@misc{SchmeisserJanowitz, author = {Schmeißer, Dieter and Janowitz, Christoph}, title = {Two polarization dependent Auger decays observed by resonant photoelectron spectroscopy at the Cu2p-edge of superconducting BiSrCu-oxides}, series = {Nuclear Instruments and Methods in Physics Research B}, volume = {411}, journal = {Nuclear Instruments and Methods in Physics Research B}, issn = {0168-583X}, doi = {10.1016/j.nimb.2017.01.084}, pages = {53 -- 56}, abstract = {We report on a resonant photoemission (resPES) study of PbxBi2-xSr2-yLayCan-1CunO2n+4+d (BISCO) single crystals to unravel the resonant decay mechanisms at the Cu2p absorption edge. The resPES studies on superconducting BISCO are performed at Bessy U49/2. We investigated BISCO single crystals with different hole doping concentrations at temperatures between 300 K and 17 K. CuO films have been used as a reference. We focus on the resPES data recorded at the Cu2p absorption edge. We find a strong polarization dependence for in-plane and out-of-plane geometries (with respect to the Cu-O plane) in our data which are caused by two independent Auger processes. We also report on the influence of different doping concentrations. Our resPES data enable us to sort the individual resonant mechanisms at the Cu2p edge in more detail than recently anticipated (Brookes et al., 2015). We discuss our data in the context of the recent discussion about the applicability of the Zhang-Rice model (Chen et al., 2013).}, language = {en} } @misc{NaumannReckGargourietal., author = {Naumann, Franziska and Reck, Johanna and Gargouri, Hassan and Gruska, Bernd and Bl{\"u}mich, Adrian and Mahmoodinezhad, Ali and Janowitz, Christoph and Henkel, Karsten and Flege, Jan Ingo}, title = {In situ real-time and ex situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition}, series = {Journal of Vacuum Science and Technology B}, volume = {38}, journal = {Journal of Vacuum Science and Technology B}, number = {1}, issn = {0734-211X}, doi = {10.1116/1.5122797}, pages = {10}, abstract = {In situ real-time ellipsometry (irtE) with a very high time resolution of 24 ms was applied to monitor the inductively coupled plasma enhanced atomic layer deposition (ALD) process of Al₂O₃ thin films to precisely resolve each step of the ALD process and its complete cycle. The influence of plasma power, plasma pulse duration, and deposition temperature on the film growth characteristics was investigated. Ex situ ellipsometry [UV-VIS-NIR-SE (ultraviolet-visible-nearinfrared-spectroscopic ellipsometry) and IR-SE (infrared spectroscopic ellipsometry)] and x-ray photoelectron spectroscopy revealed the bulk properties (thickness, refractive index, chemical composition, and carbon incorporation) of the films, which together with the in situ results are compared to those of the films prepared by thermal ALD (T-ALD). The ICPEALD (inductively coupled plasma enhanced ALD) films were deposited at substrate temperatures between 80 and 250 °C and the role of plasma power (50-300 W) and its pulse duration (1-20 s) was investigated at 250 °C. The reference T-ALD layers were prepared at 200 °C. The ICPEALD process of Al₂O₃ shows an increased growth rate, and the produced films exhibit higher carbon contaminations than the T-ALD Al₂O₃ films. Plasma pulse times of up to 15 s further increase the content of carbon and CH species; at the same time, the refractive index decreases. The optical properties of ICPEALD deposited Al₂O₃ films are comparable with those of the T-ALD films for low plasma power and short plasma pulse durations. For the ICPEALD films, UV absorption is found and it is dependent on the deposition parameters. irtE resolves process effects that correlate with the bulk properties of Al₂O₃, such as impurities and oxygen deficiencies.}, language = {en} } @misc{JanowitzMahmoodinezhadNaumannetal., author = {Janowitz, Christoph and Mahmoodinezhad, Ali and Naumann, Franziska and Plate, Paul and Henkel, Karsten and Flege, Jan Ingo}, title = {XPS and UPS investigation of an ALD prepared Al2O3/ZnO heterojunction}, series = {Verhandlungen der DPG - SurfaceScience21}, volume = {2021}, journal = {Verhandlungen der DPG - SurfaceScience21}, publisher = {Deutsche Physikalische Gesellschaft e.V.