential for optical MEMS}, series = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, booktitle = {2016 International Conference on Optical MEMS and Nanophotonics,31 July-04 August 2016, Singapore, proceedings}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-1036-3}, doi = {10.1109/OMN.2016.7565867}, pages = {Tu 3.11-1 -- Tu 3.11-2}, language = {en} } @misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben}, language = {de} } @inproceedings{GaudetUhligStolzetal., author = {Gaudet, Matthieu and Uhlig, Sebastian and Stolz, Michael and Arscott, S. and Conrad, Holger and Langa, Sergiu and Kaiser, Bert and Schenk, Harald}, title = {Electrostatic bending actuators with liquid filled nanometer scale gap}, series = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, booktitle = {MEMS 2017, the 30th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, Nevada, USA, January 22-26 2017}, publisher = {IEEE}, address = {Piscataway, NJ}, isbn = {978-1-5090-5078-9}, pages = {175 -- 178}, language = {en} } @inproceedings{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Uhlig, Sebastian and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schimmanz, Klaus}, title = {A contribution to the expansion of the applicability of electrostatic forces in micro transducers}, series = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, booktitle = {MOEMS and Miniaturized Systems XVI, 30 January-1 February 2017, San Francisco, California, United States}, publisher = {SPIE}, address = {Bellingham, Washington, USA}, isbn = {978-1-5106-0674-6}, doi = {10.1117/12.2249575}, language = {en} } @misc{LangaConradKaiseretal., author = {Langa, Sergiu and Conrad, Holger and Kaiser, Bert and Stolz, Michael and Gaudet, Matthieu and Uhlig, Sebastian and Schimmanz, Klaus and Schenk, Harald}, title = {Technological aspects of a new micro-electro-mechanical actuation principle: nano e-drive}, series = {Microsystem Technologies}, volume = {23}, journal = {Microsystem Technologies}, number = {1}, issn = {1432-1858}, doi = {10.1007/s00542-017-3360-6}, pages = {5697 -- 5708}, language = {en} } @misc{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically driven in-plane silicon micropump for modular configuration}, series = {Micromachines}, volume = {9}, journal = {Micromachines}, number = {4}, issn = {2072-666X}, doi = {10.3390/mi9040190}, pages = {15}, abstract = {In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called "Nano Electrostatic Drive" is capable of deflecting beyond the electrode gap distance, enabling large generated forces and deflections. Depending on the requirements of the targeted system, the micropump can be modularly designed to meet the specified differential pressures and flow rates by a serial and parallel arrangement of equally working pumping base units. Two selected, medium specific micropump test structure devices for pumping air and isopropanol were designed and investigated. An analytical approach of the driving unit is presented and two-way Fluid-Structure Interaction (FSI) simulations of the micropump were carried out to determine the dynamic behavior. The simulation showed that the test structure device designed for air expected to overcome a total differential pressure of 130 kPa and deliver a flow rate of 0.11 sccm at a 265 Hz driving frequency. The isopropanol design is expected to generate 210 kPa and pump 0.01 sccm at 21 Hz. The device is monolithically fabricated by CMOS-compatible bulk micromachining processes under the use of standard materials only, such as crystalline silicon, silicon dioxide and alumina.}, language = {en} } @inproceedings{ConradGaudetKaiseretal., author = {Conrad, Holger and Gaudet, Matthieu and Kaiser, Bert and Langa, Sergiu and Stolz, Michael and Schenk, Harald}, title = {CMOS-kompatible elektrostatische Biegeaktoren (CMOS-compatible electrostatic actuators}, series = {MikroSystemTechnik Kongress 2017, M{\"u}nchen, Germany, 23.-25. Oktober 2017}, booktitle = {MikroSystemTechnik Kongress 2017, M{\"u}nchen, Germany, 23.-25. Oktober 2017}, publisher = {VDE-Verlag}, address = {Berlin [u.a.]}, isbn = {978-3-8007-4491-6}, pages = {219 -- 222}, language = {en} } @inproceedings{UhligGaudetLangaetal., author = {Uhlig, Sebastian and Gaudet, Matthieu and Langa, Sergiu and Schimmanz, Klaus and Conrad, Holger and Kaiser, Bert and Schenk, Harald}, title = {Electrostatically in-plane driven silicon micropump for modular configuration}, series = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, booktitle = {Conference proceedings, The 3rd Conference on MicroFluidic Handling Systems (MFHS 2017), 4 - 6 October 2017, Enschede, The Netherlands}, publisher = {University of Twente}, address = {Enschede}, pages = {57 -- 60}, language = {en} } @misc{ConradGaudetSchenketal., author = {Conrad, Holger and Gaudet, Matthieu and Schenk, Harald and Uhlig, Sebastian}, title = {Mikromechanical devices with mechanical actuators}, language = {en} } @misc{SchenkConrad, author = {Schenk, Harald and Conrad, Holger}, title = {MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben}, language = {en} } @inproceedings{ConradEhrigKaiseretal., author = {Conrad, Holger and Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann and Schuffenhauer, David and Stolz, Michael and Gaudet, Matthieu and Schenk, Harald}, title = {CMOS-kompatibler MEMS-Lautsprecher f{\"u}r Im-Ohr-Anwendungen}, series = {Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung f{\"u}r Akustik, 19.