}, address = {Bad Honnef}, abstract = {The band alignment of two large band gap oxides was studied by a combination of XPS and UPS using consecutive sputter steps to unravel the electronic structure and elemental composition of each layer and the interface region. An Al2O3/ZnO heterointerface (10 nm Al2O3 on 59 nm ZnO) was grown on top of a Si single crystal substrate by consecutive thermal and plasma-assisted atomic layer deposition (ALD) respectively. The valence band maximum of Al2O3 was found to be 1.1 eV below that of ZnO, the conduction band minimum 2.3 eV above, resulting in a type-I staggered heterojunction. A reduction of ZnO to elemental Zn in the interface region was detected by the apparent shoulder of the Zn 2p and 2s core levels and by the Zn LMM Auger. This suggests an ALD interface formation mechanism different from previous models identified for other heterointerfaces.}, language = {en} } @misc{MahmoodinezhadMoralesNaumannetal., author = {Mahmoodinezhad, Ali and Morales, Carlos and Naumann, Franziska and Plate, Paul and Meyer, Robert and Janowitz, Christoph and Henkel, Karsten and Kot, Małgorzata and Flege, Jan Ingo}, title = {Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma}, series = {Verhandlungen der DPG - SurfaceScience21}, volume = {2021}, journal = {Verhandlungen der DPG - SurfaceScience21}, publisher = {Deutsche Physikalische Gesellschaft e.V.}, address = {Bad Honnef}, abstract = {Indium oxide thin films were deposited on Si (100) by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium (TMIn) and oxygen plasma (O2) in a low-temperature range of 80 to 200 °C. The In2O3 layers were characterized by in-situ spectroscopic ellipsometry (SE), ex-situ X-ray photoelectron spectroscopy (XPS) and electrical measurements. The SE data show a growth rate of 0.56 {\AA}/cycle within the ALD window (100 to 150 °C) with a thickness inhomogeneity of ≤1.2\%. In addition, the highest refractive index is 2.07 (at 632.8 nm) for the layer grown at 150 °C, and the films exhibit indirect and direct band gaps of 2.8±0.1 eV and 3.3±0.2 eV, respectively. XPS characterization indicates no carbon incorporation and a temperature-dependent off-stoichiometry of the layers. The chemical analysis of the In 3d and O 1s core levels confirms the formation of In-O bonds and suggests the additional presence of hydroxyl groups and defects. With increasing temperature, the contribution of OH groups and defects decreases whereas that of In-O bonds increases. Notably, higher growth temperatures result in an indium rich phase within the layers.}, language = {en} } @misc{MahmoodinezhadJanowitzNaumannetal., author = {Mahmoodinezhad, Ali and Janowitz, Christoph and Naumann, Franziska and Plate, Paul and Gargouri, Hassan and Henkel, Karsten and Schmeißer, Dieter and Flege, Jan Ingo}, title = {Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition}, series = {Journal of Vacuum Science and Technology A}, volume = {38}, journal = {Journal of Vacuum Science and Technology A}, number = {2}, issn = {0734-2101}, doi = {10.1116/1.5134800}, abstract = {Gallium oxide (Ga2O3) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) applying a capacitively coupled plasma source where trimethylgallium (TMGa) as the gallium precursor and oxygen (O2) plasma were used in a substrate temperature (Ts)in the range of 80-200 °C. TMGa exhibits high vapor pressure and therefore facilitates deposition at lower substrate temperatures. The Ga2O3 films were characterized by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), and capacitance-voltage (C-V) measurements. The SE data show linear thickness evolution with a growth rate of ∼0.66 {\AA} per cycle and inhomogeneity of ≤2\% for all samples. The refractive index of the Ga2O3 thin films is 1.86 ± 0.01 (at 632.8 nm) and independent of temperature, whereas the bandgap slightly decreases from 4.68 eV at Ts of 80 °C to 4.57 eV at 200 °C. XPS analysis revealed ideal stoichiometric gallium to oxygen ratios of 2:3 for the Ga2O3 layers with the lowest carbon contribution of ∼10\% for the sample prepared at 150 °C. The permittivity of the layers is 9.7 ± 0.2 (at 10 kHz). In addition, fixed and mobile oxide charge densities of 2-4E12 and 1-2E12 cm-2, respectively, were observed in the C-V characteristics. Moreover, the Ga2O3 films show breakdown fields in the range of 2.2-2.7 MV/cm. Excellent optical and electrical material properties are maintained even at low substrate temperatures as low as 80 °C. Hence, the TMGa/O2 PEALD process is suitable for electronic and optoelectronic applications where low-temperature growth is required.}, language = {en} } @misc{JanowitzSchmeisser, author = {Janowitz, Christoph and Schmeißer, Dieter}, title = {Out-of-plane electronic contributions in Bi-cuprates studied by resonant photoelectron spectroscopy at the Cu 2p edge}, series = {Verhandlungen der DPG}, journal = {Verhandlungen der DPG}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {403 -- 403}, abstract = {In high-temperature superconductors with a layered crystal structure out-of-plane contributions are often neglected, while the copper-oxygen planes are commonly considered to dominate the electronic properties around the Fermi energy. Here we report on a resonant photoemission study of (Pb,Bi)2201 and (Pb,Bi)2212 single crystals to unravel the resonant decay mechanisms at the Cu 2p absorption edge. We demonstrate a pronounced polarization dependence caused by two different Auger processes for in-plane and out-of-plane orientations. We deduce that the lowest energy valence state being involved in the two Auger processes, consists of three-dimensional contributions by admixed out-of-plane Sr, Bi, and O 2p states. It also suggests that the doping-induced charge density is dynamic, fluctuating within the Cu-O plane, and spills out perpendicular to it. C. Janowitz and D. Schmeißer, Supercond. Sci. Technol. 31, 045006 (2018)}, language = {en} } @misc{JanowitzSchmeisser, author = {Janowitz, Christoph and Schmeißer, Dieter}, title = {Significance of out-of-plane electronic contributions in Bi-cuprates studied by resonant photoelectron spectroscopy at the Cu2p-edge}, series = {Superconductor Science and Technology}, volume = {31}, journal = {Superconductor Science and Technology}, number = {4}, issn = {0953-2048}, doi = {10.1088/1361-6668/aaadf6}, pages = {11}, abstract = {In high-temperature superconductors with a layered crystal structure, the copper-oxygen planes are commonly considered to dominate the electronic properties around the Fermi energy. As a consequence, out-of-plane contributions are often neglected in the description of these materials. Here we report on a resonant photoemission study of Pb₀,4Bi1,₆Sr₂,₀CaCu₂0₈ ((Pb, Bi)-2212) and Pb₀,₆Bi₁,₄Sr₁.5La₀.5Cu0₆ ((Pb, Bi)-2201)) single crystals to unravel the resonant decay mechanisms at the Cu2p absorption edge. We find evidence for a pronounced polarization dependence caused by two different Auger processes for in-plane and out-of-plane orientations. We deduce that the lowest energy valence state—which is involved in the two Auger processes—consists of three-dimensional contributions by admixed out-of-plane Sr, Bi, and 02p states. It also suggests that the doping-induced charge density is dynamic, fluctuating within the Cu-0 plane, and spills out perpendicular to it. This suggests that out-of-plane electronic degrees of freedom should be included in future consistent theoretical models of these materials.}, language = {en} } @misc{SchmeisserHenkelJanowitz, author = {Schmeißer, Dieter and Henkel, Karsten and Janowitz, Christoph}, title = {Ionicity of ZnO - a key system for transparent conductive oxides}, series = {epl : a letters journal exploring the frontiers of physics}, volume = {123}, journal = {epl : a letters journal exploring the frontiers of physics}, number = {2}, issn = {1286-4854}, doi = {10.1209/0295-5075/123/27003}, pages = {27003-p1 -- 27003-p7}, abstract = {The electronic structure of ZnO is dominated by coexisting electron and ionic states/bonds caused by charge polarization and self-trapping phenomena of the valence charges. Their interplay manifests itself in intrinsic electronic defects which have different degree of spatial localization and electronic correlation. The relative abundance of intrinsic defects can be determined by the ionicity factor fi and its value can be derived from three independent experimental procedures in a consistent way. This approach also explains the complex satellite features in the XPS and XAS data. Ionicity and satellite formation are two experimental findings which can be explained consistently in the same context of mixed-atomic valence states and intrinsic electronic defects.