-22. M{\"a}rz 2018, M{\"u}nchen}, booktitle = {Tagungsband, DAGA 2018, 44. Deutsche Jahrestagung f{\"u}r Akustik, 19.-22. M{\"a}rz 2018, M{\"u}nchen}, publisher = {Deutsche Gesellschaft f{\"u}r Akustik e.V. (DEGA)}, address = {Berlin}, isbn = {978-3-939296-13-3}, pages = {892 -- 894}, language = {de} } @misc{StolzMroskKaiseretal., author = {Stolz, Michael and Mrosk, Andreas and Kaiser, Bert and Langa, Sergiu and Ehrig, Lutz and Conrad, Holger and Gaudet, Matthieu and Schenk, Harald}, title = {Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen}, series = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, journal = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, publisher = {VDE-Verlag}, pages = {366 -- 369}, abstract = {In der Arbeitsgruppe integrierte Siliziumsysteme des Fraunhofer IPMS werden am Standort Cottbus innovative Anwen-dungen eines neuartigen nanoskopischen elektrostatischen Antriebs (nanoskopic electrostatic drive - NED) untersucht. Eine der vielversprechendsten Anwendungen sind Lautsprecher. Vollst{\"a}ndig aus Silizium gefertigte MEMS-Lautsprecher auf Basis von NED-Biegeaktoren werden vor den akustischen Messungen mechanisch und elektrisch cha-rakterisiert. Beidseitig eingespannte elektrostatisch betriebene in-plane NED-Aktoren werden dabei {\"u}ber einen Fre-quenzbereich von 20 Hz bis 20 kHz angeregt. Dabei sind die Strukturen oft verdeckt, was ihre Charakterisierung er-schwert. Es werden zerst{\"o}rungsfreie optische Methoden pr{\"a}sentiert, mit deren Hilfe die Bestimmung der mechanischen Schwingungseigenschaften einzelner Aktoren erm{\"o}glicht wird sowie die Beweglichkeit im verdeckten Zustand nach-gewiesen werden kann.}, language = {de} } @misc{EhrigKaiserConradetal., author = {Ehrig, Lutz and Kaiser, Bert and Conrad, Holger and Schenk, Hermann and Schuffenhauer, David and Stolz, Michael and Gaudet, Matthieu and Schenk, Harald and Kolkovsky, Vladimir}, title = {MEMS-Loudspeaker - A Novel Class of Electroacoustic Transducers for Mobile Audio Applications}, series = {Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30}, volume = {TMT 30}, journal = {Tonmeistertagung - VDT International Convention, Cologne, Germany, 2018, Proc. TMT 30}, pages = {189 -- 192}, abstract = {Wireless earphones require a tremendous degree of integration: In addition to the electroacoustic transducer at least the power supply and a radio module have to be accommodated, supplemented by several microphones for hands-free applications or for noise reduction, as well as position and bio sensors, memory and CPU. With increasing integration, the pressure on the individual components increases in terms of size, energy efficiency and costs. In the field of microphones, MEMS technology has enjoyed great popularity for almost 10 years, and due to their benefits (size, cost, integration) MEMS microphones have almost completely supersede other microphone technologies in mobile audio devices and opened up new fields of applications.}, language = {en} } @misc{SpitzWallSchenketal., author = {Spitz, Barbara and Wall, Franziska and Schenk, Hermann and Melnikov, Anton and Ehrig, Lutz and Langa, Sergiu and Stolz, Michael and Kaiser, Bert and Conrad, Holger and Schenk, Harald and Pufe, Wolfram}, title = {Audio-Transducer f{\"u}r In-Ear-Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren}, series = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, journal = {MikroSystemTechnik-Kongress, Berlin, Germany, 2019}, publisher = {VDE-Verlag}, pages = {54 -- 57}, abstract = {Recently an innovative mSpeaker technology, based on a novel kind of CMOS compatible small gap electrostatic actuators for large deflection, has been introduced [1]. In this paper, we devise methods to model such speakers in terms of lumped parameters using the deflection of the beam centre as sole dynamic variable. Optical, acoustical and finite element methods (FEM) are used to validate the non-linear lumped parameter model (LPM). The experimental evaluation and LPM simulations of the total harmonic distortion reveal deeper insights into the mechanisms governing linearity.