}, language = {en} } @incollection{HenkelHaeberleMuelleretal., author = {Henkel, Karsten and Haeberle, J{\"o}rg and M{\"u}ller, Klaus and Janowitz, Christoph and Schmeißer, Dieter}, title = {Preparation, properties and electronic structure of SnO₂}, series = {Single Crystals of Electronic Materials}, booktitle = {Single Crystals of Electronic Materials}, editor = {Fornari, Robert}, publisher = {Elsevier, Woodhead Publishing}, address = {Duxford}, isbn = {978-0-08-102096-8}, pages = {547 -- 572}, abstract = {This chapter reports about tin oxide (SnO₂), a material which belongs to the transparent conducting oxide family and is best characterized by its high conductivity, high carrier mobility, and the ability to form p-type conductivity. We correlate these properties in terms of localized intrinsic electronic defect states which are resolved by resonant photoelectron spectroscopy measurements. We describe SnO₂ in terms of an inhomogeneous, mixed-ionic-covalent semiconductor in which these intrinsic electronic defects state are stabilized.}, language = {en} } @misc{HaeberleMachulikJanowitzetal., author = {Haeberle, J{\"o}rg and Machulik, Stephan and Janowitz, Christoph and Manzke, Recardo and Gaspar, Diana and Barquinha, Pedro and Schmeißer, Dieter}, title = {Gap states in the electronic structure of SnO2 single crystals and amorphous SnOxthin films}, series = {Journal of Applied Physics}, volume = {120}, journal = {Journal of Applied Physics}, number = {10}, issn = {0021-8979}, doi = {10.1063/1.4962313}, pages = {105101-1 -- 105101-13}, abstract = {The electronic structure of a SnO2 single crystal is determined by employing resonant photoelectron spectroscopy. We determine the core level, valence band, and X-ray absorption (XAS) data and compare these with those of amorphous SnOx thin films. We find similar properties concerning the data of the core levels, the valence band features, and the absorption data at the O1s edge. We find strong signals arising from intrinsic in-gap states and discuss their origin in terms of polaronic and charge-transfer defects. We deduce from the XAS data recorded at the Sn3d edge that the Sn4d10 ground state has contributions of 4d9 and 4d8 states due to configuration interaction. We identify localized electronic states depending on the strength of the 4d-5s5p interaction and of the O2p-to-Sn4d charge-transfer processes, both appear separated from the extended band-like states of the conduction band. For the amorphous SnOx thin films, significant differences are found only in the absorption data at the Sn3d-edge due to a stronger localization of the in-gap states.}, language = {en} } @misc{SchmeisserJanowitz, author = {Schmeißer, Dieter and Janowitz, Christoph}, title = {The Cu2p-edge of superconducting BiSrCu-Oxides studed by resonant Photoelectron Spectroscopy}, series = {Synchrotron Radiation in Natural Science : Bulletin of the Polish Synchrotron Radiation Society}, volume = {15}, journal = {Synchrotron Radiation in Natural Science : Bulletin of the Polish Synchrotron Radiation Society}, number = {1-2}, issn = {1644-7190}, pages = {S. 35}, language = {en} } @inproceedings{HaeberleGasparBarquinhaetal., author = {Haeberle, J{\"o}rg and Gaspar, Diana and Barquinha, Pedro and Pereira, Lu{\´i}s and Martins, Rodrigo and Fortunato, Elvira and Machulik, Stephan and Janowitz, Christoph and Manzke, Recardo and Schmeißer, Dieter}, title = {The Electronic Structure of amorphuos SnOx thin films and SnO2 single crystals}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, issn = {0420-0195}, pages = {S. 271}, abstract = {We compare the electronic properties of amorphous p-type SnOx thin film grown by rf magnetron sputtering with those of n-type SnO2 single crystals grown by cvt. We use resPES to study the electronic band structure. We measure the core levels, the VB PES data, partial Integrated Yield (pIY) and the XAS absorption data. From the resPES data recorded at the O1s and the Sn3d edges we derive the VB pDOS and the CB pDOS . The differences are most pronounced in the position of the VBM as for the a-SnOx films there appears a band closer to the Fermi energy. In addition for the SnOx we find in the XAS and pIY data a significant peak that appears right at the Fermi energy. This peak is absent in the single crystalline data. We attribute this to a change in the configuration of the Sn4d states to form a 4d8 configuration instead of 4d9 and 4d10 configurations which are identified in the single crystalline data.}, language = {en} } @inproceedings{HaeberleGasparBarquinhaetal., author = {Haeberle, J{\"o}rg and Gaspar, Diana and Barquinha, Pedro and Machulik, Stephan and Janowitz, Christoph and Galazka, Zbigniew and Schmeißer, Dieter}, title = {A spectroscopic comparison of AOS thin films and TCO single crystals}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {Amorphous oxide semiconductors (AOS) and transparent conductive oxides (TCO) are today one of most attractive fields of research in many industrial products, like e.g. high definition, low cost, transparent, and flexible displays. We got the unique possibility to measure a-GIZO and a-SnOx thin films and compare their electronic properties with those of In2O3, Ga2O3, ZnO, and SnO2 single crystals. We use resPES to study the electronic properties. We report on the core levels, the VB PES data, partial Integrated Yield (pIY) and the XAS absorption data. From these we are able to derive the elemental ratio, the pDOS as well as the band scheme. At the O1s resonance we observe multiple Auger processes from which we deduce that a band of localized defect states is located between the Fermi energy and the CBM. The resonant profiles taken at the corresponding metal edges indicate that metal states are involved in the DOS.}, language = {en} } @misc{JanowitzSchererMohamedetal., author = {Janowitz, Christoph and Scherer, Valentina and Mohamed, Mansour and Krapf, Alica and Dwelk, Helmut and Manzke, Recardo and Galazka, Zbigniew and Uecker, Reinhard and Irmscher, Klaus and Fornari, Robert and Michling, Marcel and Schmeißer, Dieter}, title = {Experimental electronic structure of In2O3 and Ga2O3}, series = {New Journal of Physics}, volume = {13}, journal = {New Journal of Physics}, number = {8}, issn = {1367-2630}, pages = {085014}, language = {en} } @misc{HaeberleRichterGalazkaetal., author = {Haeberle, J{\"o}rg and Richter, Matthias and Galazka, Zbigniew and Janowitz, Christoph and Schmeißer, Dieter}, title = {Resonant Photoemission at the O1s threshold to characterize In2O3 single crystals}, series = {Thin Solid Films}, volume = {2014}, journal = {Thin Solid Films}, number = {555}, issn = {0040-6090}, doi = {10.1016/j.tsf.2013.03.036}, pages = {53 -- 56}, abstract = {We report on spectroscopic investigations on In2O3 single crystals. We focus on the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy. We analyze the electronic structure and assign the O2p to build the valence band and both, O2p and In5s5p states to contribute to the conduction band (CB). We determine the partial density of states for the valence and CBs and find a strong hybridization of O2p and In5s states. This is deduced from constant final state spectra on the O-KLL-Auger over the O K-edge and In M4,5-edge and a comparison to the corresponding X-ray absorption spectroscopy data.We also identify several types of defects. A broad band of oxygen derived defects is identified that extends throughout the gap. These are attributed to small polarons which cause an anti-resonance in the valence states around the O1s threshold. In addition, a separate Auger decay at resonance indicates the existence of localized charge transfer states which involves localized In5s5p states.}, language = {en} } @inproceedings{HaeberleRichterSchmeisseretal., author = {Haeberle, J{\"o}rg and Richter, Matthias and Schmeißer, Dieter and Galazka, Zbigniew and Janowitz, Christoph}, title = {Resonant Photoemission at the O1s threshold to characterize In2O3 single crystals}, series = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, booktitle = {Verhandlungen der Deutschen Physikalischen Gesellschaft}, publisher = {Deutsche Physikalische Gesellschaft}, address = {Bad Honnef}, abstract = {We report on spectroscopic investigations on In2O3 single crystals. We focus on the detailed analysis of the O1s resonance profile by resonant photoelectron spectroscopy (resPES). From these we analyze the electronic structure and assign the O2p- and In5sp state to build the valence band and the conduction band in different contributions, respectively. This is deduced from constant final state spectra on the O-KLL-Auger along the O K-edge and In M4,5-edge and a comparison to the corresponding X-ray absorption spectroscopy data. We also identify several types of defects. A broad band of oxygen derived defects is identified in the valence band and extends throughout the gap. Small polarons are attributed to cause an anti-resonance in the constant initial states around the O1s threshold. In addition, an Auger decay separated by the O-KLL is present at O-K resonance and indicates the existence of localized charge transfer states which involves In5sp states. Finally, we are able to distinguish two different oxygen species from the resPES data. One corresponds to theintrinsic In2O3 structure and the other is a non-corresponding species.