}, language = {de} } @misc{KaiserLangaEhrigetal., author = {Kaiser, Bert and Langa, Sergiu and Ehrig, Lutz and Stolz, Michael and Schenk, Hermann and Conrad, Holger and Schenk, Harald and Schimmanz, Klaus and Schuffenhauer, David}, title = {Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers}, series = {Microsystems and Nanoengineering}, journal = {Microsystems and Nanoengineering}, number = {5}, issn = {2055-7434}, doi = {10.1038/s41378-019-0095-9}, pages = {11}, abstract = {MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption are required for industrial, consumer and medical applications. The ability to integrate with microelectronic circuitry, as well as scalable batch production to enable low unit costs, are the key factors benchmarking a technology. The Nanoscopic Electrostatic Drive based, novel micro speaker concept presented in this work essentially comprises in-plane, electrostatic bending actuators, and uses the chip volume rather than the its surface for sound generation. We describe the principle, design, fabrication, and first characterization results. Various design options and governing equations are given and discussed. In a standard acoustical test setup (ear simulator), a MEMS micro speaker generated a sound pressure level of 69 dB at 500 Hz with a total harmonic distortion of 4.4\%, thus proving the concept. Further potential on sound pressure as well as linearity improvement is outlined. We expect that the described methods can be used to enhance and design other MEMS devices and foster modeling and simulation approaches.}, language = {en} } @misc{EhrigKaiserSchenketal., author = {Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann and Stolz, Michael and Langa, Sergiu and Conrad, Holger and Schenk, Harald and M{\"a}nnchen, Andreas and Brocks, Tobias}, title = {Acoustic validation of electrostatic all-silicon MEMS-speakers}, series = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, journal = {AES International Conference on Headphone Technology, San Francisco, New York, USA, 2019}, doi = {10.17743/aesconf.2019.978-1-942220-29-9}, language = {en} } @misc{EhrigSchenkWalletal., author = {Ehrig, Lutz and Schenk, Hermann and Wall, Franziska and Melnikov, Anton and Stolz, Michael and Langa, Sergiu and Kaiser, Bert and Conrad, Holger and Schenk, Harald}, title = {Electrostatic all silicon MEMS speakers for in-ear audio applications - acoustic measurements and modelling approach}, series = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, journal = {23rd International Congress on Acoustics, Aachen, Germany, 2019}, doi = {10.18154/RWTH-CONV-239893}, pages = {6}, language = {en} } @misc{MelnikovSchenkWalletal., author = {Melnikov, Anton and Schenk, Hermann and Wall, Franziska and Spitz, Barbara and Ehrig, Lutz and Langa, Sergiu and Kaiser, Bert and Conrad, Holger and Schenk, Harald and Stolz, Michael}, title = {Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation}, series = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, journal = {SPIE Conference: MOEMS and Miniaturized Systems XIX, San Francisco, USA, 2020, Proc. SPIE 11293}, doi = {10.1117/12.2551271}, language = {en} } @misc{SchenkMelnikovStolzetal., author = {Schenk, Harald and Melnikov, Anton and Stolz, Michael and Wall, Franziska and Kaiser, Bert and Mrosk, Andreas and Schuffenhauer, David and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Schenk, Hermann and Ehrig, Lutz and Conrad, Holger and Ahnert, Maik}, title = {Nonlinearity of balanced MEMS loudspeakers: optical experiments and numerical modeling using time-harmonic signals}, series = {27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV)}, journal = {27th International Congress on Sound and Vibration, Annual Congress of International Institute of Acoustics and Vibration (IIAV)}, pages = {7}, abstract = {A recently introduced novel actuator class, called the nano electrostatic drive (NED), uses the elec-trostatic actuation to generate large deflections of elastic structures. The NED principle was recently successfully applied to create an all silicon loudspeaker based on micro-electro-mechanical systems (MEMS) technology. Such MEMS audio transducers cover the full frequency range required for high fidelity audio applications. High fidelity audio reproduction also demands minimizing harmonic distortions substantially below 1 \%. A major advance in this direction is combining the NED principle with a push-pull driving scheme in a balanced design (BNED), eliminating even harmonics. The practical implementation of a BNED design is however demanding. The nature of the Coulomb force, the impact of stress stiffening and the large deformations required for generating high sound pressures, to name a few aspects, potentially contribute to the harmonic distortion and therefore need advanced experimental methods and simulation models to allow for an apt design. In this paper, we report first results of an experimental technique, combining an optical microscope with a high-speed camera, capable of analyzing the local details of the actuator movement at frame rates of 50,000 frames per second. Dynamic features, such as the excitation of harmonics and intermodulations become clearly visible. These experimental results are then used to scrutinize and refine our multi physics FEM simulations.