}, language = {en} } @misc{MahmoodinezhadMoralesNaumannetal., author = {Mahmoodinezhad, Ali and Morales, Carlos and Naumann, Franziska and Plate, Paul and Meyer, Robert and Janowitz, Christoph and Henkel, Karsten and Kot, Małgorzata and Z{\"o}llner, Marvin Hartwig and Wenger, Christian and Flege, Jan Ingo}, title = {Low-temperature atomic layer deposition of indium oxide thin films using trimethylindium and oxygen plasma}, series = {Journal of Vacuum Science and Technology A}, volume = {39}, journal = {Journal of Vacuum Science and Technology A}, number = {6}, issn = {0734-2101}, doi = {10.1116/6.0001375}, abstract = {Indium oxide (InxOy) thin films were deposited by plasma-enhanced atomic layer deposition (PEALD) using trimethylindium and oxygen plasma in a low-temperature range of 80-200 °C. The optical properties, chemical composition, crystallographic structure, and electrical characteristics of these layers were investigated by spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD), as well as current-voltage and capacitance-voltage measurements. The SE results yielded a nearly constant growth rate of 0.56 {\AA} per cycle and a thickness inhomogeneity of ≤1.2\% across 4-in. substrates in the temperature range of 100-150 °C. The refractive index (at 632.8 nm) was found to be 2.07 for the films deposited at 150 °C. The PEALD-InxOy layers exhibit a direct (3.3 ± 0.2 eV) and an indirect (2.8 ± 0.1 eV) bandgap with an uptrend for both with increasing substrate temperature. Based on XPS characterization, all InxOy samples are free of carbon impurities and show a temperature-dependent off-stoichiometry indicating oxygen vacancies. XRD diffraction patterns demonstrate an onset of crystallization at 150 °C. Consistent with the optical, XPS, and XRD data, the films deposited at ≥150 °C possess higher electrical conductivity. Our findings prove that a low-temperature PEALD process of InxOy is feasible and promising for a high-quality thin-film deposition without chemical impurities on thermally fragile substrates.}, language = {en} } @misc{JanowitzMahmoodinezhadKotetal., author = {Janowitz, Christoph and Mahmoodinezhad, Ali and Kot, Małgorzata and Morales, Carlos and Naumann, Franziska and Plate, Paul and Z{\"o}llner, Marvin Hartwig and B{\"a}rwolf, Florian and Stolarek, David and Wenger, Christian and Henkel, Karsten and Flege, Jan Ingo}, title = {Toward controlling the Al2O3/ZnO interface properties by in situ ALD preparation}, series = {Dalton Transactions}, volume = {51}, journal = {Dalton Transactions}, issn = {1477-9234}, doi = {10.1039/D1DT04008A}, pages = {9291 -- 9301}, abstract = {An Al2O3/ZnO heterojunction was grown on a Si single crystal substrate by subsequent thermal and plasma-assisted atomic layer deposition (ALD) in situ. The band offsets of the heterointerface were then studied by consecutive removal of the layers by argon sputtering, followed by in situ X-ray photoelectron spectroscopy. The valence band maximum and conduction band minimum of Al2O3 are found to be 1.1 eV below and 2.3 eV above those of ZnO, resulting in a type-I staggered heterojunction. An apparent reduction of ZnO to elemental Zn in the interface region was detected in the Zn 2p core level and Zn L3MM Auger spectra. This suggests an interface formation different from previous models. The reduction of ZnO to Zn in the interface region accompanied by the creation of oxygen vacancies in ZnO results in an upward band bending at the interface. Therefore, this study suggests that interfacial properties such as the band bending as well as the valence and conduction band offsets should be in situ controllable to a certain extent by careful selection of the process parameters.}, language = {en} }