}, language = {en} } @misc{MonsalveGuaracaoMelnikovKaiseretal., author = {Monsalve Guaracao, Jorge Mario and Melnikov, Anton and Kaiser, Bert and Schuffenhauer, David and Stolz, Michael and Ehrig, Lutz and Schenk, Hermann and Conrad, Holger and Schenk, Harald}, title = {Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers}, series = {IEEE/ASME Transactions on Mechatronics}, volume = {7}, journal = {IEEE/ASME Transactions on Mechatronics}, number = {5}, issn = {1083-4435}, doi = {10.1109/TMECH.2021.3112267}, pages = {2612 -- 2622}, abstract = {This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required.}, language = {en} } @misc{KaiserSchenkEhrigetal., author = {Kaiser, Bert and Schenk, Hermann A. G. and Ehrig, Lutz and Wall, Franziska and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Stolz, Michael and Melnikov, Anton and Conrad, Holger and Schuffenhauer, David and Schenk, Harald}, title = {The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers}, series = {Microsystems \& Nanoengineering}, volume = {Vol. 8}, journal = {Microsystems \& Nanoengineering}, issn = {2055-7434}, doi = {10.1038/s41378-022-00458-z}, abstract = {Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor (CMOS) technology. For high audio performance and in particular low harmonic distortion (THD) the implementation of the push-pull principle provides strong benefits. With an arrangement of three electrodes in a conjunct moving configuration on a beam, we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages. Our first design already exhibits a harmonic distortion as low as 1.2\% at 79 dB using a signal voltage of only 6 Vp and a constant voltage of only ±10 Vdc in a standard acoustic measurement setup. Thus, exceeding our previously reported approach in all three key performance indications at the same time. We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications. In this paper we report the basic theory, the fabrication and the performance of our novel actuator design acting as an audio transducer.}, language = {en} } @misc{ConradGaudetSchenketal., author = {Conrad, Holger and Gaudet, Matthieu and Schenk, Harald and Uhlig, Sebastian}, title = {Micromechanical devices with mechanical actuators}, language = {en} } @misc{SchenkConrad, author = {Schenk, Harald and Conrad, Holger}, title = {MEMS transducer for interacting with a volume flow of a fluid, and method for producing the same}, language = {en} } @misc{RuffertSchenkKaiseretal., author = {Ruffert, Christine and Schenk, Hermann A. G. and Kaiser, Bert and Ehrig, Lutz and Monsalve Guaracao, Jorge Mario and Langa, Sergiu and Wall, Franziska and Melnikov, Anton and Stolz, Michael and Morsk, Andreas and Schuffenhauer, David and Conrad, Holger and Schenk, Harald}, title = {Elektrostatischer Gegentakt NED-Aktor f{\"u}r Im-Ohr-µLautsprecher}, doi = {10.24406/publica-2553}, language = {de} } @misc{SchenkConrad, author = {Schenk, Harald and Conrad, Holger}, title = {MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben}, abstract = {Ein MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids umfasst ein Substrat, das einen Schichtstapel mit einer Mehrzahl von Schichten aufweist, die eine Mehrzahl von Substratebenen bilden, und das eine Kavit{\"a}t in dem Schichtstapel aufweist. Der MEMS-Wandler umfasst ein elektromechanischen Wandler, der mit dem Substrat in der Kavit{\"a}t verbunden ist und ein sich in zumindest einer Bewegungsebene der Mehrzahl von Substratebenen verformbares Element aufweist, wobei eine Verformung des verformbaren Elements in der Bewegungsebene und der Volumenstrom des Fluids kausal zusammenh{\"a}ngen. Der MEMS-Wandler umfasst ein elektronischen Schaltung, die in ei- ner Schicht des Schichtstapels angeordnet ist, wobei die elektronische Schaltung mit dem elektromechanischen Wandler verbunden ist, und die ausgebildet ist, um eine Konvertierung zwischen einer Verformung des verformbaren Elements und einem elektrischen Signal bereitzustellen.}, language = {de} } @misc{SchenkConradGaudetetal., author = {Schenk, Harald and Conrad, Holger and Gaudet, Matthieu and Schimmanz, Klaus and Langa, Sergiu and Kaiser, Bert}, title = {MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same}, abstract = {A MEMS transducer for interacting with a volume flow of a fluid includes a substrate including a cavity, and an electromechanical transducer connected to the substrate in the cavity and including an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.}, language = {en} }